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Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-1
International Technology Roadmap for Semiconductors
Year of Shipment 2003 2005 2007 2010 2013
Technology Node (nm) 90 65 45 32 22
Lg (nm) (HP/LSTP) 37/65 26/45 22/37 16/25 13/20
Gate
Mechanical Trenches filled
strain with epitaxial SiGe
S D
N-type Si
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-3
7.2 Subthreshold Current
• The leakage current that flows at Vg<Vt is called the
subthreshold current.
I ds (m A /mm)
90nm technology.
Gate length: 45nm
Vt Vt
Vgs
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-4
• Subthreshold current ns (surface inversion carrier concentration)
• ns eqs/kT
S
Ef
Ef, Ec
Vgs
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-5
Subthreshold Leakage Current
q s / kT (
q constant Vgs / ) /kT qVgs/ kT
Ids ns e e e
qVgs/ kT
VG Ids e
Cox
s
Cdep C dep
1
Coxe
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-6
Subthreshold Leakage Current
W q ( Vg - V t ) / kT W (Vg -Vt )/ S
=> I
subthreshold ( nA) 100 × × e 100 × ×10
L L
Log (Ids )
Vds=Vdd
Ioff (nA) = 100 × W × 10 -V
t /S
100×W/L(nA)
L
1/S
is determined only by Vt and
Ioff
subthreshold swing.
Vt Vgs
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-7
Subthreshold Swing
• Smaller S is desirable (lower Ioff for a given Vt). Minimum
possible value of S is 60mV/dec.
Cdep
• How do we reduce swing? S 60mV 1
• Thinner Tox => larger Coxe Coxe
• Lower substrate doping => smaller Cdep
• Lower temperature
• Limitations
• Thinner Tox ― oxide breakdown reliability or oxide leakage
current
• Lower substrate doping ― doping is not a free parameter but
set by Vt.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-8
Effect of Interface States on Subthreshold Swing
Vg1
Vg2>Vg1
Vt Roll-off (V)
• It determines the -0.10
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-10
Why Does Vt Decrease with L?― Potential Barrier Concept
Long Channel
Vgs=0V
Ec
Vg=0V
N+ Source Vds
N+ Drain
Vgs=Vt-long
Vg=Vt ~0.2V
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-11
Energy-Band Diagram from Source to Drain
• L dependence
source/channel
long channel
barrier
Vds
short
channel
log(Ids)
• Vds dependence
long channel
Vds=Vdd Vds=Vdd
short channel
Vgs
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-12
Vt Roll-off – Simple Capacitance Model
Vds helps Vgs to invert the surface, therefore
Vgs
Cd
Vt Vt -long - Vds
Tox Coxe Vds Coxe
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-13
• Vertical dimensions (Tox, Wdep, Xj)
must be scaled to support L reduction
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-14
7.4 Reducing Gate-Insulator Electrical Thickness
and Tunneling Leakage
• Oxide thickness has been reduced
over the years from 300nm to 1.2nm.
• Why reduce oxide thickness?
– Larger Cox to raise Ion
– Reduce subthreshold swing
– Control Vt roll-off
• Thinner is better. However, if the
oxide is too thin
– Breakdown due to high field
– Leakage current
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-15
Gate Tunneling Leakage Current
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-16
Replacing SiO2 with HfO2---High-k Dielectric
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-18
7.5 How to Reduce Wdep
• Wdep can be reduced by increasing Nsub
qN sub 2 sst 2 sst
Vt V fb st V fb st
Cox CoxWdep
– If Nsub is increased, Cox has to be increased in order to
keep Vt the same.
– Wdep can be reduced in proportion to Tox.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-19
7.5 Ideal Retrograde Doping Profile
• Assume the body is heavily doped
with an undoped layer, Trg thick, at
the surface.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-20
7.6 Shallow Junction and Metal Source/Drain
contact metal dielectric spacer
gate
oxide
channel
shallow junction
Deep S/D extension
silicid
e
• The shallow junction extension helps to control Vt roll-off.
• Shallow junction and light doping combine to produce an
undesirable parasitic resistance that reduces the precious Ion.
• Theoretically, metal S/D can be used as a very shallow
“junction”.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-21
7.6.1 MOSFET with Metal Source/Drain
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-22
7.7 Variations and Design for Manufacturing
NMOS PMOS
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-24
7.8 Ultra-Thin-Body SOI and Multigate MOSFETs
• Reducing Tox gives the gate excellent control of Si surface
potential.
• But, the drain could still have more control than the gate
along sub-surface leakage current paths. (Right figure.)
Vgs Vgs
S D S D
Cg Cd
Cd
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-25
7.8.1 Ultra-Thin-Body MOSFET and SOI
• UTB MOSFET built on ultra thin silicon film on an
insulator (SiO2).
• Since the silicon film is very thin, perhaps less than 10nm,
no leakage path is very far from the gate.
Electron Micrograph of UTB MOSFET
Gate
N+ N+ Gate
Tox=1.5nm, Nsub=1e15cm-3,
Vdd=1V, Vgs=0
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-27
Producing Silicon-on-Insulator (SOI) Substrates
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-28
Cross-Section of SOI Circuits
Si
Buried Oxide
Si substrate
Gate 1 Vg
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-30
FinFET
• One multi-gate structure, called FinFET,
is particularly attractive for its simplicity
of fabrication.
• The channel consists of the two vertical
surfaces and the top surface of the fin.
• Question: What is the channel width, W?
Answer: The sum of twice the fin height and the
width of the fin.
Gate Gate
Si STI Si
STI
BOX
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-31
Variations of FinFET
Source
-5
1.4x10
1E-3 Mid-gap gate Dessis 3-D simulation
R=12.5nm
Vds=1V 1.2x10
-5 model V =2V
1E-5 Tox=1.5nm GS
Mid-gap gate
L=1mm
1E-17 0.0
0.0 0.5 1.0 1.5 2.0 0.0 0.5 1.0 1.5 2.0
Gate Voltage (V) Drain Voltage (V)
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-33
7.9 Output Conductance
What Parameters Determine the gds ?
dIds at dIds at dVt
gds
dVds dVt dVds
dIds at - dIds at dVT
e -L / l d
-g msat and
dVt dVgs dVds
L / ld
Idsat is a function of Vgs-Vt (From Eq. 7.3.3, Vt Vt -long -Vds e )
gds gmsat e -L / ld
g msat
Max voltage gain (R ) eL / ld
g ds
•A larger L or smaller ld , i.e. smaller Tox, Wdep, Xj, can
increase the maximum voltage gain.
•The cause is “Vt dependence on Vds”in short channel transistors.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-34
Channel Length Modulation
• For large L and Vds close to Vdsat, another mechanism may
dominate gds. That is channel length modulation.
•Vds-Vdsat, is dissipated over a short distance next to drain,
causing the “channel length” to decrease. More with increasing
Vds.
Vd>Vdsat
ld I dsat
gds
L(Vds - Vdsat )
ΔL
ld 3 ToxWdep X j Vc=Vdsat
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-35
7.10 Device and Process Simulation
• Device Simulation
– Commercially available computer simulation tools can solve
all the equations presented in this book simultaneously with
few or no approximations.
– Device simulation provides quick feedback about device
design before long and expensive fabrication.
• Process Simulation
– Inputs to process simulation: lithography mask pattern,
implantation dose and energy, temperatures and times for
oxidization and annealing steps, etc.
– The process simulator generates a 2-D or 3-D structures
with all the deposited or grown and etched thin films and
doped regions.
– This output may be fed into a device simulator as input
together with applied voltages.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-36
Example of Process Simulation
• FinFET Process
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-38
7.11 MOSFET Compact Modeling for Circuit
Simulation
• For circuit simulation, MOSFETs are modeled with analytical
equations.
• Device model is the link between technology/manufacturing
and design/product. The other link is design rules.
• Circuits are designed A. through circuit simulations or B.
using cell libraries that have been carefully designed
beforehand using circuit simulations.
• BSIM is the first industry standard MOSFET model. It
contains all the models presented in these chapters and more.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-39
Examples of BSIM Model Results
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-40
Example of BSIM Model Results
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-41
Example of BSIM Model Results
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-42
7.12 Chapter Summary
The major component of Ioff is the subthreshold current
W -qVt / kT W
I off (nA) 100 e 100 10 -Vt / S
L L
Vt decreases with L, a fact known as Vt roll-off, caused
by drain-induced barrier lowering (DIBL).
( )
Vt Vt -long - Vds 0.4 e -L / l d
l d 3 ToxeWdep X j
Output conductance of short channel transistors
gds gmsat e -L / ld
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 7-43