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27 2007 . 616-

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.

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 14644*32007

1 .............................................................................................................................................. 1
2 .............................................................................................................................................. 1
3 ......................................................................................................................................... 1
4 .................................................................................................................................................. 5
4.1 ............................................................................................................. 5
4.1.10 ............................................................................................................................... 5
4.1.2 ...................................................................................................................... 5
4.2 ................................................................................................................. 6
4.2.1 .................................................................................... 6
4.2.2 ...................................................................................................................... 6
4.2.3 .................................................................................................................................. 7
4.2.4 .................................................................................. 7
4.2.5 , ................................................................................. 7
4.2.6 ................................................................................................ 7
4.2.7 ........................................................................................ 7
4.2.8 ................................................................................................................................... 7
4.2.9 ........................................................................................................................ 7
4.2.10 ............................................................................................ 7
5 ................................................................................................................................................ 8
()
....................................................................................................................................... 9
8 () ........................................................................................................ 14
() ..................................................................... 38
()
............................................................................. 48
........................................................................................................................................................... 49

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014464-1;
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2 TS2 1
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.
,
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3.2
3.2.1 (aerosol generator): , ,
. ,
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2).
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, , , 1 100 .
14644-1 ( 2.2.1).

3.2.3 ; (count median particle diameter. CMD):

, .
:
, , .

3.2.4 (macroparticle): 5 [
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3.2.5 - (M-descriptor): 1 1
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,
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.
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3.2.7 (particle concentration): .

3.2.8 (particle size): , ,
, .
3.2.9 (particle si2e distribution):
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.
3.2.11 U- (U- descriptor): , -
, 1 3 .
U-
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,
[ 14644-1. ( 2.3.1)].

2
 14644-32007

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3.3
3.3.1 (aerosol challenge):
.
3.3.2 (designated leak): ,
,
.
3.3.3 (dilution system): ,
, .
3.3.4 (fitter system): , ,
.
3.3.5 (final filter): ,
, .
3.3.6 (installed fitter system): ,
, , .
3.3.7 (installed fitter system leakage
test): , , ,
.
3.3.8 (leak): ,
- .
3.3.9 (scanning): ,

.
3.3.10 (standard leak penetration): ,
, ,
.

.
3.4
3.4.1 (air exchange rate): ,
, ,
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3.4.2 (average aiflow rate): ,
,
.
3/.
3.4.3 (measuring plane): ,
.
3.4.4 (non-unidirectional airflow): ,
,
, [014644-4 ( 3.6)].
3.4.5 (supply aiflow rate): ,
( ) .
3.4.6 (total aiflow rate): ,
( ) .
3.4.7 (unidirectional airflow):

.
3.4.8 (uniformity of aiflow):
,
.
2* 3
 14644*32007

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3.5.1 (discharge time): ,
( ).
3.5.2 (offset voltage): ,

.
3.5.3 (static-dissipative property):

.
3.5.4 (surface vottage level):
,
.
3.6 -
3.6.1 (aerosol photometer): ,
, .
3.6.2 (anisokinetic sampling): ,
, ,
.
3.6.3 (cascade impactor): ,
, , , (
).

, , ,
.
3.6.4 (condensation nucleus counter. CNC): ,

.
3.6.5 (counting efficiency):
.
3.6.6 (differential mobility analyzer. DMA):
. ,
.
3.6.7 (diffusion battery element):
,
.
3.6.8 (discrete-particle counter. DPC): ,
.
3.6.9 (false count, background noise count, zero count):
, ,
.
3.6.10 , (flowhood with flowmeter): ,
.
.
3.6.11 (iso-axial sampling): ,
,
.
3.6.12 (isokinetic sampling): ,
, ,
.
3.6.13 , (particle size cutoff device):
,
.

4
 14644*32007

3.6.14 (threshold size): ,

, .
3.6.15 (time-of-flight particle size measurement):
,
.
,
.

3.6.16 (virtual impactor): ,

() .

,
.

3.6.17 (witness plate):

, ,
.
3.7 (Occupancy states)
3.7.1 (as-built): , ,
, ,
( 14644-1 ( 2.4.1)).
3.7.2 (at-rest): ,
, . [
14644-1 ( 2.4.2)).
3.7.3 (operational): ,
, ,
[014644-1 ( 2.4.3)).

4.1
4.1.1
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014644-1 , 014644-2.

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14644-2

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4.2.5 .7 .7 14644-2
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 14644*32007

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41

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,

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14644-2.
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60 % , 10%- ,
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.

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0.SU 0.9U U 1. 5U

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16
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18
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:
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,
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100 1000 (
).

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22
 14644*32007

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 14644*32007

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24
 14644*32007

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Pf
( MPPS) :
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, PL Ps:

25
 14644-32007

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qVa , ^/;
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Dfi , , ;
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N , ();
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, ;
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PL
(28,3 /). .
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5 -10-4 5 10*5 5 10** 5 10*7 5-10-8

10 10 30 100 300

Pt MRRS
.

PL .

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0,01 %.
0.05 % 0.005 %.
(0.8 10.2) .
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:
a) , - 0. Np - 3.7;
b) 1.

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4 Np Np

0 3.7 6 13.1
1 5.6 7 14.4
2 7.2 8 15.8

3 8.8 9 17.1
4 10.2 10 18.4
5 11.7 11 19.7

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^ = - 2 ^ . (.4)

26
 14644-32007

8.6.3.6.4 S,
S, [1]

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.

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qVi = 472 3/ (28,3 ^).
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.
:

S, S [ ( - Pt)qvs * CcPsq J (y/Vp); (B.9)

Np, * Vc (Pi ~ PMv> * CcPsgvJ T,. (.)

B.6.3.8
..

27
 14644*32007

g = qvf = 472 3/ (28,3 /)

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28
 14644*32007

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5167-1:2003

5167-2:2003

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7726:1998

12599:2000
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48
 14644*32007

(1JASME N5101989 Testing of Nuclear Air-Treatment Systems. Fairfield. New Jersey. US: American Society
of Mechanical Engineers
(2] ASTM F2400 Standard Method for Measuring and Counting Particulate Contamination on Surfaces.
Philadelphia. Pennsylvania. US: American Society for Testing and Materials
(3] ASTM F5092(2001)1 Standard Practice for Continuous Sizing and Counting of Airborne Particles in Dust-
Controlled Areas and Clean Rooms Using Instrument Capable of Detecting Single Sub-
Micrometre and Larger Particles. Philadelphia. Pennsylvania. US: American Society for
Testing and Materials
(4] ASTM F31297 (2003) Standard Test Methods for Microscopical Sizing and Counting Particles from Aerospace
Fluids on Membrane Filers. Philadelphia. Pennsylvania. US: American Society for Testing
and Materials
{5] ASTM F32898 (2003) Standard Practice for Calibration of an Airborne Particle Counter Using Monodisperse
Spherical Particles. Philadelphia. Pennsylvania. US: American Society for Testing and
Materials
(6] ASTM F147193 (2001) Standard Test Method for Air Cleaning Performance of a High-Efficiency Particulate Air-
Filter System. Philadelphia. Pennsylvania. US: American Society for Testing and Materials
(7] Chemical Abstracts Service Registry. Columbus. Ohio. US: American Chemical Society
(8] EN 1822*2:1998 High efficiency air Tillers (HEPA and ULPA) Part 2: Aerosol production, measuring
equipment, particle counting statistics
(9] EN 1822*4:2000 High efficiency air filters (HEPA and ULPA) Part 4: Determining leakage of niter element
(scan method)
(10] EN 12599:2000 V Ventilation for buildings Test procedures and measunng methods for handing over
installed ventilation and air conditioning systems
(11] IEST-G-CC1001:1999 Counting Airborne Particles for Classification and Monitoring of Cleanrooms and Clean
Zones. Roiling Meadows. Illinois. US: Institute of Environmental Sciences and Technology
(12] IEST-G-CC1002:1999 Determination of the Concentration of Airborne Ultrafine Particles. Rolling Meadows.
Illinois. US: Institute of Environmental Sciences and Technology
(13] IEST-G-CC1003:1999 Measurements of Airborne Macroparticles. Rolling Meadows. Illinois, US: Institute of
Environmental Sciences and Technology
(14] IEST-RP-CC001.3:1993 HEPA and ULPA Fitters. Rolling Meadows. Illinois. US: Institute of Environmental Sciences
and Technology
(15] IEST-RP-CC006.3.2004 Testing Cleanrooms. Rolling Meadows. Illinois. US: Institute of Environmental Sciences
and Technology
(16] IEST-RP-CC007.1:1992 Testing ULPA Filters. Rolling Meadows. Illinois. US: Institute of Environmental Sciences
and Technology
(17] IEST-RP-CC021.1:1993 Testing HEPA and ULPA Fitter Media. Rolling Meadows. Illinois, US: Institute of
Environmental Science and technology
(18] IEST-RP-CC034.2:1999 HEPA and ULPA Filter Media. Rolling Meadows. Illinois. US: Institute of Environmental
Sciences and Technology
(19] ISO 5167*1:2003 Measurement of fluid flow by means of pressure differential devices inserted in circular
cross-section conduits running full Part 1: General principles and requirements
(20] ISO 5167*2:2003 Measurement of fluid flow by means of pressure differential devices inserted in circular
cross-section conduits running full Part 2: Orifice plates
(21] ISO 5167*3:2003 Measurement of fluid flow by means of pressure differential devtoes inserted in circular
cross-section conduits running full Part 3: Nozzles and Venturi nozzles
(22] ISO 5167-4:2003 Measurement of fluid flow by means of pressure differential devices inserted in circular
cross-section conduits running full Part 4: Venturi tubes
(23] J AC A N0.24:1989 Standardization and Evaluation of Clean Room Facilities. Japan Air Cleaning Association
(24] JIS 9921:1997 Light scattering automatic particle counter. Japanese Industrial Standards Committee
(25] SEMI E14-93 Measurement of particle contamination contributed to the product from the process or
support tod. San Jose. California, US: SEMI (1997)
(26] US Patent 5.059.349 Method of measunng the efficiency of gas mask filters using monodispersed aerosols
(27] US Patent 5.059.352 Method for the generation of monodispersed aerosols for filter testing
(28] VDI 2083 Part 4:1996 Cteanroom technology Surface cleanliness. Berlin: Beuth Verlag GmbH

49
 14644*32007

543.275.083:628.511:006.354 13.040.30 58
19.020 94 0000

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