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Transmission Line Balanced Inductive Plasma Source LMBDA RESONATOR G Vinogradov

Rotationa and Translational Temperature in Niitrogen Plasma 1977 JTP

Role of Electrical Particles and Electic Fields in Plasma Polymerization 1993 ISSP'93 Tokyo Vinogradov

Plasma Polynmerization of Octa-fluoro-cyclobutane 1982 in CCP RF Discharge G Vinogradov

Plasma Polymerization of Clurocarbon Mechanism Kinetic Model ISPC-12 Fluorocarb Hetero

Plasma Polymerization in CH4 Discharge on Thin Wires and Flat Substrates G Vinogradov

Plasma Polymerization Review 1986 G Vinogradov

p2id Gk Vinogradov 2003 300 Mm Plasma Equipment

Method of Measurement of Ion-electron Re Combination Coefficient JTP-1973-1-G Vinogradov

Mechanisms of Gas Phase Transformations g Vinogradov Ispc-12

Mechanism of Heterogeneouse Stages of Plasma Polymerization of Fluorocarbons ISPC-12 1995 G Vinogradov

Langmuir Probes Lambda Resonatorl Plasma G Vinogradov

LAMBDA RESONATOR Balanced Inductive Plasma Source JJAP 1996 G Vinogradov

Lambda Balanced Inductive Plasma Source Jvst

Kinetics of Plasma Transfomations of Hexafluoropropylene C3F6 1991 Timoxov Vinogradov

Kenetics of Plasma Polymerization of Perfluoro Cyclo Butane on PROBE SURFACE (1985-86) G Vinogradov

ION Electron Re Combination in Moderate Pressure Neon Discharge 1973-2-Vinogradov

Groovy Plasma Source Multi Coil Sio2 and Low-k Etching Ispc-16 2003 g Vinogradov

Groovy ICP ETCHER SST G Vinogradov_apr05

Giant Folds in High Dose Ion Implant Resist G Vinogradov

Etching Kinetics of Ti-(W-Ti) in SF6 Plasma 1989 G Vinogradov

Electrical Conductivity of Plasma Polymer Film During Deposition in Gas Discharge 1985-86 g Vinogradov

Electric Field Effect on Si Etch in SF6 CCP 1986 Vinogradov

AFM Patterning on Plasma Polymerized Film Acetylene C2H2 JJAP 1994

Activation-chemisorption Model of Plasma Polymerization 1981 Gk Vinogradov High Energy Chemistry

!E-Field Effect on Si Etch in SF6 CCP 1986 Vinogradov

!5,965,034 Lambda Resonator Patent Mce 1999

!! Direct Electrical Field Effect in Plasma SUrface Interactions Lo Ugh Borough Vinogradov