Continuous Glucose

Monitoring(CGM) Biosensor


Rana Muhammad Umer

ECE 6200

2
OUTLINE
Introduction
Motivation
Principle & Design
Fabrication Steps
Conclusion
3
Introduction
Fully Implantable Device
Capacitive based sensor
Monitors Glucose level in Blood
Real-time Monitoring
No Moving Part
Dielectric Affinity Detection



4
Introduction
5
Motivation
A Fully Implantable Device
Monitors Glucose Level in Real Time
No Mechanically Moving Parts
No Intricate Actuator Design
Less susceptible human and environmental
disturbances


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Principle & Design
Detects glucose-induced permittivity changes of
solution of glucose sensitive polymer.


7
Principle & Design
Two Electrodes: Upper Perforated Electrode &
Lower Electrode on Substrate


8
Principle & Design
Diaphragm is supported by anti-stiction posts to
avoid collapsing and providing mechanical stability.


9
Principle & Design
Semi-permeable membrane to restrict polymer in u-
chamber and allow only glucose to transverse.


10
Principle & Design
The solution between two electrodes acts as the
dielectric material for capacitive detection.


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Fabrication Steps
1- Deposition of Gold on Si substrate for bottom
electrode.

2- Deposition of Parylene passivation layer through
chemical vapor deposition(CVD).
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Fabrication Steps
3- Deposition of thick sacrificial photoresist layer.
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Fabrication Steps
4- Deposition of second Parylene layer.

5- Gold layer deposited and patterned to form
perforated upper electrode.

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Fabrication Steps
6- Deposition of another Parylene passivation layer
on top of upper electrode.
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Fabrication Steps
7- Patterning of SU-8 reinforcement layer to form
nine anti-stiction posts.

8- SU-8 spin coated to form micro-chamber.
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Fabrication Steps
9- Using SU-8 as mask Parylene layers are
patterned and sacrificial layer is etched using
Reactive Ion Etching.
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Fabrication Steps
10- Cellulose semi-permeable membrane is glued in
the last on the top of micro-chambers using epoxy.
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Conclusion
CGM biosensor uses real-time monitoring
dielectric detection to monitor the level of glucose
in blood.

Affinity binding between glucose and polymer(
PAA-ran-PAAPBA) results in a decrease in
permittivity of solution.

Decrease in permittivity is detected by two
electrodes.
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References
[1] Xian Huang, Siqi Li, Erin Davis, Dachao Li, Qian Wang, Qiao Lin; A MEMS Dielectric Affinity Glucose
Biosensor; Journal of Microelectromechanical Systems, February 2014.

[2] A. Heller, Implanted electrochemical glucose sensors for the managementof diabetes, Annu. Rev.
Biomed. Eng

[3] Y. Zhao, S. Li, A. Davidson, B. Yang, Q. Wang, and Q. Lin, A MEMS viscometric sensor for continuous
glucose monitoring, J. Micromech. Microeng

[4] X. Huang, S. Li, J. S. Schultz, Q. Wang, and Q. Lin, A dielectric affinity microbiosensor, Appl. Phys. Lett.


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