Академический Документы
Профессиональный Документы
Культура Документы
http://www.d-r-t.com/sensortech.htm
http://news.thomasnet.com/fullstory/463874
Outline
IntroduceMEMS
Applications
AutomotiveSpecificInformation
Fabrication
Packaging
WhatareMEMS?
Micro(small)
http://eed.gsfc.nasa.gov/562/SA_MEMs.htm
Electro(electriccomponents/functionality)
http://www.memx.com/
Mechanical(mechanicalcomponents/functionality)
http://www.memx.com/
Systems(integrated,systemlikefunctionality)
http://www.forbes.com/2008/04/22/mems-apple-nintendo_leadership_clayton_in_jw_0421claytonchristensen_inl_slide.html
WheredoyoufindMEMs?
Printers
HighDPIinkjets
Projectors
MicroMirrorsfromTexasInstruments
CellPhones
KnowlesMicrophonesusedinmostnewcell
phones
Automobiles
WhyMEMS
Small
Typically.1100umfeaturesize
http://singularityhub.com/wp-content/uploads/2008/08/red-blood-cells.bmp
WhyMEMS
Lowcost,Highyield
UseexistingICfabricationtechnology
MadeprimarilyonSiliconWafers
http://media-2.web.britannica.com/eb-media/22/78522-004-BB539CA9.jpg
WhyMEMS
Favorablescalingforalotofapplications
Flowratesensors
Electrostatics
Magnetism
Manyothers
Notallapplications
SolarPower
TurbulentBoundaryEnergyHarvesting
TypicalApplications
Accelerometers
Magnetometers
Microphones
MicroFluidics
RFMEMS
BridgetoNanotechnology
AutomotiveMEMS
MEMSSensorsandActuatorsusedto
controlvariouselementsoftheautomobile
PowertrainandChassiscontrol
Ex:ManifoldAirTemperature
ComfortandConvenience
Ex:AirTemperatureControl
Communications
Ex:Wireless
WhereitBegan
1979FirstrecordeduseofMEMsinautomobiles
Federalemissionstandardsrequiredmonitoringtheairto
fuelratiooftheengine
Densityofairvaluewasneeded
Manydifferentsensortechnologieswereintroducedto
solvethisproblem
MAP(manifoldabsolutepressure)andMAT(manifoldair
temperature)sensorsweredevelopedusingMEMS
SiliconbasedMEMSsensorsbecamethedeviceofchoice
duetolowcostandhighyield
http://www.quantummatrix.com.my/v1/content/view/231/59/
MAP Sensor
WhoDevelopedIt
Twogroups
DelcoElectronicsGroup(GeneralMotors)
Usedpiezoresistivesensing
Ford
Usedcapacitivesensing
PiezoresistiveSensors
Usethepiezoresistiveeffect
Appliedstresschangesresistivityofmaterial
Source: IMG(UF)
CapacitiveSensors
Varytwoparameters
Gap
Overlaparea
Advantages
Lowpower
Highaccuracy
Temperatureindependent
Importantforalotofautomobileapplications
Reciprocal
Disadvantages
Parasiticcapacitance
Smallsignal
http://www.nanoshift.net/Technology.htm
WhataboutActuators?
Traditionallyonlysensorsweredeveloped
forautomobiles
Actuatorsstartedtobecomepopularas
MEMsdevelopmentcostsdecreased
Popularactuatorsinclude
Microphones
Fuelinjectionnozzles
Fabrication
UsebasicICfabrication
Masks/layers/CVD/oxidation/etc
MEMSspecificfabrication
DRIE(Deepreactiveionetch)
SOI(silicononinsulator)
GeneralMEMSPackaging
Themostimportantandexpensivepartofa
MEMSsensor/actuator
~45%ofthecostofdesigningaMEMSdeviceisspent
onpackaging
Oftentimespackagingconstraintswillpreventa
designfrombeingproduced
Mayrequiretoocomplexofapackagedesignfor
realisticimplementation
Packagecangreatlychangetheresponseofa
device
Sensitivity/DynamicRange/etcalleffectedbypackage
AutomotiveMEMSPackaging
Automotivesensorsgenerallyonlyallowed
tohave3wiresconnectedtothem
Minimizescost
Environmentconcernsareespecially
importantinautomotiveapplications
Engineheat
Highacceleration/deceleration
Humidity
AutomotiveMEMSSummary
Precision Engineering
By V. C. Venkatesh, Sudin Izman
ThankYou
References
ApplicationofMEMSTechnologyin
AutomotiveSensorsandActuators,
DavidEddyandDouglasSpanks
http://www.img.ufl.edu/ms/eel5225/html/as
signments.htm