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,
.. , ..,
.., ..,
..
NbN
2011
621.396.62
32.849
645
:
- ,
. .;
- ,
. .
645 .., .., .., .., .., .., .., ..
NbN:. .: , 2011. 86 .
NbN. ,
. (
), .
, , .
ISBN 9785-426300477
, 2011
. , 2011
........................................................................................................ 5
1.
.............................................14
1.1. .......................14
1.1.1. ......................................................................14
1.1.2. ......................................................................15
1.2. .................................................17
1.2.1. ..........17
1.2.2. HEB ..............20
1.2.3. HEB ......24
1.2.4. HEB .........24
1.2.5. HEB ..............................................27
2. HEB
...........36
2.1. HEB ......................................................36
2.1.1. HEB .........................................36
2.1.2. HEB ...............................................38
2.2. HEB .....38
2.3. HEB .......................................40
2.4. HEB ......................................................43
2.5. HEB ................................45
3.
NBN HEB
.................................48
3.1. HEB ....................................48
3.2. HEB
.............................51
3.3. HEB ........................................54
4.
HEB
810 ......................................58
4.1. .....................................................................58
4.2. HEB .......62
4.3. HEB
.........................................................66
4.4. HEB
......................................................69
..................................................................................................72
.........................................................................74
.......................................................................................75
......................................................................................84
(0,3 3 )
[14].
,
,
. , CO, CS, SO,
SO2, HCO+, HCN, C, N+ C+,
.
.
.
, , . , , ,
, ,
,
. , , .1. , ,
30 K.
, , -
, (RLT [1], SMA [5], ALMA [6])
(SOFIA [7]), (Herschel [8]).
5
.2
4200 (Mauna Kea, Hawaii).
, 1, , Mauna Kea,
.
.1. ,
. ,
30 K
.2.
4200 (Mauna Kea, Hawaii)
.
,
(),
[910]. ( ),
1 -
.
1
-- ( ) -
( h/kB)
. , (,
SMA[5], ALMA [6]). ,
,
, [12].
(hot-electron bolometer
7
, . , (. ),
:
T + T
,
(1)
T = R
B
TA ; TR
; B ; t -.
, /
.
, ,
, -,
. , , , .
, ,
-
,
(. (1) ).
, , ,
1/f () ,
( 1/f )
(). HEB ( )
1 [27] .
. ,
, - -.
9
[2831],
.
, (
- ), ( ,
).
,
:
, ( , ) ( ).
, - , . -
, , , .
- . , -
, . HEB 3,2
[20] 5,2 [21].
D
[32].
10
Lth = D ,
(2)
D ; tQ .
.
9 [33].
, .
,
. , , , , ,
, , .
, , . ,
.
HEB
, , , ,
. , HEB
[3436].
.
,
.
, (
) [37], .
11
HEB ,
[16, 17],
,
. ,
,
.
[21],
[20].
.
HEB
:
[38] [39]. .
.
, . , 1
, . (, , ),
.
, , :
1. HEB
;
2. HEB 12
;
3. HEB
.
, NbN 3,5 ,
Si, , 0,8 NbN 3,5, Z- MgO.
13
1.
1.1.
,
.
.
, . ,
:
( ) -- ( ) ( ).
1.1.1.
, -
[1820, 40]. ,
. 14
. .
(~5)
[19, 41],
. ,
[19]: (TR) 585 1684 1,6 [18]; ,
2,5 , TR ~ 9000 .
( ~ 30 ) [42].
1.1.2.
[43, 44]. , , ,
h/kB 48/.
,
.
[44], , 48 [45].
, 35
(h/kB) 50 800 [4548].
( , ) .
15
, , ,
[49].
, ,
, [50]. ,
, . , 5070 /2 [49]. ,
, [51]. -
, , ,
. [52],
, .
- [53, 54].
66 (3 h/kB) 455 210 (7 h/kB) 630 [55].
, .
[56].
, , .
16
[57].
[58,59]
,
. ,
, .
[44],
, fmax = 4D/h (2D ), 1,31,4 Nb, .
,
NbN (fmax = 2,42,5 ) NbTiN (fmax = 1,5 ) [60].
,
, , Al. Nb Al
1
1000 (21 h/kB) [61, 62]. -
NbTiN/
/SiO2/Al ,
.
1
,
( ).
1.2.
1.2.1.
(hot-electron bolometer
HEB) , (.3,a):
17
[63].
.3. :
a) ;
) NbN
. , , .
,
.
[64].
,
Te > Tb, Tb . () - t eph ,
( )
Tph. - tphe
tesc.
.3,
NbN
. .
18
, ,
,
[64],
, ,
, . ,
.
, . ,
.
tQ.
teph tesc, (ce)
(cp) . , tQ
Ldiff = 4 D .
(3)
, , tQ.
L, ,
,
L2
diff ,
(4)
D
( ). , L < Ldiff ( ,
),
, . HEB HEB , DHEB.
(L > Ldiff)
, .
HEB , PHEB.
HEB
, , , ,
.
19
1.2.2. HEB
[6567]:
dTe
= (Te ,T ph ) + PDC + PRF ,
dt
(6)
dT ph
c ph
= (Te ,T ph ) (T ph ,Tb );
dt
Te Tph ; ce cph ; W , PDC PRF DC
RF ; Y ,
.
Y ,
(6) .
|Te Tb| << Tb ( ,
),
, (6) :
ce
ce
Te Tph
dTe
= ce
+ PDC + PRF ,
dt
eph
c ph
20
dT ph
dt
= ce
Te T ph
eph
c ph
T ph Tb
esc
(7)
teph - ,
tesc . DC
R
(Te Tb ).
Te
, ,
PDC = I 2 R(Tb ) + I 2
Te Tph I 2 R
dTe
I 2 R(Tb ) + PRF
=
+
(Te Tb ) +
,
eph
dt
ce Te
ce
c Te Tph Tph Tb
= e
.
dt
c ph eph
esc
dTph
(8)
(9)
, , , Tb,
.
, .. (9)
, |Te Tb| << Tb.
, Te Tph ~ Tph Tb.
ce esc
<< 1,
c ph eph
(10)
:
Te Tph I 2 R
dTe
I 2 R(Tb ) + PRF
=
+
(Te Tb ) +
,
eph
dt
ce Te
ce
dTph
Tph Tb
(11)
=
;
dt
esc
, :
I 2 eph R I 2 R(Tb ) + PRF
,
(12)
1 c T +
ce
e
e
, Tph Tb.
dTe
T T
= e b
dt
eph
21
I 2 eph R
m
.
, 0 =
(13)
ce Te
1 0
a0, (13),
- DC . HEB R/T > 0, 0 ,
- .
.
DC , .
:
DC , , ,
. , a0
,
. , a0 = 1, :
, , .
( R/T ,
).
, (9),
teph tesc,
ce/cph. , . PRF
(. (5).
m =
(14)
PRF = 2 PLO PS 1 + cos ( IF t )
Te = 2
22
PLO PS
ce
1 eph
1 + i IF 2
(15)
2 1 (1 0 ) (1 + i IF + )(1 + i IF )
,
eph + 2 ( 0 1)
4 2 eph 2 1 ( 0 1)
1 1
,
2 2 eph
1 eph + 2 ( 0 1)
c ph
,
1 = eph
(16)
ce
1 =
1
1
21 = esc
+ eph
ce
.
c ph
V AC = I
R
Te
Te
(17)
:
2
V AC
P
= AC =
=
2PS R
PS
P
1
= 2 LO
PDC 2 1 (1 0 )
2
0
1 + i IF 2
. (18)
(1 + i IF + )(1 + i IF )
(9) (15)
HEB ,
(12), teph
tQ. :
=
2 20 PLO
1
, m = .
2
2
2
1 0
1 0 PDC 1 + IF m
(19)
, 3- ,
(19). NbN . 1 [68].
23
1
NbN
Tc,
K
DTc,
K
D,
c e,
3 K1
cph,
3 K1
teph,
0,5
3,5
1,5 103
10,5 103
10
tesc,
D,
2 1
38,5
0,4
1.2.3. HEB
HEB .
:
2
dTe
Te Tb I diff R I 2 R(Tb ) + PRF
1
,
=
+
dt
ce Te
ce
diff
(20)
L2
,
(21)
2 D
L D
[69].
(19) ,
diff =
diff =
2 20 PLO
1
,
2
1 0 PDC 1 + 2IF 2m
m =
diff
1 0
(22)
1.2.4. HEB
HEB
: [38]
[39]. 24
.4. HEB :
a ;
, 1 ,
. (, , ),
(. 4) [75].
, ,
, . ,
, . (
R
R/n, n ) .
(, Si)
.
;
.
( ) 26
, 1 4,
2 3 .
r1 = a exp(),
r2 = a exp ,
2
r3 = a exp ( ),
(23)
r2 = a exp ,
r ; q
; a .
, . :
Z=
377
2(1 + )
(24)
e ,
. Si e = 11,7, Z 75 W.
1.2.5. HEB
- .5,a.
, , .
, .
, ,
. , ,
, ,
[76].
27
, , ,
( ), .
.5. :
a) ; ) ;
)
,
28
V12 = kBTA ,
(25)
D (
). (25)
TA. ;
V22 = kB BG (TA + TR ),
(26)
TR .
,
V3 = V22 = kB BG (TA + TR ),
3 = 2kB BG (TA + TR ).
(27)
N .
V4 = V3 ,
(28)
4 = 3 .
N
- [7779], B
,
2B . t
2B , 2Bt
,
N = 2 B .
(29)
V4
TA. DTA ,
V4 ; :
V4
TA
V4
TA = 4 TA = 4
.
TA
(30)
29
, :
Tsys
T + TB
.
(31)
TA = A
B
B
.. 1946.
[80]. , (31). Tsys, ,
,
( ), ,
.
() .
, DG. (31)
12
1 G 2
TA = Tsys
+
G
B
(32)
= a0 + a1 .
G
(33)
1 +1
A =
(34)
Ba1
1/f
. tA
30
. 1/f
1/f , , .
.
.. [80] (
) [83]. .5,, TA,
PA = kB BG (TA + TR )
(35)
Tref (,
77 K),
Pref = k B BG (Tref + TR ).
(36)
(35) (36)
(37)
G
(TA Tref ),
(39)
G
TA =
12
TA( S )
2
2
TA + TR TR + Tref
B G TA Tref
1 +
. (40)
= 2
+
2 G TR + TA
B TR + TA
, (40) ,
, G.
, TA = Tref,
31
.
. , ,
, .
.
[84]. ,
, . , ,
.
,
. ,
: )
, ; ) , , , .
HEB ,
1 [85], ,
, ,
.
(40) [86]:
2
TR + Tref
(TA + TR )2 1
1
(S )
TA =
+
+
BA
dA
B ref
dref
(41)
2 1/ 2
G
+ (TA Tref )
,
G
tA , tref . dA dref ,
.
(.5,)
32
[83]. 3- ,
4-
. A B,
(A + B) 1/2(A B) .
,
,
( , TR1 TR2 G1 G2):
12
( )
A
2
2
T + TR TR + Tref
B G TA Tref
1 +
, (42)
= A
+
2 G TA + TR
B TA + TR
2 , , .
, HEB
,
.
SIS ,
,
, HEB
.
,
. ,
,
HEB
,
,
- ().
HEB
Kooi et al, HEB
0,673 , 1,462 ,
1,630 2,814 . ,
HEB , , HEB 80 . 1/f .
33
0,3.
, ,
.
(
[87])
1015 , , 1/f . , HEB
.
.
, .
1. , 1, ,
, . , , ,
1 , ,
.
.
(HEB )
.
2. ,
, HEB
( ~3
~5
).
34
3. , HEB , , HEB
. 1 , , , , .
.
4.
,
HEB ,
.
35
2.
HEB
2.1. HEB
2.1.1. HEB
.2 HEB . HEB , ,
NbN 3,5 ,
Nb Si ,
830C.
Ar N2 5 103 812 105.
NbN in situ Au 15. ,
in situ .
, ,
.
in situ .
.
Cr(3 )
Au(70)Ti (8 ) ( ), Cr , Ti
.
36
:
, Ti(5 )Au (200 )Ti (5 )
( ), Ti , .
2
HEB
In situ
NbNAu
-
Au
,
SiO
NbNAu
NbN-Au
SiO ,
in situ , AuNbN . , .
37
NbN
500W, ( ) 74 W
- 0,1.
2.1.2. HEB
HEB
.
HEB Si
z- MgO 200
NbN . 0,120,13 1,5
. , HEB , 30
2 126 ( Si
,
, ).
2.2. HEB
HEB
. .6,a, .
38
.6.:
a) R(T);
) HEB ,
.
-
4- Keithley
10
Solartron . ,
.
HP34401A,
4- . .6,
RT- HEB , .
9 1.
7
Au ,
39
NbN-Au,
NbN [64].
,
, 106A 2.
2.3. HEB
, , .7. HEB :
(),
270320 .
,
, 0,1 10 .
.
, , ,
.
, ,
LakeShore.
40
.7.
HEB 3-
, Picosecond Pulse Labs 18
MITEQ 0,112 36 . 0,1
6 Rohde & Schwartz
( 100 6) (..7,a).
6,
, (. .7,).
2 8 50
MITEQ.
HEB , 1, , , , , ,
.
, , 270320 .
, ,
,
41
.
R(T) ( ), , .
, -
, (dV/dI)0 ,
T, R(T).
,
1/2RN ( NbN R(Tc) = 1/2R(20K)),
, (dV/dI)0 = 1/2RN, Tc, , .
HEB .
, . ,
, .
dImixer/Imixer << 1 (dImixer , );
, . dImixer/Imixer = 0,05. , - , .
HEB
dV
d
R
R Te
IR ( I ,Te ) = R + I
=
+I
. (43)
I
Te I
dI dI
(43) , [64] (
).
Z
42
, ,
R
R
RI
0,
(44)
I
I
(,
), , -.
-. ,
,
.
R+I
2.4. HEB
HEB
810. ,
, .8. HEB , . 90 0,81 .
z- ~2,7,
~60.
, ,
, . - (), .
Zitex G106, 77-K
,
, .
43
2,54,0,
30 38.
, 35 16 , 380
c 3,5 , ,
Agilent 8473D, .
.8.
,
. DC SR560, 10- 12 23 .
HP34401A, 65.
HP
15-
.
44
[7779].
c
17,3 HP83630A
. , 300- 20- .
. . -,
, . -, , , 3- , 3 NbN ,
. , , , ,
. , .
17,3.
2.5. HEB
.9,
,
,
, . ,
54 , -
(OCS) 5 , . OCS 10
790820 [88].
. : , , ,
45
0,02 . .
.9.
. 380
3,5 . Agilent 8473D, .
DC 23
10- 12 .
65.
46
15- . , , --.
,
3,54,5 50950
FFT Acqiris 60 .
HEB
17,3 HEB
, .
,
.
47
3.
NBN HEB
3.1. HEB
HEB in situ . 2.
0,12 0,35 0,05 .
10 .
50 ( NbN 3,5 500 ). .3. ,
, 12, . ,
,
50. .
. 3 ( ): ; , ; , ; ;
4,2 ;
4,2 ; 300 ; , 300 , 48
, NbN
500 2 ; ;
, (51)
(.) 2
3
1126/1#12
1126/1#15
1126/1#16
1126/1#17
1306/2#16
1306/2#23
1306/2#33
1306/1#8
1306/1#7
684#6
1126/2#4
lmeas, wmeas,
0,332 2,4
0,347 2,4
0,157 2,4
0,167 2,4
0,176 1,9
0,196 1,9
0,112
1
0,216
2
0,216
2
0,320
4
0,200 1,5
Tc,
11,5
11,5
11,3
11,5
8,9
9,8
9,1
9
8,3
9
10,6
Ic, Jc,106,
/2
554
6,60
585
6,96
578
6,88
498
5,93
175
2,63
200
3,01
132
3,77
106
1,51
103
1,47
230
1,64
280
5,33
R300,
92
98
64
60
76
85
107
99
105
74
136
0.594
3
3,5
0.461 3,5
3,5
0.166
6
5,4
0.197
5
5,2
0.281 4,2
4,9
0.315 4,5
4,6
0.210 6,5
7,8
0,388 3,8
4,3
0,412
3
4,3
0,576
4
3,6
0,402 6,2
4,5
1) 3,5 ()
:
R
lcomp = wmeas 300
(45)
RS
, , -,
, , in situ
.
2) NbN
.
, :
49
RScentre dedge
=
,
RSedge dcentre
(46)
d . (46) ,
, , , . ,
, ( Nb N)
.
3)
.
,
.
4) ex situ (. .2),
in situ Ti,
.
, 1261/1 1306/2 1,2 ;
2,5 .
,
:
Tc (0)
T
J c (T ) (0) f ,
Tc
(47)
, ( 1,2 2,5 ,
(47) ,
). ( ) ,
-,
. , , .3, , tph
(50) Tc
tesc,
50
. , Tc.
3.2.
HEB
- , ,
.10. 4,2
. . .
; ,
. ,
, 50,
- (
RN/2
50). , - .
.10. - ,
.
51
. .
1
.11
0,11.
( )
P ( f IF ) =
P (0)
,
(48)
2
1 + ( f IF f3dB )
. , 3,5 HEB Si
MgO. .12
.
.11. HEB
. 3. , 0,10,2
3,5. ,
( , 52
, ). ,
( , ) : .
:
Gtot = G ph + Gdiff ,
(49)
1
1
C
Ce
1
e =
=
+
.
Gtot G ph + Gdiff ph diff
(50)
.12.
(19).
NbN (21) (50)
f3dB
0.06
= 3+
,
(51)
2
1
L 1 )
(
53
L .
(51) . 12 .
,
,
, . , ,
(51), .
. .
(
10%); , ,
( , ,
. , , 0,20,3,
. ,
.
3.3. HEB
. -, , 3- .
-, . , S21
. ,
S12
S
(52)
S = 11
, S12 = S21,
S21 S22
,
,
54
, . , 3 : 50- , .
, (, Tc)
, . , ,
.
.
2
P ( f ) = S21 PM ( f ) = S21
PM (0)
1 + ( f f3dB )
(53)
PM .
. 1, HEB , ,
. , , .
,
, [89,90]:
( IF ) =
2 20
(1 + Z
Z L ) (1 )
2
PLO
1
(0)
,
2
2
PDC 1 + IF m 1 + 2IF 2m
(54)
I 2 R Z L R
ZL R
, 0
,
m
1
Z L + Z ce Te Z L + Z
Z ,
1/tQ ZL ,
ZL =
RS Z IF
,
RS + Z IF
(55)
, . 13
. Rs
ZIF=50W .
55
:
- .
ZL= 20 W (. .10).
.13.
HEB
,
constant I 2
ZL R
Z V I
,
= constant I 2 L
ZL + R
Z L +V I
(56)
, ,
R
e Te
- Z=R
Tc. ,
V I RL
1 + constant I
V I + RL
(57)
- ,
V/I ZL, (57) . , , . (53)
A B (VB > VA),
56
(
(
B
PA ( f ) PA (0) 1 + f f3dB
=
PB ( f ) PB (0) 1 + f f A
3 dB
)
)
2
2
(58)
.
S21 . 3- , , ,
.
57
4.
HEB
810
4.1.
HEB Y- .
, .
(295 ),
(60)
, , , (HEMT)
4,2 .
58
(61)
THEMT , 4, Tbath=4,2 K .
(59)(61) , , :
Pamp Pcold
T +T
= bath HEMT
.
(62)
PV = 0
Tamp Tcold
, ,
,
1. 17,3.
. , . ,
, ,
[91].
.
, NbN,
.
, < 10%,
(. .14). , .
, . ,
,
, , .
59
.14. HEB .
() ()
0,81
NbN , . , , ,
. (< 10% ),
NbN. ,
3- ,
. ,
NbN
, 1,2 0,052
60
.15.- HEB ,
0,81 17,3 .
0,81 ,
, 100% (), 80% () 60% ().
.15, 3- .
HEB , 0,81 ,
.
, , , , 0,81
, . , NbN
17,3 .
0,81
- HEB
. , ,
, .
61
-.
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.
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,
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0,8K . (41) TA = 300 K, TR = 800 K,
Tref = 77 K, B = 380 M, tA = tref = 5 s, dA = dref = 1/5
DTA0,07 K. 10 , ,
.
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, 1/f ,
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809,353 , 3- 3.
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40, .
250, 16384 60.
:
,
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(69)
77 K
Scold ( ) = kB BG (Tgas ( ) + TR )
(70)
77 K ; , , , 77
,
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(71)
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.
Samb ( ) Sbase ( )
(72)
12-
, ;
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. 16 ,
.
.
1,7K 2,8 K
. (41) : TA = 300 K, TR= 800 K, Tref = 77 K, B = 12 M,
tA=tref = 0,25 s, dA = dref = 1/3, DTA1,4 K.
,
70
. , , 2 . ,
.
71
, ,
:
1. 6,5
300
HEB in situ ,
3,5,
HEB ex situ .
2. HEB
.
3.
HEB .
4. HEB , , 10, 1
.
5. 1/f
, , .
6. 0,7K
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,
1/f .
7.
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.
72
1,4.
1/f .
73
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,
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83
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