INDIAN INSTITUTE OF TECHNOLOGY

ROORKEE
DEPARTMENT OF MECHANICAL AND INDUSTRIAL ENGINEERING

SEMINAR ON

STATE-OF-THE-ART IN 3DMICROMACHINING
Supervisors :-

Dr. A. K. Sharma Dr. D. B. Karunakar

Presented By:Faraz Ansari Enrl. No. 11540004 M.Tech II Year P&I Systems Engineering IIT ROORKEE

MICROMACHINING ?
Processes which produce fine chips or machined features in the range of 1 to 999 m CIRP, 2000)
.(

Masuzawa, T., 2000, State of the art of micromachining, Annals of CIRP, 49 (2), 621-628

Mechanical Force

Based on material removal

Melting & Evaporation Ablation

Micromachining principle

Dissolution

Solidification

Based on material addition

Lamination Recomposition

TYPICAL

3D - MICROMACHINING
PROCESSES

MICRO ELECTRODISCHARGE MACHINING (MEDM)

Material removal due to the thermal erosive action of electrical discharges (EDM). The Unit Removal (UR) is a crater formed by one pulse of the discharge.
In MEDM, small UR is achieved by reducing amount of energy per pulse.

Major Processes and applications in Electro Discharge micromachining

PROCESS MAJOR APPLICATIONS First reported / initiated by

EDM

In mould-making, tool and die industries, making of prototype and production parts.

Dr. B.R. Lazarenko and Dr. N.I. Lazarenko in 1943.

Wire EDM

In aerospace, nuclear and automotive Introduced in 1970s.[2] industries for hard materials like Reported by Masuzawa, T.[3] titanium and zirconium.[1] Micro tools for micro-and nano-machining [4] Reported by Masuzawa et. al..[3]

WEDG

1. 2. 3. 4.

Spur, G., Schenbeck, J., Anode Erosion in Wire EDM-A Theoretical Model, CIRP, Annals, Manufacturing Technology 42(1), 1993, 253-256. Weingartner, E., Jaumann,S., Kuster, F., Boccadoro, M., Special Wire guide for on machining Wire Electric Discharge Dressing of Metal Bonded Grinding Wheels, CIRP AnnalsManufacturing Technology- 59 (2010), 227-230. Masuzawa, T., Fujino,M., Kobayashi, K., Wire Electro discharge grinding for micromachining, Annals of the CIRP 34(1), 1985, 431-434. Mcgeough, J., Khayry, A., Munro, U., Theoretical and experimental Investigation of the Relative Effects of Spark Erosion and electrochemical Di ssolution in Electrochemical Arc Machining, Annals of the CIRP, 1983 vol.32(1), 113-116.

3-D EDMed components

EDM with assistance of CAD/CAM Technology EDM through layer by layer scanning using a servo controlled mechanism

(Rajurkar, K. P., 2000, 3D Micro-EDM using CAD/CAM, Annals of CIRP, 49 (1), 127-130)

(Tong, H., Li, Y., Wang, Y., Yu, D., 2008, Servo scanning 3D micro-EDM based on macro / micro dual feed spindle, Int. journal of Machine tools & manufacture, 48, 858-869)

ELECTROCHEMICAL MICROMACHINING (ECMM)

It is a chemical etching process in which the anode (workpiece) gets dissolved due to the electrolytic action. The workpiece material should be conducting. It can easily micro-machine 3D structures if coupled with 3axes CNC controlled setup.

This is reported using 3-D movement of micro tool

Bhattacharyya, B., Munda, J., Malapati, M., Advancement in electrochemical micro-machining, Int. journal of Machine tools & manufacture, 44, 2004, 1577-1589.

Micro groove cut by wire ECM

Kim,B.H., Na, C.W., Lee, Y. S., Choi, D.K., Chu, C.N., Micro Electrochemical machining of 3-D Micro structure using H2SO4, Journal of material processing technology 187, 2007, 348-353

LASER MICROMACHINING
Features:

It is a very popular technique.

It can be used on any non reflecting material. The process is however costly and cause harm if not carefully handled.

3-D FEATURES MACHINED USING LASER

Tilted view of an array of micro-lenses. 400 m 400 m

Spherical convex microstructure cut with laser

(Mullenborn, M., Dirac, H., Peterson, J.W., Bouwstra, S., Fast three dimensional laser micromachining of silicon for microsystems, Sensors & Actuators, 52(A), 1996, 121-125)

(Lee, Y. C., Chen, C. M., Wu, C. Y., 2005, A new excimer laser micromachining method for axially symmetric 3D microstructures with continuous surface profiles, Sensors & Actuators A, 117, 349-355)

ULTRASONIC MICRO MACHINING(USMM)

It is a mechanical process. Mainly used for brittle materials. The material removal is due to abrasive media used, to which the ultrasonic vibrations are given. It can be used on both conducting as well as non conducting material.

3-D FEATURES MACHINED USING USM

Microstructure machined using fine grain (3 5 m) abrasive media. Microfeature machined using MEDM

(Boy, J. J., Andrey, E., Boulouize, A., Malek, C. K., 2010, Developments in microultrasonic machining at FEMTO-ST, Int. J Advance manufacturing Technology, 47, 37-45)

(Masuzawa, T., Tonshoff, H. K., 1997, Three-Dimensional Micromachining by Machine Tools, Annals of the CIRP, 46 (2), 621-628)

ELECTROCHEMICAL DISCHARGE MACHINING (ECDM)

A hybrid technique combining the principles of EDM and ECM. Here the material removal occurs due to the thermal action of energy created by the electric sparks and chemical etching. The process is primarily used for non conducting materials.

3-D FEATURES MACHINED USING ECDM

Micromachined features on glass using ECDM

Cao, X. D., Kim, B. H., Chu, C. N., 2009, Microstructuring of glass with features less than100m by electrochemical discharge machining, Precision Engineering, 33, 459-465

Cao, X. D., Kim, B. H., Chu, C. N., 2009, Microstructuring of glass with features less than100m by electrochemical discharge machining, Precision Engineering, 33, 459-465

OTHER PROCESSES
LIGA CONVENTIONAL METHOD INJECTION MOLDING And many more.

SOME MORE EXAMPLES

Micro-gear pump rotor fabricated by LIGA

Glass mask machined using milling machine

(Masuzawa, T., State of the art of micromachining, Annals of CIRP, 49 (2),2000, 621-628.)

1 mm
(Takeuchi, Y., Sata, T., Ultraprecision 3D micromachining of glass, Annals of CIRP 45(1), 1996, 401-404)

A 3D product made by injection molding

(Piotter, V., Benzler, T., Hanemann, T., Ruprecht, R., Wollmer, H., HauBett, J., 1999, Manufacturing of Micro Parts by Micro Molding Techniques, Proc. of 1st EUSPEN Conference, Bremen, 1, 494-497)

COMPARISON BETWEEN DISCUSSED PROCESSES

PROCESS ADVANTAGES EDM i. Can machine almost all conducting material. Non-contact method. Hardness is not the limit for material removal Faster process LIMITATIONS i. ii. Formation of Heat Affected Zone. Cannot be used for non conducting materials. INITIATED BY By Lazarenko & Lazarenko in 1943 at moscow university.

ii.

ECM

i.

i.

ii.

ii.
LASER i. Good surface finish

Chemical compatibility By W. Gussef in 1929 & can be used for conducting materials only. Chemical causes environmental problems In 1965 at Western electric engineering research centre

i. Non reflecting material ii. Low efficiency iii. High power consumption

PROCESS

ADVANTAGES

LIMITATIONS

INITIATED BY

USM

Can machine both conducting as well as non conducting materials

costly

Early 1950s

ECDM

Brittle and non conducting material. Simple and comparatively cheaper setup
Cheaper

Not suitable for conducting material. Non reproducibility

Kurafuji & Suda (1968)

CONVENTIONAL MILLING

Rough surface, Limited material

Takeuchi and Sata (1996)

GAPS
The process discussed earlier such as LBM, EDM, ECDM and WEDM are primarily suited for particular materials. The equipment used in these processes are costly and require adequate skill and control. With a view to overcome these limitations there is need to develop and look into other processes, which have the potential to overcome some of these limitations.

RESEARCH SCOPE
Research scope exists since, Need for development of verstile process. Developing hybrid processes for overcoming some of the limitations of the existing processes are required. To increase the efficiency of existing processes. Development of cheaper alternatives are required.

REFERENCES
1. Masuzawa, T., State of the art of micromachining, Annals of CIRP, 49 (2),2000, 621-628. 2. Jain, V.K., Introduction to micromachining, Narosa publications, 2010. 3. Snoyes, R., 1986, Current trends in non-conventional material removal processes, Annals of CIRP, 35 (2), 467-480. 4. Wuthrich, R., Fascio, V.,2005, Machining of nonconducting materials using electrochemical discharge phenomenon-an overview, Int. journal of Machine tools & manufacture, 45, 1095-1108. 5. Spur, G., Schenbeck, J., Anode Erosion in Wire EDM-A Theoretical Model, CIRP, Annals, Manufacturing Technology 42(1), 1993, 253-256.

6. Weingartner, E., Jaumann,S., Kuster, F., Boccadoro, M., Special Wire guide for on machining Wire Electric Discharge Dressing of Metal Bonded Grinding Wheels, CIRP Annals- Manufacturing Technology- 59 (2010), 227-230 7. Masuzawa, T., Fujino,M., Kobayashi, K., Wire Electro discharge grinding for micromachining, Annals of the CIRP 34(1), 1985, 431-434. 8. Mcgeough, J., Khayry, A., Munro, U., Theoretical and experimental Investigation of the Relative Effects of Spark Erosion and electrochemical Dissolution in Electrochemical Arc Machining, Annals of the CIRP, 1983 vol.32(1), 113-116.