MEMS DESIGN FLOW

BASIC CONCEPTS
Mohamed A. Elsheikh
Associate Professor
Electronics and Communications Department
Ain Shames University

mohamed.elsheikh@eng.asu.edu.eg
Outline

 Product Development Basics

 MEMS Design Flow

 Finite element as an example of Physical Simulator

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Different Product Intellectual Levels

 Proof-of-Concept:
• An idea is illustrate by mathematical equations and simulation results

 Prototyping level:
• To demonstrate an idea or a technology

 Industrial-level prototype or Engineering Samples

• More closer to the final product shape

 Commercial product:
• Cost effective, large quantities, high yield

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What factors affect product development ?

 Market: Is there a need for this product ?

 Impact: Does this product represent a paradigm shift ?

 Competition: Are there equivalent products or competitive organization

involved ?

 Technology: Is there a technology to develop this product ?

 Cost: Can the product manufactured at a cost effective way ?

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How a product is developed ?

Evaluation of Manufacturing
Competition Considerations
Technological
Market
Capabilities
Projections

Creative Thinking

Performance Product Ideas

Estimates

Modeling
and Analysis

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Example: NeoSpectra

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NeoSpectra: Applications

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NeoSpectra: System Components

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NeoSpectra: Tomorrow

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Outline

 Product Development Basics

 MEMS Design Flow

 Finite element as an example of Physical Simulator

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MEMS Design Flow
Ordinary differential Equations (ODEs)
Block diagram, Lumped circuit model

System
Designer Inputs
Macro models and
reduced order models

Device

Physical
Process Simulation
Process flow, Photo
Partial differential masks
Equations (PDEs)
Finite-element models Process

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MEMS System Level
 Basic Tasks: System
Designer Inputs
 Literature Survey
 System Partioning & block diagram Device

 System verification
Physical
 Specifications extraction (optional)

Process

 Useful Tools:
 Linear Differential Equations
 System flow simulators (e.g. Simulink - Matlab, Scilab, and Octave)
 HDL-A languages (e.g. Verliog-A, VHDL-AMS)
 Equivalent circuit models using Pspice simulators

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MEMS Device Level
 Basic Tasks: System
Designer Inputs

 Functionality proof
Device
 Specifications extraction

 Fabrication process initial flow Physical

Process

 Useful Tools:
 Differential Equations

 System flow simulators (e.g. Simulink - Matlab, Scilab, and Octave)

 Reduced order models

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MEMS Physical Level
 Basic Tasks: System
Designer Inputs

 Sizing and dimensioning

Device
 Nonlinear behavior capture
Physical

 Useful Tools: Process

 Partial Differential Equations

 Finite element tools (e.g. Ansys, Comsol, Coventor, and Intellisuite)

 Layout tools

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MEMS Process Level
 Basic Tasks: System
Designer Inputs

 Fabrication flow finalization

Device
 Masks submission and fabrication

 Device fabrication Physical

Process

 Useful Tools:
 Layout tools

 Process simulators

 Experience!!

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QUESTIONS & DISCUSSIONS

Email: mohamed.elsheikh@eng.asu.edu.eg

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