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Digital IC Design

MOSFET Scaling
Digital IC Design

MOS Transistor: Substrate Bias Effect


Digital IC Design

MOS Transistor: Substrate Bias Effect


Digital IC Design

MOS Transistor: Substrate Bias Effect


Digital IC Design

MOS Transistor: Measurement of Parameters: Transconductance: kn


Digital IC Design

MOS Transistor: Measurement of Parameters

For a substrate bias,


you can find also
Digital IC Design

MOS Transistor: Measurement of Parameters : λ


Digital IC Design

MOS Transistor: Measurement of Parameters : λ


Digital IC Design

MOSFET Scaling and Small Geometry Effect


Digital IC Design

MOSFET Scaling and Small Geometry Effect


Digital IC Design

MOSFET Scaling and Small Geometry Effect: Constant Field Scaling


Digital IC Design

MOSFET Scaling and Small Geometry Effect: Constant Field Scaling


Digital IC Design

MOSFET Scaling and Small Geometry Effect: Constant Field Scaling

Power density per unit area is almost constant!


Digital IC Design

MOSFET Scaling and Small Geometry Effect: Constant Field Scaling

However, the gate oxide cap Cg = WLCox is scaled down by factor of S, leads to
improvement in transient characteristics.
Digital IC Design

MOSFET Scaling and Small Geometry Effect: Constant Voltage Scaling


Digital IC Design

MOSFET Scaling and Small Geometry Effect: Constant Voltage Scaling


Digital IC Design

MOSFET Scaling and Small Geometry Effect: Constant Voltage Scaling

Also, the current density will be increased by a factor of S3, leads to device reliability
issues.
Digital IC Design

MOSFET Scaling and Small Geometry Effect: Constant Voltage Scaling


Digital IC Design

MOSFET Scaling and Small Geometry Effect: Short Channel


Digital IC Design

MOSFET Scaling and Small Geometry Effect: Short Channel

The bulk depletion region charge


within the trapezoidal region is
Digital IC Design

MOSFET Scaling and Small Geometry Effect: Short Channel


The junction depletion region depths:
Digital IC Design

MOSFET Scaling and Small Geometry Effect: Short Channel


The junction depletion region depths:

The junction built-in voltage:


Digital IC Design

MOSFET Scaling and Small Geometry Effect: Short Channel


The junction depletion region depths:

The junction built-in voltage:


Digital IC Design

MOSFET Scaling and Small Geometry Effect: Short Channel


The junction depletion region depths:

The junction built-in voltage:


Digital IC Design

MOSFET Scaling and Small Geometry Effect: Short Channel


The junction depletion region depths:

The junction built-in voltage:


Digital IC Design

MOSFET Scaling and Small Geometry Effect: Short Channel


The junction depletion region depths:

The junction built-in voltage:


Digital IC Design

MOSFET Scaling and Small Geometry Effect: Short Channel


The junction depletion region depths:

The junction built-in voltage:


Digital IC Design

MOSFET Scaling and Small Geometry Effect: Short Channel


The threshold voltage net change due to short channel effects is
then:
Digital IC Design

MOSFET Scaling and Small Geometry Effect: Narrow Channel

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