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WHAT WE MEAN BY IC
An IC consists of a single-crystal chip of Si , typically 50 by 50 mils in cross section, containing both active and passive elements. Such circuits are produced by the some processess used to fabricate individual transistors and diodes. These processes include epitaxial growth, masked impurity diffusion, oxide growth, and oxide etching, using photolithography for pattern definition. A method of batch processing is employed which offers excellent repeatability and is adaptable to the production of large no. of ICs at low cost.
IC TECHNOLOGY
Fabrication of ic is based on materials, processes, and design principles which constitute a highly developed semiconductor technology. The basic structure of an ic consists of four distinct layers of material.
1. 2. The bottom layer (6 mils thick) is p-type Si and serves as a Substrate upon which the IC is to be built. Thin n-type material which is grown as a single-crystal extension of the substrate. SiO2 and it also provides protection of semiconductor surface against contamination. In the region where difusion is to take place, the SiO2 layer is etched away, leaving the rest of the wafer protected against diffusion. To permit selective etching, the SiO2 Metallic (Al) layer is added to supply the necessary interconnections between the componenets.
3.
4.
Yield
No. of good chips per wafer Y 100 % Total number of chips per wafer Wafer cost Die cost Dies per wafer Die yield
wafer diameter/22 wafer diameter Dies per wafer die area 2 die area
Die Cost
Single die
Wafer
Going up to 12 (30cm)
5
IC Structure
We will consider only Si-based technologies. Although GaAs is also used to implement VLSI chips, Si by far the most important material, featuring a wide range of cost-performance tradeoffs.
Current is due to two distinct phenomena : Carriers drift in an electric field(this conduction current is also available in a metal) Carriers diffuse if a concentration gradient exists ( a phenomenon which does not take place in a metal).
Carriers are continuously being generated ( due to thermal creation of hole-electron pairs) and are simultaneously disappearing (due to recombination). The fundamental law governing the flow of charge is called the CONTINUTY EQUATION. It is formulated by considering that charge can neither be created nor destroyed if generation, recombination, drift and diffusion are all taken into account. If minority carriers ( say, holes ) are injected into a region containing majority carriers (say an n-type bar), then usually the injected minority concentration is very small compared with the density of the majority carriers. For this low level injection condition the minority current is predominantly due to diffusion. The total majority-carrier flow is the sum of a drift and a diffusion current. The majority conduction current results from a small electric field internally created within the
LITHOGRAHY
Lithography is the process of transferring patterns of geometric shapes in a mask to a thin layer of radiation-sensitive material (called resist) covering the surface of a semiconductor wafer.
PROCESS OF LITHOGRAPHY
ADVANTAGES OF ICs
Low cost Small size High reliabilty Improved Performance
IC DESIGN PHILOSOPHY
IC fab tech poses constraints on - and provides opportunity to the cct designer. Thus, while chip-area consideration dictate that large- and even moderate-value resistors to be avoided. Constant-current sources are readily available. Large capacitors are not available, otherwise the no. of chip terminals and hence its cost increases. Very small capacitors, in the pf and fraction of picofarad range, however, are easy to fabricate in IC MOS technology and can be combined with MOS amplifiers and MOS switches to realize a wide range of signal processing functions, both analog and digital.
Using these technique s, it is possible to produce transistors, diodes, resistors, capacitors, and aluminium interconnection on the same chip