Академический Документы
Профессиональный Документы
Культура Документы
FREE SUBSCRIPTION
ARTICLE ARCHIVES
CURRENT CONTENT
NEXT ISSUE
SUBMISSIONS ARTICLE ARCHIVES Home
ADVISORY BOARD
CONTACT STAFF Flowmetering in Ultra-Pure Applications
PAST ISSUES
EDITORIAL CALENDAR
Run New Search
ADVERTISING INDEX
by: Walt Boyes
Pages: 41; September, 2000
2003 Process Industries
Exposition The enormous expansion of the semiconductor industry has created a market
March March 31 - April 2, 2003 for flow control devices all its own. There are significant differences between
New Orleans, LA
INTERPHEX the semiconductor "ultra-pure" industry, and other high-purity flow control
March March 31 - April 2, 2003 industries, such as bottled water, pharmaceutical or food. There are
New York, NY similarities, but enough differences exist that make it necessary to treat
2003 Offshore Technology applications in these markets differently.
Conference
May 5-8
Houston, TX In the food and pharmaceutical industries, there are basic standards of •A
AWWA cleanliness, along with the ability to be Cleaned-in-Place, that a manufacturer
June 15-19
•C
Anaheim, CA
of flowmeters or controls must meet. Usually, stainless steel is the material of •F
Semicon West choice for both piping and sensors. In addition, in the food industry, the object
July 14-16 is to keep a reasonably clean product, with a relatively short shelf life, from
•F
San Francisco, CA becoming contaminated during processing. •G
Search for More Events •L
In the pharmaceutical industry, there are additional criteria, including •M
maintaining chemical purity, documentation and validation and accuracy in •P
batch processing applications. •P
•P
Semicon Strict •R
F
It is in the semiconductor industry, however, that we find the most rigorous •S
requirements for material compatibility and purity, product performance and •S
price sensitivity. •S
•S
In the manufacture of semiconductor wafers, the presence of contaminating
material in the submicron range can ruin an entire run of chips. This has led to
•T
an increasing search for piping, fittings and valves and meters that are •T
compatible with the widest possible range of fluids, from ultra-pure deionized •V
water, to high-purity chemicals, to silicon slurry. The industry has migrated from
commonly using PVC to PVDF (often sold under its original trade name,
Kynar), to PTFE (originally, Teflon), to PFA. Now, the semiconductor industry
uses these three basic materials: PVDF, PTFE and PFA.
PFA is preferred wherever possible, and PVDF is only used where either PTFE
or PFA are unsuitable for mechanical reasons or expense. For example, PTFE
is very hard to injection mold, while PVDF and PFA are relatively simple
molding materials. PTFE machines easily, but does not take pressure well, and
http://www.flowcontrolnetwork.com/article_index.cfm?article=312 4/4/03
FlowControl Network Page 2 of 3
The semiconductor industry has long looked for a flowmeter that would meet
some very basic requirements:
• No moving parts;
Three of a Kind
Two basic methods are being used to make Transit-Time work in ultra-pure
flows: embed the sensor in an axial or coaxial spool section; or make a sensor
assembly capable of being non-invasively attached directly to a piece of
existing PFA pipe or tubing. These meters only handle clean liquids, and are
not low cost. (The cost of using Transit-Time flow in ultra-pure applications has
reduced significantly over the last four years.)
The issue of reducing the cost of high-purity measurement of flow is one that
still needs to be addressed. A PVDF paddlewheel is still commonly used in
applications, even where the product is inappropriately applied. There are
plenty of stories about paddlewheels being used in scrubber slurry flow
applications. They are used because they are inexpensive.
http://www.flowcontrolnetwork.com/article_index.cfm?article=312 4/4/03
FlowControl Network Page 3 of 3
http://www.flowcontrolnetwork.com/article_index.cfm?article=312 4/4/03