TRIBOLOGY CONCERNS IN MEMS DEVICES

The Materials and Fabrication Techniques Used to Reduce Them

Guide-PROF.S.CHAKKA

presented by-SHAIKH JAWED

TRIBOLOGY ON THE MICROSCALE

Surface Contact
Surface Roughness Interfacial Forces Adhesion Friction

Wear
Models Environmental Effects

Surfaces
asperities

Interfacial Forces
Capillary Forces Electrostatic Forces Van der Waals Forces

Adhesion

Friction

Surface Contact

Wear

Wear debris identified as amorphous oxidized silicon with no polysilicon.

Wear Mechanisms

Adhesive
Low contact pressures Augmented asperities

Abrasive
High contact pressures Wear tracks

Environmental Effects on Wear

Humidity
Volume of wear debris Morphology of wear debris

Diamond Coatings
Diamond has a variety of useful properties compared to Silicon Low wear, low coefficient of friction, thermally stable, isotropic hardness Diamond cannot be simply made into smaller and smaller flakes, then deposited on MEMS devices Diamond (or diamond-like) film must be grown on surface.

Conventional CVD

Methane (CH4) is introduced as a plasma in a PECVD process.

The disassociated carbon ions deposit on the MEMS device. Under correct conditions, the carbon atoms form a diamondlike film.

Results/Problems of Conventional PECVD Diamond Films

Tribological properties better than silicon are achieved, but its not an ideal solution:
Low uniformity Non-constant density Amount of impurities and crystal growth suffers if dissociation is incomplete.

If coating isnt uniform, predicting failure is difficult and surface finish suffers.

UNCD

ULTRANANOCRYSTALLINE DIAMOND
A better method for producing diamond-like films. Grain size is 2-5nm. Unlike conventional diamond film CVD, C60 is introduced into the reaction along with CH4.
C60 collides with itself, creating C2 (carbon dimers) These C2 molecules enter the diamond lattice. An abundance of C2 is the goal of the UNCD creation process.

Benefits of UNCD vs. Conventional CVD

Properties more like natural diamond Method allows for uniform coating Very little residual stress.

Demonstration

Coating Uniformity

Lack of internal stress allows for freestanding structures.

Surface Finish Comparison

Self Assembled Monolayers (SAMs)

Two Types Silane deposits on silicon Thiol deposits on gold Deposition Formations Densely Packed Amorphous Structure Functional group determines: applications hydrophilicity/hydrophobicity Used as: binders for subsequent molecules lubricants Common hydrophobic SAMS: OTS (long chain hydrocarbon) FDTS (long chain fluorocarbon)

Deposition O Si OH Si OH OH OH Si Si Si O O O O Si Si O Si O Si O Si O Si O Si

Interstitial SAMs for Deposition

Step 1: Deposit SAM layer of 3-mercaptopropyl trimethoxysilane (-SH terminus) Step 2: Oxidize SAM layer Forms -SO3H terminus Step 3: Deposited Ceramic layer ZrO2 in the presence of HCl Y2O3 in the presence of urea

Cantilever Beam Array Technique

Cantilever beams are fabricated of different lengths Cantilevers are put into contact with surface Longer beams adhere to surface

Beam Structures

Longest beam that does not stick signifies adhesion force

SAM coated beams adhere after longer lengths than oxide surface

Results

Proof Mass Wear

Silicon Oxide
Post

Apparatus
Proof Mass

FDTS Covered
Post

Results
Proof Mass

Electrostatic Lateral Output Motor

Relative humidity can determine if failure occurs from Wear or Stiction

Cantilevers in Contact Mode

Adhesion Test Friction Test

Tests materials at the nanoscale Cantilever tips are silicon nitride Results

Conclusion
Friction and Wear are the biggest issues in blocking advances of MEMS technology Once SAMS and Diamond Coatings are more fully developed, MEMS technology will be able to more completely realize its potential.

Reference

www.falexint.com www.wikipedia.org lqme.sjtu.edu.cn www.tribology-abc.com Design of machine elements- V.B BHANDARI Fundamentals of Tribology-Basu, Sengupta, Ahuja

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