Coventor Tutorial: Bi-Stable Mechanical Beam Simulation

Coventor Tutorial
Bi-Stable Mechanical Beam Simulation

-Remote Desktop Connection
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming
Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Hong Kong University of Science and Technology Kyoto University
Remote Desktop Connection
5 IP addresses for the course ELEC5010:
tmp233.ece.ust.hk
tmp235.ece.ust.hk
tmp236.ece.ust.hk
tmp237.ece.ust.hk
tmp238.ece.ust.hk
Login: elec5010
Password: 5010stu
tmp234.ece.ust.hk
Login: .\elec5010 Password: 5010stu
Two students share one virtual computer, it is important to log off

to release computer for your partner.
Coventor Tutorial
Entities)
-Viewing result
Material Definition
For detailed information
on Material Definition,
please refer to the
Section 2.3 of the
manual Designer ! ! !
2.After
opening a 1.Create a
project, you project first
will have or open your
models here unfinished
projects
3. Press this button

Material Definition
1.Choose MPD
materials database
2.Set the all

parameters of
Silicon_100

Coventor Tutorial
Entities)
-Viewing result
Create Substrate
1.Create a new
process and define
the substrate
2.Define thickness
and material
on editing process,
please refer to the
Section 2.4 of the
manual Designer ! ! !

Oxide Formation
1.Double click
3.Layer Name
2.Thickness

Si Formation
Only this Si layer for simulation: Accurate

Thickness!!
Si layer for layout: Accurate Layer Name!!

Si Patterning

Metal Formation
Metal layer for layout: Accurate Layer Name!!

Metal Patterning

Coventor Tutorial
Entities)
-Viewing result
Create Layout
1.After saving the process file,
we will create a new layout and
check the layer names just
defined

on editing layout, please
refer to the Section 2.5
& 3.2.1 of the manual
Designer! ! !

2.Standard
drawing Edit Your Layout
1.Choose the layer
you will draw
3.Other functions
For detailed information on editing layout, please
refer to the Section 2.5 & 3 of the manual
Designer
Hong Kong University ! ! and
of Science ! Technology Kyoto University
Edit Your Layout
How to draw a curving
beam
The important thing is the

equation
Also the rectangle

Edit Your Layout
For
Bended
beam:
The beam
and anchor Otherwise, solid
should be model cant be
merged. built!!
How?
Select
beam and
anchor and
then using ERROR
boolean-
>Or for
merge.

Edit Your Layout
For insert
other cells Otherwise, solid
graphs model cant be
and define built!!
Cell.
ERROR

Finish Layout
1. Just draw
the structures
of two layers:
SILICON!!
METAL!!
2.You can hide
the layer with
turn off the
light ahead
layer name
3. Save the
two layers
layout and
separate
different parts
in your
structure as
different cells.
Flat Hierarchy
This is for
the final
output!!
(Dont care it
in the
simulation)
Before
exporting
the layout,
find your
final
structure
cell and
flatten.
Then.
For detailed information on editing layout, please refer to the

Section 2.5.7 of the manual Designer ! ! !
Gds Out
Chose a file to
output the
layout.
For detailed information on editing layout, please refer to the

Section 2.6.6 of the manual Designer ! ! !
Coventor Tutorial
Entities)
-Viewing result
Initial Solid Model
2.Since only
SILICON layer
is simulated,
other can be
hided. (Right-
Click)
1.Select a top
cell to build the
solid model For detailed information on solid model, please refer to the
Section 4.5 of the manual Designer ! ! !
Partition
Partition the Si
into several
parts.
(Partition the
beam (moved
parts) from the
anchor (fixed
parts) .
1.Ctrl choose 3
points
2.Add a plane
3.Ctrl select the
plane and layer
which will be
parted
4.Partition

Partition (After)
After partition,
one Silicon bulk
is cut into many
parts. Finally, the one
Silicon bulk will
After partition, be cut into
the plane can many Layer3.
be hided.
After several
times of
partition, the
beams will be
completely
separated from
the anchor.

Add Layer to Mesh Model
Select ALL
Silicon parts
and add them
to Mesh Model
For detailed information on solid model, please refer to the

Add Layer to Mesh Model
ALL Silicon
parts move into
Mesh Model
For detailed information on Mesh model, please refer to the

Meshing Settings
Smaller
element
size
means
more
accurate
simulation
.
Please try
from
larger
size as
saving
simulation
time at
the
beginning.

Generate Meshing
Select ALL
Silicon
parts and
Generate
Mesh.

Finish Meshing

Naming Entities
Name the
top faces
which will
be used as
electrodes
Potential
will be
applied on
these
faces.

Naming Entities
Name all the

bottom faces
which connects
substrate
Anchors
Fixall and
Temperature
will be applied
on these faces.

Naming Entities
Name the front faces

or other needed faces
of the actuator,
amplifier or bistable
beam on the side
faces!
Pressure or
Displacement will be
applied on these faces
For detailed information on Mesh model, please refer to the

Coventor Tutorial
Entities)
-Viewing result
Solver Setting
After saving
the mesh
model, we will
have it here.

Solver Setting
Which be talked in the slide
page 40

Surface Boundary conditions
Example: apply voltage to actuator to analysis the temperature,

displacement, stress and so on.
1.Fixall for anchor
2.Set the temperate of all anchor as room temperature (300K). The
units is K.
3.Apply voltage to electrodes. The units is voltage.
For detailed information on setting

boundary conditions, please refer to
the Section 3.5.3 of the manual
analyzer_standard ! ! !

Surface Boundary conditions
For other simulations:

1.Fixall and Temperature are always applied on anchor faces.
2.Potential can be applied on electrode faces.
3.Pressure or Displacement can be applied on side faces

SBCs for Bistable Beam
For detailed information on Simulation methodology of Bistable Beam, please refer to

the Tutorial on simiulation of bistable beam ! ! !
Apply one Displacement to get one
Force

Displacement-Force Simulation
For simulation, one can not solve an
arbitrary displacement directly,
according to my experience. Instead,
one need to increase the displacement
bit by bit from zero, and telling
Coventor to start the analysis from
the result of the previous one.
In this manner, the simulation will not
fail easily, because defining the
displacement resolves the large non-
linearity of buckling.
One or Multi Point Simulation
1. Correspond the displacement to a variable,
mechBC1, based on MemMech Solver.
3. Set the 4. Set the

Trajectory value
6. Run here for

simulating one value 3. Correspond the mechBC1 to a
Trajectory
2. Start to
set
Variable 5. Run here for simulating a series of values
Contact Boundary Conditions
Plan: ACT CON If you want to use the

actuator to push the
amplifier,
or use the amplifier
Plan: AMP CON2 to push the beam
you need to define
the Planes of
actuator, amplifier
and beam as contact
planes.
Otherwise, they
actuator will move
Plan: BEAM CON
across the amplifier,
or the amplifier will
Plan: AMP CON1 move across the beam
rather than push it.
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-Viewing result
Simulation
After simulation, no matter

success or not, you view the
results or debug the errors.

View Resluts
By click the
displacement, you
can switch to
other parameters.
For detailed information on Visualizer, please refer to the Section 9 of

the manual analyzer_standard ! ! !
3D Result Viewing
For detailed information on Visualizer, please refer to the Section 9 &

9.1 of the manual analyzer_standard ! ! !
Simulation Result of the
Displace-Fore of Bistable Beam
Checking the displacement
deformation using
Geometry Scaling

Simulation Result of the Displace-Fore
of Bistable Beam
Checking the Force Value
using Table rxnForces.
Sign of rxnForces changes

from + to or to +,
indicating two stable states.

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Coventor Tutorial: Bi-Stable Mechanical Beam Simulation

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Coventor Tutorial

Bi-Stable Mechanical Beam Simulation

Two students share one virtual computer, it is important to log off

3. Press this button

Hong Kong University of Science and Technology Kyoto University

2.Set the all

Hong Kong University of Science and Technology Kyoto University

Hong Kong University of Science and Technology Kyoto University

Hong Kong University of Science and Technology Kyoto University

Only this Si layer for simulation: Accurate

Hong Kong University of Science and Technology Kyoto University

Hong Kong University of Science and Technology Kyoto University

Metal layer for layout: Accurate Layer Name!!

Hong Kong University of Science and Technology Kyoto University

Hong Kong University of Science and Technology Kyoto University

For detailed information

Hong Kong University of Science and Technology Kyoto University

The important thing is the

Also the rectangle

Hong Kong University of Science and Technology Kyoto University

Hong Kong University of Science and Technology Kyoto University

Hong Kong University of Science and Technology Kyoto University

For detailed information on editing layout, please refer to the

For detailed information on editing layout, please refer to the

Hong Kong University of Science and Technology Kyoto University

Hong Kong University of Science and Technology Kyoto University

For detailed information on solid model, please refer to the

For detailed information on Mesh model, please refer to the

Hong Kong University of Science and Technology Kyoto University

Hong Kong University of Science and Technology Kyoto University

Hong Kong University of Science and Technology Kyoto University

Hong Kong University of Science and Technology Kyoto University

Name all the

Hong Kong University of Science and Technology Kyoto University

Name the front faces

For detailed information on Mesh model, please refer to the

Hong Kong University of Science and Technology Kyoto University

Hong Kong University of Science and Technology Kyoto University

Example: apply voltage to actuator to analysis the temperature,

For detailed information on setting

Hong Kong University of Science and Technology Kyoto University

For other simulations:

Hong Kong University of Science and Technology Kyoto University

For detailed information on Simulation methodology of Bistable Beam, please refer to

Hong Kong University of Science and Technology Kyoto University

3. Set the 4. Set the

6. Run here for

Plan: ACT CON If you want to use the

After simulation, no matter

Hong Kong University of Science and Technology Kyoto University

For detailed information on Visualizer, please refer to the Section 9 of

For detailed information on Visualizer, please refer to the Section 9 &

Hong Kong University of Science and Technology Kyoto University

Sign of rxnForces changes

Hong Kong University of Science and Technology Kyoto University

Hong Kong University of Science and Technology Kyoto University

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