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CLEANROOM/CLEANZONE

PROTOCOL

PRESENTED BY:

Sid Calayag
TRAINING OBJECTIVES

1.Understand the requirements and


prohibitions of production areas
2. Apply the proper discipline
AGENDA
CLEANROOM BASICS

 What is a Clean room?


A clean environment designed to

reduce the contamination of


processes and materials.
 This is accomplished by
removing or reducing
contamination sources.

Cleanroom BASICS

A cleanroom is a controlled

environment that regulates the


following:
§ particulate matters in the air( i.e. dust
and other particles)
§ temperature
§ humidity
§ pressure
§ contaminants from people, machines,
Cleanroom BASICS

DEFINITION OF TERMS
CLEANROOM
An enclosed space employing control over the
particulate matter in the air, temperature, humidity,
pressure and human contributed contaminants.

CLEANZONE
A defined space in which the concentration of
airborne particulate matter, including human
contaminants is controlled to specified limits.
B A S IC C O M PO N EN TS OF
C LE A N R O O M

CEILING GRID

GLASS WINDOWS

WALL PANELS

CONDUCTIVE FLOORS
OR RAISED FLOOR
B A S IC C O M PO N EN TS OF
C LE A N R O O M

FULL GLASS WINDOWS

ANTE ROOM

AIR SHOWERS
PASS BOX
Cleanroom at construction stage

CIVIL WORKS ELECTROMECH WORKS

BUILDING/CONSTRUCTION
Cleanroom stages of construction

CIVIL WORKS
INTERIOR WORKS
INTERIOR WORKS
üColumns
üPiping Works
üSlabs
üEquipment Installation
üWalls
Enclosure
ENCLOSURE üofSupport
üSandingarea and
and issuance
System of ac
Installation
Painting
To remove Lightings
üthe
üSecondarygenerated dust
Ceiling and before
Installatio
 OTHERS üFire Protection
üPainting Works
üMain
 Feeder line
ü

üOther Electromechanical Works a


ü
ELECTRO-MECH’L WORKS

C O N S T R U C T IO N S TA G E A P PA R E LS & P P E

helmet
Wear

§ Shoes for
indoor use
§ Helmet

Shoes for Indoor use


Basic Cleanliness Requirement

§ Materials
§ To be stored in a clean & orderly
manner
§ Others
§ Dirty Work to be isolated
§ Sweep daily
§ Wet with sawdust

5S and Housekeeping
 Every user is responsible for keeping
the cleanroom clean
 Always clean your workspace before
leaving
 Don’t leave or store items on or in
equipment
 Do not set liquids on any equipment
 Properly store all materials before
leaving the cleanroom
 Last one out should make sure the
room is in a safe idle mode
Cleanroom apparels & PPE

1. head cap / headgear


2. Safety Glasses ●LAUNDRY:
3. Facemask Garments shall
4.static dissipative be changed and
smocks washed at least
once a week.
5.In-plant shoes/
safety shoes
U LT R A C LE A N S U IT & A P PA R E LS

REQUIRED COMPLETE APPAREL


Cleanroom:
1. hair net (before hood)
2. facemask
3. bunny suit
4. booties over in-plant shoes

●LAUNDRY:
Garments shall be
changed and
washed at least
once a week.
BASIC CLEANROOM PROTOCOL

§ Entrance Control
§ Air lock room
§ Sticky/Tacky mats
§ Materials & Tools
§ clean materials to be brought
into the building
§ clean materials before
entering
2.
Cleanroom PRACTICES

1.All workers must attend an


orientation,
2.Chemicals must be approved
3.Equipment and materials must be
cleaned
4.Moving must be done with care
5.Eating, smoking and the chewing gums
is prohibited
6.Housekeeping
2.
Cleanroom requirement

■No visible dust


■No rust, no peeling paint
■No sand/pebbles
■No fiber/hair, wood chips
■No plastic debris, carbon/paper
■No styro foam chips
■No presence of food
CLEANROOM REQUIREMENT & PRACTICES
Implementing Clean Production Environment

Planning
Based on 4 principles    
Stage
Prevent entry of dust Prevent dust Remove dust Do not accumulate
generation
Positive pressure/barricade Clean suit/eqpt layout Apply appropriate filter Choose anti-static
materials
Apply
Apply energy
energy saving
saving systems
systems

Operational
Based on 4 principles    
Stage
Prevent entry of dust Prevent dust Remove dust Do not accumulate
generation
Room pressure control Air shower operational Cleaning implemented Proper RH control, etc

Implementation
Implementation and
and Maintenance
Maintenance of
of Clean
Clean Production
Production Environment
Environment
Improving
Improving workers
workers level
level of
of consciousness
consciousness is
is very
very important
important
APPLICATION OF 4 PRINCIPLES

① Do not allow dusts to flow into the ducting system


1. airtight ducting system
2. install HEPA filters at
all supply side
3. positive pressure beyond
HEPA

③ Remove immediately
generated particles
② Minimize dust
1. provide localized exhaust
generation in the room
near sources of contaminants
1. wearing of clean suits 2. make indoor air
2. workflow/layout to distribution as laminar as
reduce unnecessary movements possible

3. use of finishing
materials that generate few
particles
④ Do not pile-up dusts
4. No bringing of useless
things inside
or scatter these
particles
1. eliminate unnecessary
horizontal surfaces
2. Use round ends instead of
① Do the cleaning(people angles
and things) at the 3. do not install unnecessary
anteroom before bringing equipment that vibrates
1.inside the cleanroom
installation of air shower
at anteroon
Prevent entry of dust
nbasic control measures(1) ・ install air shower/pass box
・  pressurize the room(cleanroom indoor) - prevent dust from entering during
to prevent entry of dust from outside opening/closing of doors
-dusting off before entry

air shower pass box

nJACA
> 10Pa
( 1 . 02
+pressure mmAq )
against nFDA
outside > 0 . 05
inAq
(1 . 27
mmAq )
nISO13408-1
10~ 15 P
・ provide sticky mat

  place mat near entry points to prevent dust
under the shoes from entering
Prevent entry of dust < Effects of Cosmetic Products >
100,000

nbasic control measures(2)

[ particles/cft/min ]
10,000

wear cleanroom 1,000

suits/gown
100 female ( 20’s )

ban use of cosmetics male, thick beard ( 30’s )


male, slight beard ( 40’s)
male, slight beard(40’s )
10

use of low/non-particle bare after


washing
face
lotion/
facial
foundatio
eye shadow/
cheek
blush on

generating finishing
n

materials source ~実践 LSI工場清浄化技術 (1985)

bunny suit smack gown

cleanroom interior finish


①   no surface breakup/detachment
②   smooth surface with few gaps
③   durable/wear resistant
④   static electricity is hard to generate
⑤   difficult to be stained but easy to clean
⑥   acid/alkali resistant
⑦   low outgassing properties
CLEANROOM CONTAMINANT
npeople
nmanufacturing equipment
ntools
nprocesses/utilities(CDA, N2, DI water)
nofficeequipment and supplies(computers,
papers)
nmolds, fungi, bacteria
nstructural materials(paint peels, outgassing)
Dust Removal by Filtration
Dust removal by supplying clean
Dust removal by room air recirculation air into the equipment

Dust from room and outdoor


Direct supply of clean air into
air (OA) can mix
the machine
filter selection and recirculating air
volume calculation

Ensure particle concentration


Ensure particle concentration within within room specification
room specification

外気
Recirculating
Filter air

Exhaust Room
OA

Room

Exhaust
particle Return air
sources
CLEANING THE Cleanroom
Daily Cleaning Regular Cleaning

・ once a day/after each shift ・ once per week/per month or


semiannually
・ wet type cleaning(using water)
・ done by service cleaners
・ sticky mat changing
・ cleaning including moving the equipment
・ dry type cleaning by vacuum cleaner
・ done during shutdown
・ cleaning done during operation
ELECTROSTATIC DISCHARGE ( ESD )

What is
STATIC ELECTRICITY?

- It is an electrical charge at REST.


We generate static electricity when….

Electrical charge is created by changes in capacitance as follows;


When a footwear of a person separates from
the floor, it creates friction which is a source
of electrical charge.

•When a person moves, clothing separates


from body parts. This creates friction
which is a source of electrical charge.

•When a person moves, the body parts rub


with the surrounding air. Friction caused by
contact and separation generates electrical
charge.
4 Principles of Maintaining Cleanliness

1. Prevent entry of dust.


2.Minimize sources that generate dust.
3.Remove the dust generated in the room before they
spread.
4. Do not accumulate and scatter the dust.
End of presentation
§ Prepared for TI
Construction Group
 By: Sid Calayag
§ References:
§ TI Cleanroom Basic Cleanroom
Orientation
§ Basic Cleanroom Orientation