Types of Pumps, Working principle

and Applications
Contents:
•Introduction
•Working Principle of
 Mechanical pump
Diffusion pump
 Turbo molecular pump
•Limitations and Applications
Introduction to Pump:
 Mechanical device using suction or pressure to raise or move liquids, compress
gases, or force air into objects.
Pump enable fluid to flow from low pressure to high pressure and at a faster rate.
Pumps can be classified depending on the method of displacement of fluid and its
functioning as centrifugal pump, simple hand pump, rotary gear pump , diaphragm
pump, piston pump ,vane pump, gear pump, rotary lobe pump, vacuum pump…..etc.
Vacuum pump: Device that removes gas molecules from a confined space so that
vacuum is created.
Applications : Semiconductor processing, Ion implantation, PVD , Electron microscopy,
processing of CRT tubes, electric bulbs, glass coating…etc
Mechanical pump:
 Fluid is transferred from low pressure to high pressure region.
Mechanical pump scoops us air and pushes it out of the chamber by mechanical
means such as pistons, fins and lobes
 To be efficient, the pump has to provide simultaneously a finite pumping speed
and compression.
Applications:
 Pumping water from wells,Pond filtering.
 In car Industry for water cooling and fuel injection,
 In energy industry to pump oil and natural gas and to operate cooling towers
etc.
Diffusion pump:
Diffusion pump is oil based vapor pump used to obtain different levels
of vacuum . It is called the fluid entrainment pump.
Working principle:
Uses vapor of boiling fluid to capture air molecules. As the high speed
jet of vapor hits the outer cooled shell of the diffusion pump, the
working fluid condenses.
Any air molecules that wander into the inlet meets the vapors are
captured and cooled where cooling forces air molecules to be released.
The combination of gravity and downward direction of vapor aids in
creating vacuum.
Advantages and Applications:
Less vibration, noise free , quite durable and reliable.
Creates vapor of 10-4 to 10-7 torr .
 Ultra high vacuum for Mass spectrometers and analytical instruments.
High pumping speed with relatively low cost.
Easy to maintain, operate , risk of breaking is minimum.
Tolerate operating conditions such as excess particles and reactive gases which impairs other high-vacuum
pumps
Silicon oil perform for long periods of time.
Applications:
Molecular beam systems, large scale vacuum furnace processing,space simulation chambers,
Pharmaceuticals, petrochemicals processing, High Energy Physics..etc.
Limitations:
Main Disadvantage: Tendency to back stream oil into vacuum chamber.
Limits its application for extremely clean vacuum environment. Often Cold
traps, baffles, backing pumps are needed.
The oil of a diffusion pump cannot be exposed to the atmosphere when
hot. If this occurs, the oil will burn and has to be replaced.Special oils are
required.
Evolution of gas from pump parts decrease the pumping potential.
Dissolved gases in the pump fluid impairs the pumping efficiency.
Turbo molecular pumps:
 Working Principle: Gas molecules can be given momentum in a
desired direction by repeated collision with a moving solid surface.
Rapidly spinning fan rotor 'hits' gas molecules from the inlet of the pump
towards the exhaust in order to create vacuum.
 Mechanical energy of the blades is transferred to the gas molecules.
Continuous colliding of gas molecules from rotor to holes in stator leads
the gas molecules outward
 The performance of a turbo molecular pump depends on frequency of
the rotor. As rpm increases, the rotor blades deflect more. To increase
speed and reduce the deformation, stiffer materials and different blade
designs are used.
Advantages and Applications:
 Versatile pump as generates many degrees of vacuum from intermediate vacuum (≈10−2 Pa) up
to Ultra-high vacuum levels (≈10−8 Pa).
Advantages over the diffusion pumps .
Can be started and stopped when necessary.
The turbo pump can be directly connected to the chamber without a high vacuum value and
this saves money and improves pumping conductance.
Hydrocarbon‐free vacuum can be created.

Applications:
Manufacturing processes of solar cells and semiconductors.
Limitations:
Noisy and they induce vibration.
Expensive and the compression ratio for hydrogen and Helium are low.
Turbo molecular pumps must operate at very high speeds and friction heat buildup imposes design
limitations. Magnetic bearings limit the friction.
Exposure to atmosphere can lead to accidents.
Fear of breaking is very high so limits its applications. Filters reduce such breaking tendency .
Sediment sensitive
Turbo molecular pumps are expensive than the diffusion pump at the same pumping speed.
THANK YOU