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Electron Microscopy
radiolarian
OM
Small depth of field
Low resolution
SEM
Large depth of field
High resolution
http://www.mse.iastate.edu/microscopy/
What is SEM
Column
TV Screens
Sample
Chamber
The SEM is
designed for
direct studying
of the surfaces
of solid objects
Cost: $0.8-2.4M
OM
4x 1000x
SEM 10x 3000000x
15.5m 0.19m
~ 0.2m
4mm 0.4m
1-10nm
Growthstep
SE image
Light source
Condenser
Magnetic
lenses
Specimen
Objective
Projector
Eyepiece
Specimen
CRT
Cathode
Ray Tube
detector
OM
TEM
SEM
Main Applications
Topography
The surface features of an object and its texture
(hardness, reflectivity etc.)
Morphology
The shape and size of the particles making up the
object (strength, defects in IC and chips...etc.)
Composition
The elements and compounds that the object is
composed of and the relative amounts of them
(melting point, reactivity, hardness...etc.)
Crystallographic Information
How the grains are arranged in the object
(conductivity, electrical properties, strength...etc.)
Column
Electron Gun
A more
detailed
look
inside
Source: L. Reimer,
Scanning Electron
Microscope, 2nd Ed.,
Springer-Verlag, 1998, p.2
e- beam
e
beam
10cm
Detector
10cm
Amplifier
Image Magnification
W or LaB6 Filament
Thermionic or Field Emission Gun
Source of Electrons
Thermionic Gun
T: ~1500oC
Filament
E: >10MV/cm
(5-50m)
(5nm)
W and LaB6
Vacuum
10-5 ()
10-6
10-10
10-9
Magnetic Lenses
Condenser lens focusing
determines the beam current
which impinges on the sample.
Objective lens final probe
forming
determines the final spot size of
the electron beam, i.e., the
resolution of a SEM.
Magnetic lens
(solenoid)
F = -e(v x B)
q
Lens formula: 1/f = 1/p + 1/q
Demagnification:
M = q/p
f Bo2
f can be adjusted by changing Bo, i.e., changing the
current through coil.
The Condenser
Lens
Demagnification:
M = f/L
Objective
lens
Out of focus
in focus
out of focus
lens current lens current lens current
too strong
optimized
too weak
X-direction
scanning coil
Holizontal line scan
Blanking
y-direction
scanning
coil
Objective
lens
specimen
Sample stage
Topographical Contrast
Everhart-Thornley
SE Detector
Bright
lens polepiece
eSE
Dark
sample
Scintillator
light pipe
PMT
Quartz
window
Faraday
cage +200V +10kV
Photomultiplier
tube
Interaction Volume: I
e-
Interaction Volume: II
The penetration or,
more precisely, the
interaction volume
depends on the
acceleration voltage
(energy of electron)
and the atomic
number of the
specimen.
5m
e
beam
10cm
Detector
10cm
Amplifier
A
Beam is scanned over specimen in a raster pattern in
synchronization with beam in CRT.
Intensity at A on CRT is proportional to signal detected
from A on specimen and signal is modulated by amplifier.
Magnification
Low M
Large x
40m
High M
small x
7m
1.2m 15000x
2500x
M= C/x = 10cm/x
Increasing M is achieved by decreasing x.
M
100
1000
x
1 mm
100 m
M
10000
100000
x
10 m
1 m
Resolution Limitations
Ultimate resolution obtainable in an SEM
image can be limited by:
1. Electron Optical limitations
Diffraction: dd=1.22/
for a 20-keV beam, =0.0087nm and =5x10-3 dd=2.1nm
Chromatic and spherical aberrations: dmin=1.293/4 Cs1/4
A SEM fitted with an FEG has an achievable resolution of
~1.0nm at 30 kV due to smaller Cs (~20mm) and
2. Specimen Contrast Limitations
Contrast dmin
1.0
0.5
0.1
0.01
2.3nm
4.6nm
23nm
230nm
Resolution of Images: I
P=D/Mag = 100um/Mag
Mag P(m) Mag P(nm)
10x
1kx
10
0.1
10kx 10
100kx 1
Resolution of Images: II
The optimum condition for imaging is when
the escape volume of the signal concerned
equals to the pixel size.
Resolution of Images: IV
Signal from different pixel will overlap
if escape volume is larger than the
pixel size. The image will appeared
out of focus (Resolution decreased)
Resolution of Images: V
In extremely good SEM, resolution can be a few nm. The
limit is set by the electron probe size, which in turn depends
on the quality of the objective lens and electron gun.
Pixel diameter on Specimen
Magnification
10
100
m
10
1
nm
10000
1000
1000
10000
100000
0.1
0.01
0.001
100
10
1
Depth of Field
Depth of Field
D=
4x105W
AM
(m)
To increase D
Decrease aperture size, A
Decrease magnification, M
Increase working distance, W
(mm)
SE Images
Image Contrast
Image contrast, C
is defined by
SA-SB
C=
________
SA
= ____
SA
SA, SB Represent
signals generated
from two points,
e.g., A and B, in the
scanned area.
In order to detect objects of small size and low contrast
in an SEM it is necessary to use a high beam current and
a slow scan speed (i.e., improve signal to noise ratio).
1m
Defect in a semiconductor device
The debris shown here is an oxide
fiber got stuck at a semiconductor
device detected by SEM
Molybdenum
trioxide crystals
2m
BSE atomic number contrast image showing a
niobium-rich intermetallic phase (bright contrast)
dispersed in an alumina matrix (dark contrast).
Z (Nb) = 41, Z (Al) = 13 and Z(O) = 8
Alumina-Al2O3
Field Contrast
Electron trajectories are affected by
both electric and magnetic fields
Electric field the local electric potential at the
surface of a ferroelectric material or a
semiconductor p-n junction produce a special form
of contrast (Voltage contrast)
Magnetic field imaging magnetic domains
Voltage contrast
+U
-U
500m
Voltage contrast from integrated circuit recorded at 5kV.
The technique gives a qualitative view of static (DC)
potential
distributions
but,
by
improvements
in
instrumentation, it is possible to study potentials which may
be varying at frequencies up to 100MHz or more, and to
measure the potentials with a voltage resolution of 10mV
and a spatial resolution of 0.1m.
tc
a.
b.