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MICROMACHINING
Introduction
• Creating micro features or surface characteristics (especially surface
finish) in the micro/nano level
• Why ?
• design is easy but production is not easy for microproducts
• Range of micro: (1 µm ≤ dimension ≤ 999 µm in size)
• Requirement of micromaching
I. Reduce unit removal (UR)
II. Improve equipment precision
Relationship Among Technologies and Objects
in Production
Fig. 1
•
•• Types Of Micromachining Process
Conventional
Removal
Plastic or by melting
brittle and vaporization
breakage
•• UR
For controlled
small UR, by electrical
highly conc forceparameters
•• Adv: No influence
Limitations: machiningof w/p mech.properties
accuracy and size
and negligible cutting force Principle Method
• Based••on Constraints:
ionic reactions tool material stronger than
Material
• Drawbacks: removal process by
• Very smallworkpiece
UR material required
• Uncertainity
vaporization, chipping and otherw/p
in specifying erosive Mechanical Force Cutting, Grinding, USM, Sand
• Adv: processes
dimensions & outline of beam Blasting
• • forces
m/c Two types
• almost
Heatzeroaffected layers
• • free
m/c surface Excimer lasers:
from damage, molecules
residual stress to atoms Melting/Vaporization EDM, LBM, EBM
•• NoMore efficient than material removal
• FS•lasers:
influence of mechanical properties
byof directly vaporization
• • UR is meaningless Shape mold is
Drawbacks: accuracy affected by gap, flow pattern
replicated Ablation LBM (Excimer, FS)
and• temp
Adv: of high •• Layer
production
electrolytes by
No spring layer
speedbacksolidification
but
• Limiting factors: • Adv:deformation
spring backbecause of temp
and flowability Dissolution ECM, Photo Etching
of w/p. •Reverse
• change Inner of part of product can
dissolution
• • Formation
URbe is shaped
veryofsmall
bubbles Plastic Deformation Punching, Press
• •Adv: No necessity of die
• Limitations:
• Massnarrow choice
production of
and Solidification Molding , Casting
materialsconcave surface
generation Lamination Stereolithography
• Limitations of materials
Recomposition Electroforming