»

: 01.04.01 -

:
. . . .

2014
 2

.…………………………………………………...…… 2
……………………………………………………….…...…... 8
I ……………………………….…........ 25
1.1 ….. 25
1.1.1 ……………………………………………. 25
1.1.2 ,
……………………………………………………………….…. 27
1.1.3 ………………………………………………….. 32
1.1.4 …………………………………………..…... 35
1.2 –
………………………. 38
1.3 – ..… 42
1.3.1
…………………………………..……………………………………… 42
1.3.2 …………………..…. 45
1.4 …………. 48
1.4.1 …………………………………… 48
1.4.2 .…………… 49
1.4.3 ……………………………………………. 55
1.4.4 ………………………………………………………… 59
1.5 1………………………………………………….... 63
2
808 ………………………………………………….. 65
2.1 66
…………………………………………………………………...
2.1.1 ……………...………….. 66
2.1.1.1 ……………. 66
2.1.1.2 ….…………. 68
2.1.2 …………………………………………….. 72
 3
2.1.2.1 ……...………………………. 72
2.1.2.2 ………….…………………………….. 77
2.2
…………………………………………………………………... 78
2.2.1 …………. 79
2.2.2 ……. 81
2.2.3 ………………. 82
2.2.3.1 .….. 82
2.2.3.2 …. 86
2.2.3.3
…………………………………………………………………. 87
2.2.4
………………………………... 89
2.3 ….. 91
2.3.1 …………………………………………….... 92
2.3.2 …………………………………………..... 95
2.3.3 …………………….. 97
2.3.4 ……………….. 100
2.3.4.1 …………….…………………….. 100
2.3.4.2 ……………………... 102
2.4 2…………………………………………………… 104
3

……………….. 107
3.1 ……………………………………..…. 107
3.1.1 ………… 107
3.1.2 …...... 111
3.1.3
……………………………………..…………………..…... 112
3.1.4 ………….. 113
 4
3.1.5 …………………………………………….. 114
3.1.6 …………………………………..... 114
3.1.7 ….…….………….……. 117
3.2
…………………………. .………………...... 119
3.2.1 (R1)……. 120
3.2.2 (G1)………. 127
3.2.3 ( 1)…………………..... 133
3.2.4 (R2)……………... 140
3.2.5 (G2)……………………..... 145
3.2.6
(G3)…………………………………………………... 153
3.3
…………………………………………….. 160
3.3.1 (R3)…. 161
3.3.2
(R4)……………………………………………………………. 169
3.3.3 (G4)…..... 176
3.3.4
(G5)…………………………………………………………… 182
3.3.5
(G2D)………………………………………………….………. 188
3.4
………………………………...………. 193
3.4.1 AlGaAs
……………………………………. 194
3.4.2
……………………………………………………………….. 196
3.4.3 ………... 199
3.4.4
 5
………………….………………………... 200
3.4.5 …………… 205
3.4.6 ………….. 208
3.5 3…………………………………………………… 211
4
……………………...……..... 213
4.1 ………………... 213
4.2 ……………………………………... 215
4.3 …... 217
4.3.1 , …….... 217
4.3.2 , ……….. 218
4.3.3 ……………….... 219
4.4 …...….. 220
4.5 ……………………….…….. 224
4.6 ..… 226
4.7 4…………………………………………………… 228
5
…………… 230
5.1
808 ………...………………….. 232
5.1.1
…………………………………………… 230
5.1.1.1

……………………………………………………………………… 230
5.1.1.2 ,
………………………………………………….. 231
5.1.1.2.1
………………………………………………………….... 231
5.1.1.2.2
 6
……………………………………………………………………… 234
5.1.1.3
……………………………………………………………………… 235
5.1.2
………….…………...… 239
5.2
940 - 960 ………………………………..... 246
5.2.1 ,
……………………………………………………………………… 246
5.2.2

………………………………………………………………..……… 249
5.3
670 ……………….. 255
5.4 5…………………………………………………… 259
6
…………………………………………………………….. 261
6.1
…………..… 261
6.2

………………………………………………… 266
6.2.1

…………………….………...…………………… 266
6.2.2

……………………..…..… 268
6.3 6…………………………………………………… 271
 7
7

…………………………..……………………………… 272
7.1 « » « »…... 274
7.1.1 ….. 277
7.1.2 ……………………………………………….... 278
7.1.3
………………………………………………………......…….……. 280
7.1.4

………………………………………………..… 284
7.2
( )
………………………….……………...…… 288
7.2.1
………………………...…………………………………………….…. 290
7.2.2 ………………………………………………. 291
7.2.3 .……………………….. 292
7.3 7…………………………………………………… 297
…………………………………………………………… 299
…………………………………...…….. 302
, ……. 304
…………………………………………………………….. 311
 8

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 11
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 14

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 15
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 16
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 17
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 18

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8524, 9098, 14407, 112458, 117189, 117191 « ».

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 19
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+ 600 +1000 ,
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:
:
Laser Optics 1998 2008 ( , 1998 2008 .); 1- , 2-
3- « : »( -
, 2008 ., 2010 ., 2012 .);
( -
, 2008 .); IX «
» ( , , 2012 .); 9
« » ( ,
, 2013 .).
 20
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 21
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 22
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3, 3.1
, «
»
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SiLENSe,
,
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.

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 23
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.
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,
808 .
,
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940 - 960 ,
 24
. 5.3

670 .
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. 6.2

.
7, 7.1 ,

«
», (670, 808 950
).

- .
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-
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 25
I
1.1

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,
100
, 1 .

1.1.1

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– , « ».
, .

107 .
,
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2 108 ,
, ( 0,8 108 ).

,
,

= = , (1.1)
 26
– , c – , n –
[1]. (1.1) = 107 :

1012 2
=1 2
.

, ,

(
) H×W=0,2 × 5 ,
, ~1 .

, ,
.
, :
« » ;
H×W,
W « », « »
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 27
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2
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2
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 28

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, AlGaAs-
2
(1÷5) [1].

2
(10÷30)
 29
2
(0,1÷0,3) . ,
. 1.1.1.
, ,

(103÷104 2
).

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,
1÷2 ).
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 30

1.1 - ( )

860 ,
.
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0,4 ( ~ 0,9 )

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 31
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106 ), – ,
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AlGaAs-
« »,
.
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:
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2. ;
3. ;
4. .

.
AlGaAs- ,
«Al-free» , , InGaAsP.
InP ,
AlGaAs.

. , ,
 32
. , ,
0,8÷0,9
AlGaAs «Al-free»- ,

1.1.3

,
,
, ,
–
, –
. ( ,
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W,
(W ), E(x,y,z,t)
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) ( z) ,
. ,
0

[1].
. -
,
z, :
 33
Ex(x,y,z,t)=E(x) F(x,y) exp i ( 0 ), (1.2)
– ,

neff k0 =

=k0 neff . ) (1.2)

, F(x,y)
.
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W>> ,

,
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.
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.
neff.

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5÷7 .
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 34

1.2 -
:
a) ,
,
b) y;
c) ni(x,y)
nr(x,y) F(x,y);
d) ( ) neff,i(x)
neff,r(x) E(x).
 35

, , ,
[2].

(4 – 6 )
p-n , .
, .
:
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 36

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. i

95÷99%. ,
1÷2% . i 2%
( ),
( ).

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.
GaAs/AlGaAs
,
-1
, 5 10 .
, , .
 37
0,3÷1 20 50%
,
.
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-1
1÷2 . ,

/n ( ) 1÷30 ,
,
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( , );
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.
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2
, ~50 ,

.
( 1%) , .
~8 , . ~200 .
GaAs/AlGaAs .
 38

50÷60% .

, – .
GaAs, AlGaAs GaInAsP,
, –
, p-n .
,
, « » .

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1.2 –

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 39
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200 ÷ 400 . ,
10÷15
100÷400
.
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.

,
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,
( 10.000
)
.
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80÷100
200÷300 ( Lasertel, ).
 40
. 1.3.
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.
20÷40% ( ) 70÷90%
).
250÷500 ,
- 50÷100 .

1.3 - .
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 41
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40 (
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500
2
10 .
,
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).
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,
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 42

,
(808 , 950 ).

1.3 –
1.3.1

. -
(Nd:YAG) ,
Er:YAG, Cr:LiSrAlF6, Tm:YAG, Ho:YAG ( 1.1). Nd:YAG
798÷810 AlGaAs/GaAs
, Er:YAG
InGaAs/AlGaAs ,
920÷960 . Tm:YAG Ho:YAG
1,8 ,
InGaAs/InGaAsP.
Cr:LiSrAlF6 , 680 ,
GaInP/AlGaInP.
1.1

, ,
Cr:LiSrAlF6 0,85 0,68
Yb:YAG 1,03 0,94
Nd:YAG 1,06; 1,32; 1.44 0,81
Tm:YAG, Tm:YLF 2,1 0,78; 0,80
Er:YAG, Er:YLF; Er:BYF 3,0 0,79; 0,97
 43

.
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-

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 44
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1.000 .
,
.

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1.4 - ( )
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 45
. 1.4 ,

1.3.2

.
, 4
, ,
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.

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Nd:YAG
808 , 0,4
.
0,3 6, 7 .
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 46
( . . 1.4 )

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60
8.
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.
Nd:YAG 300
11, 12 .

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 47
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 48

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1.4
1.4.1

808
–
.

,
GaAs ,
.
, p- n- , ,
,
,
,
 49
.
:

AlxGa1-xAs GaAs
.
, AlxGa1-xAs/GaAs
x .
, ,
700 ÷ 870 .
(Al)GaInAs ,
AlGaAs/GaAs
. ,
, (Al)GaInAs
GaAs. , (Al)GaInAs

.
,
, 800 ÷ 1100
.
(800 ÷ 1100 )
GaInAs
GaInAsP,
GaInP. GaInAs-AlGaAs/GaAs,
GaAs,
.

1.4.2

,
. 1.5.

, .
 50
,
.
, ,
:

1.5 -

;
;

, ;

;
;
;

;
 51

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;

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. ,
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, ,
.

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,
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 52

. ,
, « » (Large
Optical Cavity), ,
15
.
, .
, ,
.
, ,
,
.

1.6 -

, 810 .
Al0,7Ga0,3As Al0,45Ga0,55As (
); Al0,65Ga0,35As
 53

(3 – 4 ),
.

808 . 16 .
Al0,4Ga0,6As 1,2
Al0,6Ga0,4As. AlAs
, AlAs
. 1.7 17 .

1.7 -
AlGaAs

( – 27 ),
.
 54
1.2 ,
,
InGaAsP, GaAsP
InGaAsP AlGaInAs 18 . , ,

.
1.2
.

( ,
).
1.2 810 ,
AlGaAs
, , 100 )
QW N DQW, Jt, i, G 0, Ith, d, ,
2 -19
) ) (%) ) ) (%) (0)
InGaAsP 1 18 --- 222 80 23 362 73 25
InGaAsP 1 12 --- 144 80 14 310 73 24
InGaAsP 1 12 117 94 14 292 81 26
InGaAsP 1 6 121 92 18 250 85 28
InGaAsP 2 4 222 85 34 340 75 33
InAlGaAs 2 7 225 90 45 290 85 29
GaAsP 1 9 163 91 19 290 90 25
GaAsP 1 15 140 90 18 260 88 27
GaAsP 1 20 153 92 22 254 88 27
1.2:
QW– ; N –
; DQW – ; –
 55
(--- - , – ,
– ); Jt – ; i

; G0 – ; Ith
( 1000 ); d –
( 1000 ); -
.

,
1 ),
. ,

.
2 ÷ 4 .
,
.

1.4.3

.
, , ,

(gain- ) [19-21].

(
). , « »
(index- ) ,
 56
[22–27]. ,
gain- index- .

.
. 1.8 gain- .

1.8 -
. ( ):
. ( ):

neff. ( ): ,

,
( . . 1.9 ).

.
, , .
 57
,
.
.
.

1.9 -
. ( )
, gain-
. ( )
index- .
( ) ,

,
index- :
 58

. index- . 1.8 .

neff.

neff .
index- , . 1.9 .
,
, .
,
.
,

, . 1.9 .

. index-
, ,
,
. p-n-p
, .

,
.

1.4.4
 59

,
2
10 .
( . . 1.1.2).
:
,
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.
. -
, 90%
3% 20% . ,

10.000 . ,

.
. 1.10 ,
, ,
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28 .

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.

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 60
, ,
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29 .
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30 .

.
 61

31 .

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0
( 800 ),

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32 .

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33 .
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.

34, 35 ,
.
Al,

36 .

.
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.
 62
,
.

37 .
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.

.
,
2
15÷20 38 .
39 .
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.
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 63
-
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.

1.5 1

, , ,
, .

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.
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,
.

( ,
) GaInP/AlGaInP/GaAs AlInGaAs/AlGaAs/GaAs,
(670 ) (808 , 950 )
.
 64
,

.
.
1.
808 .
2.

,
,
.
3.
,
.
4.
, (670 , 808 , 950 ).
5.
.
6.
,
.
7.
.
8.

.
9.

.
 65
2
808

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[40-42]).

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.
,
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,
,
.

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808 .
YAG:Nd,
. ,

, .
,
.
 66
2.1

P
I, ,

P R
st (I I th ) , (2.1)
q R i

– , , q –
, I th – , st –
, i – ,
,
1
R ln ( RF RB ) (2.2)
2L
. L– (
) , RB –
) , RF –
) .
q dP
D st
R
(2.3)
dI R i

(2.1) .

.
,
.

2.1.1
2.1.1.1

.
 67
, , ,
.
, ,
, , .

[43].
,
[43]

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.
,
.
,
[44-47],
, ) ,
, )
, . .
[46, 47] )
,
[45]. , ,
–
, ,
[47]. , [48]
 68
:
.

. ,
, [47],
.
,
,
. , ,
.

2.1.1.2

, ,
.
, [43],
,
.

.
90 , [43]
. . 2.1).

1 1
(T ) 0 exp Ta , (2.4)
T0 T

T0 , Ta 0 ,
~40-50 K. , 90 ,
,
 69
max 0 exp(Ta / T0 ) . [43],
, , .

5
10

)
-1
4

(
10 -1
0
= 4700
Ta= 730
3
10
-1
0
= 140
Ta= 5200
2
10
0 100 200 300 400 500 600
T( )

2.1 - T
( ) [32]. –
(2.4) ; T0 = 300

W,
p , [49] ,
[43]. T
Q
, :
1 1 dE 1 dE dC
T Rth Q , Rth ln ln , (2.5)
W E lT C dE

E – , dE d – p-
p , ; lT –
, ,
. , Q
1 RF
Q ( lT ) P , (2.6)
1 RF
 70
– .
,
[49] :
T0 1 RF
T , T0 Rth ( 0 T l ) P . (2.7)
1 1 RF
1 T0
0 T

(2.7), T
1
0 ( / T ) T0 . [49],

1
1 RF
P lT Rth . (2.8)
1 RF T

[49] / T

GaAs .
60 , (2.4). 0 lT
[49] , ~103-104 –1

~0.1-1.0 , . lT
,
. ,
, (2.8),
,
( Rth ).
,
, , [49]
, « » .
,
[45], [49] .

.
[50] ,
,
 71
. [50] ,
,
. , [50]
,
. , , )

)
, .
,
,
2D 3D [51].

.
, , . ,
, [46, 47], ,
.

.
, ,
.
, « » (
) , [43],
,
.
: ) ,
, )

, )
. ,
, [52].
 72
2.1.2

, ,
,
.

2.1.2.1

T THS
I th (T ) I th (THS ) exp , (2.9)
T0

T T HS , T0 – ,
.
(2.9)
[53], .
T0 , ~50 ~300-350 .

, (2.1)
, (2.9)

T THS Rth (1 W ) I Vf , W P / I Vf , (2.10)

T–T HS
. Vf – , I , Rth –
, W – .
Vf :
Vf Vto I RS , Vto – « » , RS –
.
 73
, Vto
RS , : D = 0.7, Vto = /q = 1.53 ,
RS = 0.2 , Ith(300 ) = 0.4 T0 = 120 K.
. 2.2a,
, 5 10
[54].
: Rth = 5
, Rth = 10 « »
~7 , ,
.
10 0.5 0.5
)

10
)
(

(
8 0.4 8 0.4

6 0.3 6 0.3

4 0.2 4 0.2

2 0.1 2 0.1
) )
0 0.0 0 0.0
0 2 4 6 8 10 0 2 4 6 8 10
( ) ( )
2.0
( )

210
Rth = 5 Rth = 5
180
( )

Rth = 10 Rth = 10
1.5
150

120
1.0
90

60 0.5
30
) )
0 0.0
0 2 4 6 8 10 0 2 4 6 8 10
( ) ( )

2.2 -
5 (a) 10 ( ). ( )
( )
 74
,
( . 2.2 ), ( . 2.2 )

. , ,
, : ,
T0
.
( ., , [55-59]).
–
.
,
, ,
, . ,
,
.

, , [60].

, .
,
, 808 . 2 n-
Al0.6Ga0.4As 1×1017 -3
,
Al0.3Ga0.7As 0.74 20
Al0.07Ga0.93As , 2 p-Al0.6Ga0.4As
1×1017 -3
p+-GaAs .
SiLENSe 5.0 [61],
3.1.1. ,
100 2 .
( ., , [62]) ,
, ,
 75
,
–1
, sct =2 .
. 2.3
. ,
~100 K .
(2.9) T0 = 135 K.
1.4
(a) 70 )
( )

1.2
65

(%)
1.0
60
0.8
55
0.6 THS= 25
T0 = 135 K 50 ,
0.4
20 40 60 80 100 120 20 40 60 80 100 120
( ) ( )

0.20
1.0
)
-1

0.15 0.9
(

:
-1
0.8
2 cm 25
0.10 45
0.7
65
0.6 85
0.05
105
0.5 )
) 125
0.00
20 40 60 80 100 120 10
1 2
10
3
10
2
( ) ( )

2.3 - ( ),
( ),
(c),

, ,
. 2.3 . ,
 76
( . 2.3 ),
,
, , .
. 2.3 ,
, .

. 2.4).

, ,
. , (2.3)

st = 1, ( . . 2.3 ).
,
, ,
,
.
19
19 1.0 10
1.0 10
0.5 400 K
300 K

)
0.5

-3
18
)

10
-3

18
10 0.0
0.0
)

(
)

-0.5 17
-0.5 17
10
(

10
(

-1.0 -1.0
16
10
16
-1.5 10
-1.5
-
n-

-2.0 -2.0 15
15
10 10
-2.5 -2.5
(a) )
14 14
-3.0 10 -3.0 10
1.5 2.0 2.5 3.0 3.5 4.0 1.5 2.0 2.5 3.0 3.5 4.0
( ) ( )

2.4 -
, 808 ,
300 (a) 400 ( ) ,

,
( . 2.3 ), , ,
.
 77
, (2.3) st = inj ,
( . 2.3 ).
,
,
, –
( .
[63] , ).

, , .
, , ,
.
. . 2.3 ).

2.1.2.2

2.1.1, ,
,
,
.
.
.
~50-150ºC ,
[44, 47, 64-66].

[67].
,
,
. , [66],
, , ,
, [51] –
 78
~10 .
. , ,
, ,
. ,

,
, ,
,
.
, ,
. ,
,
.

, ,
.

,
, .

2.2

, ,
.
[54],
,
. ,
 79
,

, ,
.

2.2.1

T Rth , . .

T THS Rth [ I V f ( I , T ) P ] . (2.11)

THS – , , Vf –
, I
, P– ,
(1.1).
.

, AlxGa1-xAs,
x = 0.3-0.7 E

, GaAs [68].
RE dE / E WL ,

dE = 2 , L=2 ,
W = 100 E = 0.14 , RE = 0.71 .
RHS ,

RHS ( HS L) 1 ln (d HS / W ) , HS – ,
dHS –
, .
( HS = 4.01 ), RHS = 1.55
dHS = 5 , L=2 W = 100 .
 80
Rth RE RHS = 2.27 ,
,
, . ,

AlGaAs ,
.
,
, ,
L p dE .

t 1/2 , t
. ,
, (2.11),
Rth d / E WL , c

d ( DT / )1 / 2 ,

( DT E / E CEp –
, E – , CEp

– ) [69]. = 100 , L=2 ,

W = 100 E = 0.14 : d = 0.5
Rth = 0.18 , . . ,
, . ,
~10

( . . 2.5a).

[70].
. 2.5
AlGaAs . ,
~10
 81
2
~5-6 , 100
, .
,
~100 ,

100 100

( )
( )

= 10
10

10

1 = 100
= 100

1 ) 0.1
)
0 1 2 3 4 5
10 10 10 10 10 10 1 10 100
2
( ) ( )

2.5 -
2
30
(a).
( ).
50%

2.2.2

[54],
:
, .
2.1, 100
,
.

100 ~5-8 ~80-120 , . . , .

 82
, ,
, ,
.
,
(
), .
,
,
.

2.2.3

,
, .
,
, .

.
,
. ,

. .

2.2.3.1

, ,

. p- n-
 83
,

.
,
.

., , [71]).

, . .
. [72, 73] ,
, , .
[62] ,
p-n .

.
, ,
, ,
( ., ,
. 2.4 ,
, ).

. –
,
[72],
 84
[74]. , 2.1,
,
,
.

. ,
, .
(2.1)

st , ,
, .

st [75, 76]
, .
,
, ,
: (1) n- (2)

[62]. . 2.6
( , , ),

1500 ( , ,
) 500 ( , , ). ( . 2.6 , )
0,5
. 5 ). ( . 2.6 , )
, n- (1 - 2)*1017 -3
.
, ,
. ,
,
 85
, . ( . 2.6 , )
(graded
index, GRIN) 0,3 .

2.6 – ( , , ),
AlGaAs/GaAs
, 1500 ( , ,
) 500 ( , , ). – ( , , );
, n- ( , , ) GRIN-
( , , )

,
,

( . 2.6 , ).
,
 86
.
( . 2.6 , )
.
AlxGa1-xAs ,
x = 0.45 ( X- L
).
, ,
,

[75-77]. ,
,
.

2.2.3.2

,
, , .
–
, , ,
. ,
[78],
.

,
, .

, ,
 87
[79, 80].
,
,
[81]. ,
,
[81]. ,
.
,

, – ,
.

, .

2.2.3.3

, (« ») –
.
« »
.
. 2.7
,
,
RF ( « »
). ,
, RF > 0.2-0.3. , RF
, « »
. , ,
,
 88
, ,

.
,
.

2.7 - « »
, ,

,
[82, 83], ,
, 20 ,
.
,
, .
, ~15-20%
, . .

.
 89
, ,
. ,
,
( . [54]).

,
.

2.2.4

,
. , ,

. ,
, ( ,
,
1 , – ~100 ).
,

( . 2.2.2). ,

.
,
, .
, ,
, ,
.
 90

« » [55] ( . .
2.8), ,
( ., , [84]). ,
,

, , .
,

.
)

30
W = 400
(

25

20

15

10

0
0 10 20 30 40 50
( )
) )

2.8 -
808 ( ) 400 [55] ( ) 100 [84]
.

,
,
.
– )
)
.
 91

,
.
.
, ,
. , ,
,
.

.
,
, .
,

( )
, , , , -
.

2.3

, [54, 85],

. ,
,
.
 92
2.3.1

,
( . [68,
86, 87]).

) . , ,
,
[89]. 2.1,
,
, , –

. , ,
100
, ~8-9 [88].
2.1 , , ,
1991 2009 .

, .
, ,

.
, .
2.1 , ,

,
.
 93
2.1
,
1
808

) 2
) ) )

AlGaAs 1500/100 8.5 [90]

InGaAsP 2000/100 1.035 5.6 10.8 [91]

GaAsP 4000/100 3.014 13 8.6 [92]

GaAsP 4000/100 1.017 8.9 17.5 [93]

InGaAlAs 1000/100 0.926 5.4 11.7 [94]

AlGaAs 2500/100 1.552 8.5 11.0 [84]

InGaAsP 1250/100 1.0 8.8 17.6 [95]

GaAsP 2000/60 1.017 2.6 8.6 [96]

InAlGaAs 1500/5 ~2.0 0.68 13.6 [97]

InAlGaAs 2000/400 ~1.1 29.6 13.6 [55]

AlGaAs 2500/100 1.541 8.5 11.0 [84]

InGaAsP 2100/100 1.809 9.9 11.0 [55]

InGaAsP 1160/100 ~0.6 5.6 18.6 [98]

, ,

.
2
.
 94
( . . 2.9).
,
,

. ,
. 2.9 , ,
,
.
)

20
(

W = 100

15

10

5 :

0
700 800 900 1000 1100 1200
( )

2.9 -
100 .
,

.
, ~980-1100 ,
.
, ,
.
,
.
 95

. , .
2.8 ,
GaAs, ,
.
980-1100
, , .

2.3.2

.
, ,
,
. , ,

,
, , , . ,

. AlGaAs

. ,
,
, III
,
[99].
.
–
.
 96

, , ,
. ,

GaAs AlGaAs. ,

.
III
– Al2O3 In2O3.
,
[89].
,

. ,

GaN Si3N4 ~1.5

AlGaAs
808 [100] (
).
[101]. ,
,
[102, 103]. ,
10 ) , ,
Al2O3
,
,
Al2O3 [33].

. , -
 97

, .

2.3.3

[85],
.

, . 2.2
[104] , .

, , ~7% .
–
, .
,
, GaAs
AlGaAs ( . 2.2 . 2.10).

, ,
, .
,
, ( ),
.
400 . ,
, ,

[41],
– [105]).
 98
,
.
2.2 300 (
)

)
(×10-6)
10-26 1.0
0.057 (|| - ) 27 (|| - )
20 ( ) –1.2 ( )
25-35 (|| )
4.3 19
4.01 17
3.17 14
2.37 23
1.55 4.5
1.42 4.9
0.91 13.3
Cu(10%)W(90%) 1.8-1.9 6.5
Au(80%)Sn(20%) 0.57 16
In(50%)Sn(50%) 0.34 20
Sn(63%)Pb(37%) 0.41 21
SAC :
0.6 20
Sn(95.5%)Ag(3.8%)Cu(0.7%)
7.4-13 3.8
< 0.3 (|| - ) 38 (|| - )
< 6 ( c- ) –2.7 ( c- )
3.20 4.5
2.70 3.7
0.55 5.7
AlxGa1-xAs (x = 0.3-0.7) 0.14 5.5
InGaAsP 0.03-0.06 5.5-6.5
 99
BN
, . BN
1.5 , -
, .

·K)
c-C
10 c-BN
/

Cu
AlN Au
(

SiC Cu/W

1 W Ni
GaAs

AlGaAs
0.1
InGaAsP
0 3 6 9 12 15 18
-6
(x10 )

2.10 -
.
.

BN ~13
, ~7-8 .
BN AlN SiC
, , ,
, .
[106].

,
[106].
 100
,
,
. ,
AlGaAs
, InGaAsP.
, InGaAsP,
InP , ~0.02-0.05
[107]. InGaAsP, GaAs
, ,
, InxGa1-
xP InxGa1-xAs, x = 0.2-0.8 0.05
0.08 .
,
InGaAsP ~2-3 , AlGaAs.
, InGaAsP
, , AlGaAs.

, AlGaAs,
, GaAsP [92].

, , , [108].

2.3.4
2.3.4.1

(2.8), ,
.
.
~1-2% ( ., , [109]).
, , ,
.
 101
: ) [41, 93, 105], )
,
[57, 73, 97,
109] ) « » [111].
,

, p-n . ,
, ,
.
,
.

, .

, ,
, 808 .

2.3.4.2

,
, . , –
,
( « ») ,
. « » ,
. ,
. –
[112, 113],
.
« » ,
, Si
 102
Zn [114]. ,
,

.
», ,

[115, 116]. , ,
. ,
,
.
.

,
[64].

.
,
. , ,
, [117],
.
, ,
,
, , , ,
. , , .
,

,
. ,
 103
. ,
. ,

–
. ,
,
.

[118].
,

,
. ,

.
,
.
~1.0-1.5%
.
,
: )
; ) ,
(
GaN, Si3N4 ,
Si); )
.

, .
 104

,
.
.

, , InAlGaAs

InGaAsP,
.

« »
.
.

, .

2.4 2

1. ,
808 ,
,
.
, ,
.

2.
,
.
 105
3.

, .
(i)

n (ii)

[62].

4. ,
, ,
, ,
,

, .

5. ,
: (i)
, (ii) ,
, (iii)

6.
,
, .
,

, .
 106
7. ,
, InAlGaAs
,
InGaAsP,
.

8.
,
.
 107
3

3.1

,
« »
1÷2 ,
,
. ,
. 3.1. .
,
,
.

3.1

( )
GaAs ND = 5×1018
n- GaAs 300 ND = 2×1018
n-Al0.6Ga0.4As 1500 ND = 1×1017
Al0.6Ga0.4As Al0.3Ga0.7As
150 –

Al0.07Ga0.93As 10 –
Al0.3Ga0.7As Al0.Ga0.4As
150 –

p-Al0.6Ga0.4As 1500 NA = 2×1017

GaAs 200 NA = 1×1019

3.1.1

SiLENSe, ,
 108
,
.

, .
, ,

:
1. -
.

AlGaAs;
2.

( . 3.1.7);
3.
,
,
.

;
4. ,
-n ,
.
. 3.1
. ,
,
,
,
 109
.
( . 3.1)
AlxGa1-xAs ,
x = 0.4 ( X- L
).

1.5 1.0
2 2
1.0 j = 250 A/cm 0.5 j = 2 kA/cm
0.5 0.0
)

0.0 -0.5
(

-0.5 -1.0
-1.0 -1.5
-1.5 -2.0
-2.0 -2.5
-2.5 -3.0
1.7 1.8 1.9 2.0 2.1 2.2 1.7 1.8 1.9 2.0 2.1 2.2
( ) ( )
20 20
10 10
2 2
j = 250 A/cm j = 2 kA/cm
)

19
)

19
10
-3

10
-3

(
(

18 18
10 10
17 17
10 10
16 16
10 10
15 15
10 10
14 14
10 10
1.6 1.8 2.0 2.2 2.4 1.6 1.8 2.0 2.2 2.4
( ) ( )

3.1 - ( ),
) ( )
 110

,
. . 3.2 . 3.3

,
. ,
,
, ,
-1
add = 0.2 .
,
, , . 3.3.
,
400 .
)
2

95 500
1.4
/ )

( /

90
(%)

-1
= 0.2 400
85 add
1.3
(

80 300
1.2
75
1.1 200
70
65 1.0
100
-1
60 0.9 = 0.2
add

55 0
0 500 1000 1500 2000 2500 4 6 8 10 12 14 16
-1
( ) ( )

3.2 -
.
– , –

,
,
.
700-900 .

int

500 .
 111
4.0 3.0

)
-1
3.5 Pout= 1 2.5
Iop

(
3.0
2.0
2.5
( ) 2.0 1.5
1.5
1.0
1.0 Ith
0.5
0.5
0.0 0.0
0 500 1000 1500 2000 2500 0 500 1000 1500 2000 2500
( ) ( )

3.3 - ( 1
)
. – , – .
( ) ( )

3.1.2

-1
add = 0.2 ,
,
,
.
,
,
. 3.4.
,
,
90% 20% .
.

-1
0.2 .
 112

)
2.7

2
450
Pout= 2

( /
400 R1=90% , R2=10% 2.6

( )
350 R1=90% , R2=20%
R1=90% , R2=10%
2.5 R1=90% , R2=20%
300

250 2.4
200
2.3
150

100 2.2
850 900 950 1000 1050 1100 850 900 950 1000 1050 1100
( ) ( )

85 1.3
(%)

/ )
80 R1=90% , R2=10%
R1=90% , R2=20% 1.2

(
75
1.1
70

65 1.0

60
850 900 950 1000 1050 1100
( )

3.4 - , ,
2 ,

3.1.3

N(z)

,
. . 3.5.
,
« » ~15% ,
~35% .
,
, . . ,
.
 113
4.5

)
-3
4.0

x10 (
3.5

18
3.0
N(z)
2.5
2.0
1.5
1.0
0.5 L = 1000
0.0
0 200 400 600 800 1000
( )

3.5 -
, 90% 20%

2
3.1.4

,
. 3.2.

3.2 ,

0.033

-1
0.450
600 ( )

1.320
-1
600 ( )

3.2 ,
( ) , 4
(
). ,

.
2
90% 20%
, .
 114
3.1.5

AlxGa1-xAs
(GaAs AlAs)
Al, 50%
.
k 0.55 2.12 x 2.48 x 2 , [119].
3.2,
.
,
,
. ,
,
(zact)
(zmax)
zmax
dz
th . (3.1)
zact
k ( z)

1.0×10-3 2
.
L=1 W = 200
0.52 . ,
, ,
,
.

3.1.6

, Ub
j, ,

Ub U T ln (1 j / j0 ) j S , UT kT / q , (3.2)
 115
k– , T– , q– , –
, j0 – , S –
.

.
. 3.3. , , ,
n- ( ).

3.3 .

.
, 2
.
) -3
) 2
) )
GaAs 3.5×105 n = 5×1018 3000 2.0×10-5
n- GaAs
300 n = 2×1018 3000 5.0×10-8

n-Al0.6Ga0.4As
1500 n = 1×1017 200 7.5×10-5

Al0.6Ga0.4 As
Al0.3Ga0.7 As 150 n,p = 1×1017 1000 1.5×10-6

Al0.07Ga0.93As
10 n = 2×1018 8000 6.2×10-10

Al0.3Ga0.7 As
Al0.Ga0.4 As 150 n,p = 1×1017 1000 1.5×10-6

p-Al0.6Ga0.4As
1500 p = 4×1017 70 5.4×10-5

p-GaAs
200 p = 3×1018 200 3.3×10-7

2
( ) 1.5×10-4
2×103 2
) 0.076
 116
, ,
AlGaAs,
1.5×10-4 2
,
. 3.3, .
. 3.6 -
,

j0 = 4×10-14 2
UT = 42 . S = 1.5×10-5 2

( -
. 3.6) ,

S = 1.5×10-4 2

, .
5
10
-5
1.5x10
)
2

4 =0
10 S
(A/

3
10
-4 2
2 1.5x10
10
1 L= 637
10
L= 1050
L= 1495
0
10 L= 2050
SiLENSe
-1
10
1.2 1.4 1.6 1.8 2.0
( )

3.6 -
: (
)

,
, .

,
 117
, ,
.
,
, 3.3,

, SiLENSe
. 3.6). -
,

. ,

( = 1.615 ).

3.1.7

.
GaAs n- 2×1018 -3
2500 2

2
150 . AlGaAs p-GaAs 500
2 2
50 .
, GaAs
:~6 ~2 .
. 3.7
.
,
» , ,
. ,
 118

. ~1.5 , p-
n ,
Al0.6Ga0.4As/GaAs.
, ,
AlGaAs. ,
,
.

1 1
EC
EC
0 0
)

)
Fn Fn
(

-1 Fp ( -1
Fp

-2
EV -2
EV
2 2
j = 7.4 A/cm j = 522 A/cm
-3 -3
-2 -1 0 1 2 -2 -1 0 1 2
( ) ( )

3.7 - ( )
( )

20 4
10 10
)
3

3
10
)

18
10
-3

( /

2
10
(

16
10
1
10
14
10 0
10
12
10 10
-1
2 2
j = 522 A/cm j = 522 A/cm
10 -2
10 10
-2 -1 0 1 2 -200 -150 -100 -50 0 50 100 150 200
( ) ( )

3.8 - ( )
( )

p-n
, Al0.6Ga0.4As/GaAs
 119
. , ~1.5 (
2
~500 )
, ,
( . . 3.7)3.
,
. ,
, , .
( . 3.8).

3.2

.
:
2%;
-1 2
1,5 ; 250 ;
1 ;
FWHM 40 .
,
.

.
, . . , ,
, , ,
,
.
,
.

. .
 120

3.2.1 (R1)

. R1
,
.
AlxGa1-xAs
R1 x =0.6. ,
,
.
,
.
R1, . 3.4.

3.4 R1

( )

1 GaAs ND = 5×1018
2 GaAs 300 ND = 2×1018
3 n-Al0.6Ga0.4As 1500 ND = 1×1017
4 i-Al0.3Ga0.7As 500 —
5 Al0.07Ga0.93As 10 —
6 i-Al0.3Ga0.7As 500 —
7 p-Al0.6Ga0.4As 1500 NA = 2×1017
8 p+-GaAs 200 NA = 1×1019

, 3.1.2,
0.9 0.2,
 121
. 200
-1
0.2 .
,
( , , ,
2 6 ,
)
. . 3.9. ,
,
Lopt= 1.0-1.1 .
2
480 , – 0.91
2
(59%). , 250
1.9 ,
0.89 (56%). ,
, ,
6 , 3.5% .
R1
, .
,
, L 1,0 ( . . 3.9). ,
, ,
R1 .
0.6 2.0
3 .

int 0.83 ,
, 0.77 , ,
.
,
1.0 ,
( , , )
 122
, ,
Lopt = 1.9-2.0 .
,
( . . 3.10).

1 = 1.73 % , 2 = 0.0003 % 3 = 1.40 % .

61

)
-1
R1= 0.9 , R2= 0.2 0.93 2.0

/ )
(%)

(
60 0.92

(
0.91 1.5
59
0.90
1.0
58 0.89
0.88
57 0.5
Lopt = 1000 0.87

56 0.86 0.0
600 900 1200 1500 1800 600 900 1200 1500 1800
( ) ( )
)
2

1000
R1= 0.9 , R2= 0.2 1.10 Lopt = 1200
( /

900
( )

800
1.05
700
600 1.00
500
0.95
400
300
0.90
200
600 900 1200 1500 1800 600 900 1200 1500 1800
( ) ( )

3.4
8.0
Pout= 2 Lopt = 1200 Pout= 6
7.9
( )
( )

3.3 7.8

7.7

3.2 7.6

7.5
Lopt = 1100
7.4
3.1
600 900 1200 1500 1800 600 900 1200 1500 1800
( ) ( )

3.9 - R1
 123

,
,
p-n .

1.5
2
1.0
j = 480 A/cm

0.5
)

0.0
(

-0.5
-1.0
-1.5
-2.0
-2.5
1.5 1.8 2.1 2.4 2.7 3.0
( )
20
10
2
j = 480 A/cm
)

19
10
-3
(

18
10
17
10
16
10
15
10
14
10
1.2 1.5 1.8 2.1 2.4 2.7 3.0 3.3
( )

3.10 - ( ),
( )

) R1 ,
1.1
 124
. 3.10
.
,
.
.

.
,
AlAs. (~ 1017 -3
)
,
.
,
p-n , 38.8º ( . . 3.11).
(L = 1.9 ) ,
( . 3.12);
,
.
R1 . 3.13.
,
,

,
( . 3.5). ,
.
R1,
. 3.14.

1.1 1.9 . R1.

 125

.)
= 38.8°

.
(
-80 -60 -40 -20 0 20 40 60 80
( )

3.11 - R1 ,
p-n
)
-3

5 L = 1.9
x10 (

4
18

3
N(z)
2

0
0.0 0.4 0.8 1.2 1.6 2.0
( )

3.12 -

4
10 8
)
2

7 L = 1.9
3
10
(A/

6
2 5
(A)

10
4
1
10 3
SiLENSe
0 2
10
= 2.1x10
-4 2
1
S
-1
10 0
1.2 1.4 1.6 1.8 2.0 2.2 1.2 1.4 1.6 1.8 2.0 2.2
( ) ( )

3.13 -
R1
 126
R1,
, 3.1.5, 1.36×10-3 2
,
– 0.358 1.9 .

3.5 R1.

.
2
, ) .
) -3 2
) )
1 GaAs 3.5×105 n = 5×1018 3000 2.0×10-5
n-GaAs
2 300 n = 2×1018 3000 5.0×10-8

3 n-Al0.6Ga0.4As 1500 n = 1×1017 200 7.5×10-5

Al0.35Ga0.65As
4 500 n,p = 1×1017 1000 5.0×10-6
Al0.07Ga0.93As
5 10 n = 2×1018 8000 6.2×10-10
Al0.35Ga0.65As
6 500 n,p = 1×1017 1000 5.0×10-6

7 p-Al0.6Ga0.4As 1500 p = 2×1017 70 1.07×10-4

p-GaAs
8 200 p = 1×1019 100 2.0×10-7
2
( ) 2.1×10-4
2×103 2
( ) 0.106

6
)

L = 1.9
(

5 L = 1.1

2
-1
= 0.2
1 add

R1= 0.9 , R2= 0.2

0
0 1 2 3 4 5 6 7 8
( )

3.14 - R1
 127
3.2.2 (G1)

(
)
( ).
,

. p-
AlGaAs .

. G1
. 3.6.

3.6 G1

)
1 GaAs ND = 5×1018
2 n-Al0.6Ga0.4As 1500 ND = 1×1017
3 i-Al0.4Ga0.6As 725 —
i-AlxGa1-xAs c
4 75 —
x =0.4 0.3
5 Al0.07Ga0.93As 10 —
i-AlxGa1-xAs c
6 75 —
x =0.3 0.4
7 i-Al0.4Ga0.6As 725 —
8 p-Al0.7Ga0.3As 1500 NA = 2×1017
9 p+-GaAs 200 NA = 1×1019
 128

, . . , , ,
2 6 ,
,
. 3.15.
)
2

900
1.00
( /

R1= 0.9 , R2= 0.2 Lopt = 1200

( )
800
700 0.95

600
0.90
500
400 0.85

300
0.80
200
600 800 1000 1200 1400 1600 600 800 1000 1200 1400 1600
( ) ( )

3.3 7.6
Pout= 2 Lopt = 1200 Pout= 6
7.5
3.2
( )

( )

7.4
3.1 7.3

3.0 7.2

7.1
2.9
7.0 Lopt = 1200
2.8 6.9
600 800 1000 1200 1400 1600 600 800 1000 1200 1400 1600
( ) ( )

65
)
-1

0.93 1.0
/ )

64 R1= 0.9 , R2= 0.2

(%)

0.92
63 0.8
(

0.91
62
0.90 0.6
61 0.89
0.4
60 0.88
59 0.2
Lopt = 1300 0.87

58 0.86 0.0
600 800 1000 1200 1400 1600 600 800 1000 1200 1400 1600
( ) ( )

3.15 - G1
 129
, ,
Lopt= 1.2 .
2
345 ,
– 0.96 (~ 62%).
2
, 250 1.7 ,
– 0.95 (~ 62%).
, ,
. ,
1.7 .
, G1
( . 3.16).

1 = 1.70 % ,

2 = 0.002 % , 3 = 0.95 % 4 = 0.02 % .

,
,
.

, R1 ( . 3.16).
( ,
), ,
. ,

, .
, . 3.15.
G1
28.5º. « »

( R1).
 130

1.5
2
1.0
j = 244 A/cm

0.5
)

0.0
(

-0.5
-1.0
-1.5
-2.0
-2.5
1.2 1.5 1.8 2.1 2.4 2.7 3.0 3.3 3.6
( )

20
10
2
j = 244 A/cm
)

19
10
-3
(

18
10
17
10
16
10
15
10
14
10
1.2 1.5 1.8 2.1 2.4 2.7 3.0 3.3 3.6
( )

3.16 - ( ),
( )

) G1 ,
1.7

, ,
 131

.
( . . 3.17).
6

)
-3
L = 1.7
5

x10 (
18
4

3 N(z)

0
0.0 0.4 0.8 1.2 1.6
( )

3.17 -

. , G1
,
4
.
4
10 8
)
2

7 L = 1.7
3
10
(A/

6
5
(A)

2
10
4
1
10 3
SiLENSe 2
0
10
= 9.8x10
-4 2 1
S
-1
10 0
1.2 1.4 1.6 1.8 2.0 2.2 2.4 1.2 1.4 1.6 1.8 2.0 2.2 2.4
( ) ( )

3.18 -
G1

4
,
. .
.
 132
G1
( . 3.18). G1

,
2
, ~500 .
. . 3.7) , G1
Al0.4Ga0.6As.
, - L- (X-)
.
.

3.7 G1.

( .
2
-3 ) .
) ,( ) 2
)
GaAs 3.5×105 n = 5×1018 3000 2.0×10-5
n-Al0.6Ga0.4As 1500 n = 1×1017 200 7.5×10-5
Al0.4Ga0.6 As
725 n,p = 2.1×1016 70 4.9×10-4
AlxGa1-xAs , x = 0.4
75 n,p = 1×1017 1000 3.6×10-6
0.3
Al0.07Ga0.93As
10 n,p = 4×1018 8000 1.2×10-9
Al0.07Ga0.93As
10 n,p = 2×1018 8000 6.2×10-10
AlxGa1-xAs , x = 0.3
75 n,p = 1×1017 1000 3.6×10-6
0.4
Al0.4Ga0.6 As
725 n,p = 2.6×1016 70 2.8×10-4

p-Al0.6Ga0.4As 1500 p = 2×1017 70 1.07×10-4

p-GaAs 200 p = 1×1019 100 2.0×10-7
2
) 9.77×10-4
3.4×103 2
) 0.287
G1 . 3.19.
 133
6

)
L = 1.7

(
5

2
-1
= 0.2
1 add
R1= 0.9 , R2= 0.2
0
0 1 2 3 4 5 6 7 8
( )

3.19 - G1

R1. G1,
, 3.1.5, 1.49×10-3 2
,
– 0.438 1.7 .

3.2.3 (A1)

.
, ,

.
, ,
,
AlGaAs
.

.
3.8.
–
, , ,
 134
2 6 , –
. 3.20.

3.8 1

( )
1 GaAs ND = 5×1018
2 n-Al0.6Ga0.4As 1500 ND = 1×1017
i-AlxGa1-xAs c x =0.6
3 150 —
0.3
4 Al0.07Ga0.93As 10 —
5 i-Al0.35Ga0.65As 300 —
6 Al0.07Ga0.93As 10 —
i-Al0.3Ga0.7As c x =0.3
7 150 —
0.6
8 p-Al0.6Ga0.4As 1500 NA = 2×1017
9 p+-GaAs 200 NA = 1×1019
, ,
Lopt= 0.7 .
2
590 ,
– 1.03 (67%).
2
, 250
2.0 , 0.96 (62%).
, ( ~25%),
, 6 ,– ~10%.
,
« » – 0.7
2.2 .
A1
( . . 3.21).

1 = 1.65 % 2 = 1.58 %
.
 135
,
,
.
)
2

900 1.05
R1= 0.9 , R2= 0.2 Lopt = 700
( /

( )
800
1.00
700
600 0.95
500
0.90
400
300 0.85
200
0.80
600 900 1200 1500 1800 2100 600 900 1200 1500 1800 2100
( ) ( )

3.2 7.5
Pout = 2 7.4 Pout= 6
3.1 7.3
( )
( )

Lopt = 700
7.2
3.0
7.1
7.0
2.9
6.9
2.8 6.8
6.7 Lopt = 700
2.7 6.6
600 900 1200 1500 1800 2100 600 900 1200 1500 1800 2100
( ) ( )

1.5
)
-1

67 R1= 0.9 , R2= 0.2 0.93

/ )
(%)

66 0.92
(

0.91 1.0
65
0.90
64
0.89
63 0.5
0.88
62 0.87
Lopt = 700
61 0.86 0.0
600 900 1200 1500 1800 2100 600 900 1200 1500 1800 2100
( ) ( )

3.20 - 1
 136

1.5
2
1.0 j = 237 A/cm

0.5
)

0.0
(

-0.5
-1.0
-1.5
-2.0
-2.5
1.6 1.8 2.0 2.2 2.4 2.6
( )
20
10
2
j = 237 A/cm
)

19
10
-3
(

18
10
17
10
16
10
15
10
14
10
1.6 1.8 2.0 2.2 2.4 2.6
( )

3.21 - ( ),
( )

) 1 ,
2.2

1
, , , R1 ( . 3.21). ,
 137
4-5
. ,
, .
.
,
p-n , 50.5º ( . . 3.22), ,
.

AlGaAs, .
.)

= 50.5°
.
(

-80 -60 -40 -20 0 20 40 60 80

( )

3.22 - 1 ,
p-n

1.5
2.2 ; 0.7
,

( . . 3.23).
1 . 3.24.
,
,
R1.
 138

)
7 7

-3
-3
L = 0.7 L = 2.2
6 6

x10 (
x10 (

18
N(z)

18
5 5 N(z)
4 4

3 3

2 2

1 1

0 0
0.0 0.2 0.4 0.6 0.0 0.5 1.0 1.5 2.0
( ) ( )

3.23 -

4
10 8
)
2

7 L = 2.2
3
10
(A/

6
5
(A)
2
10
4
1
10 3
SiLENSe 2
0
10
= 2.1x10
-4 2 1
S
-1
10 0
1.2 1.4 1.6 1.8 2.0 2.2 1.2 1.4 1.6 1.8 2.0 2.2
( ) ( )

3.24 -
1

, 1
R1 ( . 3.9). -

2.2 . 1,
. 3.25. ,
, ,
.
1,
, 3.1.5, 1.34×10-3 2
,
– 0.304 2.2 .
 139
3.9 1.

.
2
-3 ) .
) ,( ) 2
)
1 GaAs 3.5×105 n = 5×1018 3000 2.0×10-5
n-Al0.6Ga0.4As
2 1500 n = 1×1017 200 7.5×10-5
AlxGa1-xAs , x = 0.6
3 0.3 150 n,p = 1×1017 1000 3.0×10-6

Al0.07Ga0.93As
4 10 n,p = 2×1018 8000 6.2×10-10
Al0.35Ga0.65As
5 300 n,p = 5×1016 1000 6.0×10-6

Al0.07Ga0.93As
6 10 n,p = 2×1018 8000 6.2×10-10
AlxGa1-xAs , x = 0.3
7 0.6 150 n,p = 1×1017 1000 1.5×10-6

p-Al0.6Ga0.4As
8 1500 p = 2×1017 70 1.07×10-4
p-GaAs
9 200 p = 1×1019 100 2.0×10-7
2
( ) 2.13×10-4
4.4×103 2
) 0.048
6
)

L = 0.7
(

5 L = 2.2

2
-1
= 0.2
1 add
R1= 0.9 , R2= 0.2
0
0 1 2 3 4 5 6 7 8
( )

3.25 - 1
 140
3.2.4 (R2)

p-AlGaAs
AlGaAs,
.
3.10.

, .

3.10 R2

( )

1 GaAs ND = 5×1018
2 n-Al0.35Ga0.65As 1500 ND = 1×1017
3 i-Al0.3Ga0.7As 300 —
4 Al0.07Ga0.93As 10 —
5 i-Al0.3Ga0.7As 300 —
6 p-Al0.6Ga0.4As 50 NA = 2×1017
7 p-Al0.35Ga0.65As 1500 NA = 2×1017
8 p+-GaAs 200 NA = 1×1019

R2 –
, , ,
2 6 , –
. 3.26.
, ,
Lopt= 1.2 .
2
375 ,
– 0.90 (59%). ,
2
250 1.9 ,
0.89 (58%).
 141
.
Lopt= 2.0 .

)
2 1200 1.20
R1= 0.9 , R2= 0.2
( /
Lopt = 1300
1.15
1000

( )
1.10
800
1.05
600 1.00

0.95
400
0.90
200
0.85
800 1200 1600 2000 800 1200 1600 2000
( ) ( )

3.8
Lopt = 1300 8.6 Pout= 6 Lopt = 1300
3.7 Pout= 2

( )
( )

3.6 8.4

3.5 8.2
3.4
8.0
3.3
7.8
3.2
3.1 7.6

3.0 7.4
800 1200 1600 2000 800 1200 1600 2000
( ) ( )

62
)
-1

2.0
R1= 0.9 , R2= 0.2
/ )

0.93
(%)

60
(

0.90 1.5
(

58
0.87
56 1.0
0.84
54
0.81 0.5
52
Lopt = 1300 0.78
50 0.0
800 1200 1600 2000 800 1200 1600 2000
( ) ( )

3.26 - R2

R2
( . . 3.27)

1 = 1.67 % .
 142
,
.

1.0 2
j = 233 A/cm
0.5
0.0
)

-0.5
(

-1.0
-1.5
-2.0
-2.5
-3.0
1.5 1.8 2.1 2.4 2.7
( )
20
10
2
j = 233 A/cm
)

19
10
-3
(

18
10
17
10
16
10
15
10
14
10
1.5 1.8 2.1 2.4 2.7
( )

3.27 - ( ),
( )

) R2 ,
2.0
 143
R2
, R1 ( . . 3.27 . 3.10).

( . 3.4.1).

-1
– ~1 c ,
.
,
p-n , 23.3º ( . . 3.28),
, AlGaAs
.
.)

= 23.3°
.
(

-80 -60 -40 -20 0 20 40 60 80

( )

3.28 - R2 ,
p-n

5
2.0
( . . 3.29).
R2 . 3.30.
,
,
R1, .
,
 144
3.11.
2
~1 .
6

)
-3
L = 2.0
5

x10 (
18
4

3 N(z)

0
0.0 0.4 0.8 1.2 1.6 2.0
( )

3.29 -

3.11 R2.

.
2
-3 ) .
) ,( ) 2
)
1 GaAs 3.5×105 n = 5×1018 3000 2.0×10-5
n-Al0.35Ga0.65As
2 1500 n = 1×1017 1000 1.5×10-5
Al0.3Ga0.7 As
3 300 n,p = 5×1016 1000 5.7×10-6
Al0.07Ga0.93As
4 10 n,p = 3×1018 8000 4.0×10-10
Al0.3Ga0.7 As
5 300 n,p = 5×1016 1000 5.5×10-6
p-Al0.6Ga0.4As
6 50 p = 2×1017 70 3.6×10-6
-Al0.35Ga0.65As
8 1500 p = 2×1017 70 1.07×10-4
p-GaAs
9 200 p = 1×1019 100 2.0×10-7
2
( ) 1.54×10-4
4×103 2
) 0.039
 145
R2,
2,0 . 3.31. ,
R2
.
R2,
, 3.1.5, 1.63×10-3 2
,
– 0.406 2.0 .
4
10 8
)
2

7 L = 2.0
3
10
(A/

6
5

(A)
2
10
4
1
10 3
SiLENSe 2
0
10
= 1.5x10
-4 2 1
S
-1
10 0
1.2 1.4 1.6 1.8 2.0 2.2 1.2 1.3 1.4 1.5 1.6 1.7 1.8
( ) ( )

3.30 -
R2

6
)

L = 2.0
(

2
-1
= 0.2
1 add
R1= 0.9 , R2= 0.2
0
0 1 2 3 4 5 6 7 8
( )

3.31 - R2

3.2.5 (G2)

( .
, 3.12)
 146
,
3.4.1.

3.12 G2

( )

1 GaAs ND = 5×1018
2 n-Al0.35Ga0.65As 1500 ND = 5×1017
i-AlxGa1-xAs c
3 300 —
x = 0.35 0.3
4 Al0.07Ga0.93As 10 —
i-AlxGa1-xAs c
5 300 —
x = 0.3 0.35
6 p-Al0.5Ga0.5As 30 NA = 1×1018
7 p-Al0.35Ga0.65As 1500 NA = 3×1017
8 p+-GaAs 200 NA = 1×1019

( 5 )
( 1.5 ). R2,
AlGaAs
p- .
,
, ,
.
,

.
G2 –
, , ,
 147
2 6 , –
. 3.32.

)
2 1200 1.40
R1= 0.9 , R2= 0.2 Lopt = 1500
( /
1.35

( )
1000
1.30
1.25
800
1.20
600 1.15
1.10
400 1.05
1.00
200
0.95
800 1200 1600 2000 2400 800 1200 1600 2000 2400
( ) ( )

3.8
Lopt = 1500 8.6 Lopt = 1500
3.7

( )
( )

8.4
3.6
8.2
3.5
8.0
3.4

3.3 7.8
Pout= 2 Pout= 6
3.2 7.6
800 1200 1600 2000 2400 800 1200 1600 2000 2400
( ) ( )

62
)

0.99
-1

1.6
R1= 0.9 , R2= 0.2
/ )

0.96
(%)

60 1.4
(

0.93 1.2
(

58
0.90 1.0
56 0.8
0.87
54 0.6
0.84
0.4
52 0.81
Lopt = 1550 0.2
0.78
50 0.0
800 1200 1600 2000 2400 800 1200 1600 2000 2400
( ) ( )

3.32 - G2

, ,
Lopt= 1.4-1.5 .
2
390 ,
– 0.89 (58%).
 148
2
, 250 2.4 ,
0.84 (55%).
.
» Lopt= 2.4 .
,
.
G2
( . . 3.33)

1 = 1.48 % . ,
( .
3.26), .
~ 1.7%
. . 3.33 ,
,

.
R2
G2 –
, , 3 ,
( . . 3.33).
, .

-1
– ~1 c ,
.
,
p-n , 16.4º ( . . 3.34),
, , .
(2,4 ) 3.5 ,
 149
1.5 ( . .
3.35).

1.5
2
1.0
j = 244 A/cm

0.5
)

0.0
(

-0.5
-1.0
-1.5
-2.0
-2.5
1.8 2.0 2.2 2.4 2.6 2.8
( )
20
10
2
j = 244 A/cm
)

19
10
-3
(

18
10
17
10
16
10
15
10
14
10
1.8 2.0 2.2 2.4 2.6 2.8
( )

3.33 - ( ),
( )

) G2 ,
2.4
 150

.)
= 16.4°

.
(
-80 -60 -40 -20 0 20 40 60 80
( )

3.34 - G2 ,
p-n
)
-3

5 L = 2.4
x10 (

4
18

3
N(z)
2

0
0.0 0.4 0.8 1.2 1.6 2.0 2.4
( )

3.35 -

G2 . 3.36.
,
,
R1, .
,
3.13.
2
~ 800 .
G2,
2.4 . 3.37. ,
G2
.
G2, , 3.1.5, 1.62×10-3
 151
2
, – 0.338 2.4
.

3.13 G2.

.
2
, ) .
) 2
-3
) )

1 GaAs 3.5×105 n = 5×1018 3000 2.0×10-5

2 n-Al0.35Ga0.65As 1500 n = 3×1017 1000 5.0×10-6
AlxGa1-xAs, x = 0.35
3 300 n,p = 4×1016 1000 6.8×10-6
0.30
Al0.07Ga0.93As
4 10 n,p = 3×1018 8000 4.0×10-10
AlxGa1-xAs, x = 0.30
5 300 n,p = 5×1016 1000 5.5×10-6
0.35
p-Al0.5Ga0.5As
6 30 p = 5×1017 70 1.2×10-6

8 -Al0.35Ga0.65As 1500 p = 3×1017 70 8.6×10-5

p-GaAs
9 200 p = 1×1019 100 2.0×10-7
2
( ) 1.35×10-4
4.8×103 2
) 0.026

4
10 8
)
2

7 L = 2.4
3
10
(A/

6
2 5
(A)

10
4
1
10 3
SiLENSe 2
0
10
= 1.35x10
-4 2 1
S
-1
10 0
1.2 1.4 1.6 1.8 2.0 2.2 1.2 1.3 1.4 1.5 1.6 1.7 1.8
( ) ( )

3.36 -
G2
 152
6

)
L = 2.4

(
5

2
-1
= 0.2
1 add
R1= 0.9 , R2= 0.2
0
0 1 2 3 4 5 6 7 8
( )

3.37 - G2

G2
.
G2m.

G2m
G2 10% .
= 1.68 .
G2m . 3.38
. G2 G2m ,
G2m
L = 1.0-1.1 . G2m
3.14.

,
.
,
, .

3.14 G2m

Lopt Jth Iop (A) D int

2 -1 int 2
(%) ) (A/ ) @ 6W ) ) ) )
G2m 1.68 1.1 440 7.73 0.89 1.8 17.0 0.79 1.4×10-4
 153

)
2
1200 1.20
R1= 0.9 , R2= 0.2 Lopt = 1050

( /
1.15
1000

( )
1.10
800
1.05
600 1.00

0.95
400
0.90
200
0.85
800 1200 1600 2000 800 1200 1600 2000
( ) ( )

3.8
Pout= 2 Lopt = 1050 8.6 Lopt = 950
3.7 Pout= 6
( )

( )
3.6 8.4

3.5 8.2
3.4
8.0
3.3
7.8
3.2
3.1 7.6

3.0 7.4
800 1200 1600 2000 800 1200 1600 2000
( ) ( )

62
)
-1

2.0
R1= 0.9 , R2= 0.2
/ )

0.93
(%)

60
(

0.90 1.5
(

58
0.87
56 1.0
0.84
54
0.81 0.5
52
Lopt = 1000 0.78
50 0.0
800 1200 1600 2000 800 1200 1600 2000
( ) ( )

3.38 -
G2

3.2.6
(G3)

G2.

(i) (ii)
 154
.
,

.
G3
, .
G3 3.15.

3.15 G3

( )

1 GaAs ND = 5×1018
2 n-Al0.35Ga0.65As 1500 ND = 5×1017
i-AlxGa1-xAs c x = 0.35
3 100 —
0.3
4 Al0.07Ga0.93As 10 —
i-AlxGa1-xAs c x = 0.3
5 100 —
0.35
6 p-Al0.35Ga0.65As 200 NA = 3×1017
7 p-Al0.5Ga0.5As 30 NA = 1×1018
8 p-Al0.35Ga0.65As 1500 NA = 3×1017
9 p+-GaAs 200 NA = 1×1019

G3 – , ,
, 2 6 ,
– . 3.39.
, ,
Lopt= 1.2-1.3 .
2
~700 ,
2
– 0.83 (54%). , 250
 155
4.4 , 0.69
(45%).

)
2 1200 2.20
R1= 0.9 , R2= 0.2
( /
2.15 Lopt = 1270

( )
1000
2.10
2.05
800
2.00
600 1.95
1.90
400 1.85
1.80
200
1.75
1200 1800 2400 3000 3600 4200 1200 1800 2400 3000 3600 4200
( ) ( )

5.0 11.0
Pout= 2 Pout= 6
4.8 10.5
( )

( )
4.6 10.0

4.4 9.5

4.2 9.0
Lopt = 1250 Lopt = 1250
4.0
1200 1800 2400 3000 3600 4200 1200 1800 2400 3000 3600 4200
( ) ( )
)

0.84
-1

54 R1= 0.9 , R2= 0.2

/ )

1.5
0.82
(%)

52 0.80
(

0.78 1.0
50
0.76

48 0.74 0.5
0.72
46 Lopt = 1300
0.70
0.0
1200 1800 2400 3000 3600 4200 1200 1800 2400 3000 3600 4200
( ) ( )

3.39 - G3

( . 3.39). « »
Lopt= 4.4 ,
 156
2
, 250 . G3
( . . 3.40)

1 = 1.02 % .

1.5
2
1.0
j = 238 A/cm

0.5
)

0.0
(

-0.5
-1.0
-1.5
-2.0
-2.5
0.9 1.2 1.5 1.8 2.1 2.4 2.7 3.0
( )
20
10
2
j = 238 A/cm
)

19
10
-3
(

18
10
17
10
16
10
15
10
14
10
0.9 1.2 1.5 1.8 2.1 2.4 2.7 3.0
( )

3.40 - ( ),
( )

) G3 ,
4.4
 157
G3
, ( . 3.26)
. . 3.40 ,
,
.
, , ,

.
G2,
G3 –
4-5 , ( . . 3.40).
, ,
, .

.
, , G2,
( . .
3.39).
,
p-n , 7.1º ( . . 3.41),
.

.
2.5
4.4 1.5
( . . 3.42). G3
. 3.43.
 158

.)
= 7.1°

.
(
-80 -60 -40 -20 0 20 40 60 80
( )

3.41 - G3 ,
p-n

,
, R1,
.
, 3.16. ,

2
~ 800 .
G3,
4.4 . 3.44.

4.4 .
.
G2, , 3.1.5,
1.62×10-3 2
, – 0.338
2.4 .
, G3
G2.

.
 159
3.16 G3

.
2
-3 ) .
) ,( ) 2
)
GaAs 3.5×105 n = 5×1018 3000 2.0×10-5
n-Al0.35Ga0.65As
1500 n = 3×1017 1000 5.0×10-6
AlxGa1-xAs, x = 0.35
0.30 100 n,p = 3×1016 1000 2.9×10-6

Al0.07Ga0.93As
10 n,p = 3×1018 8000 4.0×10-10
AlxGa1-xAs, x = 0.30
0.35 100 n,p = 2×1016 1000 3.5×10-6

-Al0.35Ga0.65As
200 p = 3×1017 70 9.5×10-6
p-Al0.5Ga0.5As
30 p = 5×1017 70 7.8×10-7
-Al0.35Ga0.65As
1500 p = 3×1017 70 8.6×10-5
p-GaAs
200 p = 1×1019 100 2.0×10-7
2
( ) 1.29×10-4
8.8×103 2
) 0.015
)
-3

5 L = 4.4
x10 (

4
18

3
N(z)
2

0
0.0 0.6 1.2 1.8 2.4 3.0 3.6 4.2
( )

3.42 -
 160
4
10 8

)
2
7 L = 4.4
3
10

(A/
6
5

(A)
2
10
4
1
10 3
SiLENSe 2
0
10
= 1.3x10
-4 2 1
S
-1
10 0
1.2 1.4 1.6 1.8 2.0 2.2 1.2 1.3 1.4 1.5 1.6 1.7 1.8
( ) ( )

3.43 -
G3

6
)

L = 4.4
(

2
-1
= 0.2
1 add
R1= 0.9 , R2= 0.2
0
0 1 2 3 4 5 6 7 8 9 10 11 12
( )

3.44 - G3

,
,
.
.

3.3

.
 161

[42].
3.2 ,
,
. ,
, , ,
.
1,0-1,5% ,
.
,
2
– 250
2
~450-500 .
,
,
, ,
, , 3.2.

3.3.1 (R3)

, n-
AlxGa1-xAs x =0.35 0.60, .

. n-
,
.
,
,
. 3.1,
.
R3, 3.17. ,
 162
, . 3.1,
0.9 0.2,
,
. 200
-1
0.2 , R3,
, .

3.17 R3

( )

1 GaAs ND = 5×1018
2 GaAs 300 ND = 2×1018
3 n-Al0.35Ga0.65As 1800 ND = 5×1017
4 i-Al0.3Ga0.7As 300 —
5 Al0.07Ga0.93As 10 —
6 i-Al0.3Ga0.7As 450 —
7 p-Al06Ga0.4As 700 NA = 5×1017
8 p+-GaAs 200 NA = 1×1019

,
R3 ( , , ,
2 6 ,
)
. . 3.45 .
,
Lopt= 1.0-1.1 , – Lopt= 1.4 .
Lopt= 1.0-1.1 450
2
, – 0.92 (60%).
2
, 250 1.8
, 0.89
 163
(56%). , .
, 2 6 ,
Lopt= 1.0-1.1 .
)
2

1000
R1= 0.9 , R2= 0.2 1.10 Lopt = 1400
( /

900

( )
800
1.05
700
600 1.00
500
0.95
400
300 0.90
200
400 800 1200 1600 2000 400 800 1200 1600 2000
( ) ( )
3.35
Pout= 2 Lopt = 1100 7.8 Pout= 6 Lopt = 1100
3.30
( )
( )

7.7
3.25

3.20 7.6

3.15
7.5
3.10
7.4
3.05
400 800 1200 1600 2000 400 800 1200 1600 2000
( ) ( )
62 0.95
)
-1

2.0
R1= 0.9 , R2= 0.2
/ )

0.94
(%)

61
0.93 1.5
(

60 0.92
0.91 1.0
59
0.90
58 0.89 0.5
Lopt = 1000
0.88
57 0.0
400 800 1200 1600 2000 800 1200 1600 2000
( ) ( )

3.45 - R3
.
n- , –
n- , 2×1017 -3
 164
R3,
, ,
.
,
( . . 3.17).
, ,
. 0.6 2.0
, 2.5 ,
.

int 0.83, ,
, 0.77 , ,
. ,

1.0-1.1
.
, R3
( . . 3.46).

1 = 1.71 %.
, n-
.
n- .
n-
.
,
, R1, . 3.2.1.
 165
. 3.46a
, R1.

1.0 2
j = 453 A/cm
0.5
0.0

)
-0.5

(
-1.0
-1.5
-2.0
-2.5
-3.0
1.5 1.8 2.1 2.4 2.7
( )

20 20
10 10
2 2
j = 453 A/cm j = 453 A/cm b
a

)
19
)

19
10

-3
10
-3

(
18
(

18
10 10
17 17
10 10
16 16
10 10
15 15
10 10
14 14
10 10
1.5 1.8 2.1 2.4 2.7 1.5 1.8 2.1 2.4 2.7
( ) ( )

3.46 - ( , ),
( , )
((a)
(b)) R3 , 1.0
. ( ) n- ,
(b) – 2×1017 -3

, .
,
, ,
, .

, n-
 166
2×1017 -3
(
). ,
n- ( . 3.46 ) ,

( . ,
. 3.45).
,
.
R3
n- (
R3D). R3D
, R3, .
.
,
p-n , 30º ( . . 3.47).
(L = 1.0 ) 2.5-3.0
. 3.48).
, . .
.
~ 1.5 .
R3 . 3.49.
,

,
( . 3.18).

,
2
, ~1 .
R3 . 3.50.
n- 1.0
1.2 .
 167
0.7
= 1.7% = 30°

( . .)
0.6

( . .)
0.5
0.4
0.3
0.2

AlAs
0.1
0.0
0.0 0.5 1.0 1.5 2.0 2.5 3.0 -90 -60 -30 0 30 60 90
( ) ( )

3.47 -
R3/R3D ,
p-n

6
)
-3

L = 1.0
5
x10 (
18

4
N(z)
3

0
0.0 0.2 0.4 0.6 0.8 1.0
( )

3.48 -
R3

4
10 8
)
2

7 L = 1.0
3
10
(A/

6
2 5
(A)

10
4
1
10 3
SiLENSe 2
0
10
-5 2
=7.5x10 1
S
-1
10 0
1.2 1.4 1.6 1.8 2.0 2.2 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 2.0
( ) ( )

3.49 -
R3 ( n- )
 168
3.18 R3.

. .
2 2
) ,( -3
) ) )

1 GaAs 3.5×105 n = 5×1018 3000 1.3×10-5

n-GaAs
2 300 n = 2×1018 3000 3.1×10-8

3 n-Al0.35Ga0.65As 1800 n = 5×1017 1000 7.5×10-5

Al0.30Ga0.7As
4 300 n,p = 1×1017 100 1.9×10-5

Al0.07Ga0.93As
5 10 n = 2×1018 1000 1.6×10-9

Al0.30Ga0.7As
6 450 n,p = 1×1017 100 2.8×10-5

7 p-Al0.6Ga0.4As 700 p = 5×1017 70 1.3×10-5

p-GaAs
8 200 p = 1×1019 100 1.3×10-7

2
( ) 7.4×10-5
2×103 2
( ) 0.037

6
)

L = 1.0
(

2
-1
= 0.2
1 add

R1= 0.9 , R2= 0.2

0
0 1 2 3 4 5 6 7 8
( )

3.50 - R3

R3,
, 3.1.5, 7.74×10-4 2
,
– 0.387 1.0 .
 169
3.3.2
(R4)

, n- AlxGa1-xAs
x =0.60 0.35, .
,
, R3.
-
.
-Al0.8Ga0.2As 30 ( .
3.3.5).
R4,
3.19.
3.19 R4

( )

1 GaAs ND = 5×1018
2 GaAs 300 ND = 2×1018
3 n-Al0.6Ga0.4As 700 ND = 1×1018
4 i-Al0.3Ga0.7As 500 —
5 Al0.07Ga0.93As 10 —
6 i-Al0.3Ga0.7As 350 —
7 -Al0.8Ga0.2As 30 NA = 5×1018
8 p-Al0.35Ga0.65As 1700 NA = 2×1017
9 p+-GaAs 200 NA = 1×1019

R4
. 3.51 . ,
 170
Lopt= 0.9-1.0 ,
– Lopt= 1.4 .

)
2 1.00
R1= 0.9 , R2= 0.2
( /
800 Lopt = 1300
0.98

( )
0.96
600
0.94

0.92
400
0.90

200 0.88

0.86
400 800 1200 1600 2000 400 800 1200 1600 2000
( ) ( )

3.30 7.9
Lopt = 1000 Pout= 2 Lopt = 900
3.25 7.8
( )

( )
Pout= 6
3.20 7.7

3.15 7.6

3.10 7.5

3.05 7.4

3.00 7.3
400 800 1200 1600 2000 400 800 1200 1600 2000
( ) ( )

61
)
-1

0.96
1.8
/ )

Lopt = 900
(%)

60
0.94 1.5
(

59 1.2
0.92
0.9
58 0.90
0.6
57 0.88 0.3
R1= 0.9 , R2= 0.2
56 0.86 0.0
400 800 1200 1600 2000 400 800 1200 1600 2000
( ) ( )

3.51 - R4
.
n- , –
n- , 2×1017 -3
 171
Lopt= 0.9-1.0
2
500 , – 0.93 ( , 61%). ,
2 6 ,
Lopt= 0.9-1.2 .

, ,
,
. 3.2. , .
,
.
R4,
, ,
. R3,
,
( . . 3.52). 0.6
2.0 3 ,
.
,

. ,

0.9-1.0 .
, R4, R3,

. 3.52).

1 = 1.71 %.
, .
R4 -
 172
.
.
, -
2×1017 -3
R3.
1.0 2
j = 506 A/cm
0.5
0.0

)
-0.5

(
-1.0
-1.5
-2.0
-2.5
-3.0
0.3 0.6 0.9 1.2 1.5 1.8 2.1 2.4
( )
20 20
10 10
2 2
j = 506 A/cm a j = 506 A/cm b
)

19
)
19
10
-3

10
-3
(

18 18
10 10
17 17
10 10
16 16
10 10
15 15
10 10
14 14
10 10
0.3 0.6 0.9 1.2 1.5 1.8 2.1 2.4 0.3 0.6 0.9 1.2 1.5 1.8 2.1 2.4
( ) ( )

3.52 - ( , ),
( , )
((a)
(b)) R4 , 1.0
. ( ) n- ,
(b) – 2×1017 -3

. 3.52a
. R3,

, .

, , R3, n-
 173
2×1017 -3
(
n- R4D).
,
n- ( . 3.52 ) ,
,
( . , -
. 3.51). -
.
,
p-n , 30º ( . . 3.53).
(L = 0.9 ) 5 ,

,
( . 3.54).
R4 . 3.55.

,
,
( . 3.20).
0.8
= 1.7% = 30°
( . .)

( . .)

0.6

0.4
AlAs

0.2

0.0
0.0 0.5 1.0 1.5 2.0 2.5 3.0 -90 -60 -30 0 30 60 90
( ) ( )

3.53 -
R4/R4D ,
p-n
 174
6

)
-3
L = 0.9
5

x10 (
18
4

3 N(z)

0
0.0 0.2 0.4 0.6 0.8
( )

3.54 -
R4

10
4 8
)
2

7 L = 0.9
3
10
(A/

6
5
(A)
2
10
4
1
10 3
SiLENSe 2
0
10
= 1.2x10
-4 2 1
S
-1
10 0
1.2 1.4 1.6 1.8 2.0 2.2 2.4 1.2 1.4 1.6 1.8 2.0 2.2 2.4
( ) ( )

3.55 -
R4 ( n- )

,
. -
R4 . 3.56.
6
)

L = 0.9
(

2
-1
= 0.2
1 add
R1= 0.9 , R2= 0.2
0
0 1 2 3 4 5 6 7 8
( )

3.56 - R4
 175
n- ,
R4 R4D
.

3.20 R4.

.
2
, ) .
) -3 2
) )
1 GaAs 3.5×105 n = 5×1018 3000 1.3×10-5
n-GaAs
2 300 n = 2×1018 3000 3.1×10-8

n-Al0.6Ga0.4As
3 700 n = 1×1018 200 2.2×10-6

Al0.30Ga0.7As
4 500 n,p = 1×1017 100 3.1×10-5

Al0.07Ga0.93As
5 10 n = 4×1018 1000 1.6×10-9

Al0.30Ga0.7As
6 350 n,p = 1×1017 100 2.2×10-5

p-Al0.8Ga0.2As
7 30 p = 5×1018 70 5.2×10-9

p-Al0.35Ga0.65As
8 1700 p = 2×1017 100 5.3×10-5

p-GaAs
9 200 p = 1×1019 100 1.3×10-7
2
( ) 1.2×10-4
1.8×103 2
( ) 0.068

R4,
, 3.1.5, 1.81×10-3 2
,
– 1.007 0.9 .
 176
3.3.3 (G4)

(G4)
n- , n- -
AlGaAs.
( ,
R3).
3.21.

3.21 G4

( )

1 GaAs ND = 5×1018
2 GaAs 300 ND = 2×1018
3 n-Al0.35Ga0.65As 1800 ND = 1×1018
i-AlxGa1-xAs c
4 350 —
x =0.35 0.3
5 Al0.07Ga0.93As 10 —
i-AlxGa1-xAs c x =0.3
6 500 —
0.35
7 p-Al0.6Ga0.4As 700 NA = 1×1018
8 p+-GaAs 200 NA = 1×1019

G4
, . . , ,
, 2 6 ,
,
. 3.57. ,
,
Lopt= 1.1 .
 177
2
406 , – 0.94 (~ 61.5%).
1 1.5 .
,
(R3 R4),
G4 ,

( . 3.57).
, ( . ).
, G4

1 = 1.70 % .
n- ,
.
,
R3 ( . 3.58). , ,
, .

,
(R3 R4), .
R3,
, n-AlGaAs
3×1017 -3
n ,
2×1016 -3
n-
8×1016 -3
.

, G4D,
, . 3.57
.
G4D . 3.58 .
n
 178
(
n- ).

)
2
1000 1.10
R1= 0.9 , R2= 0.2 Lopt = 1200
( /

( )
1.05
800

1.00
600
0.95

400
0.90

200 0.85
400 800 1200 1600 2000 400 800 1200 1600 2000
( ) ( )

3.30 7.8
Lopt = 1100 Lopt = 1100
3.25 7.7
( )

( )
Pout= 2 Pout= 6
3.20 7.6

3.15 7.5

3.10 7.4

3.05 7.3

3.00 7.2

2.95 7.1
400 800 1200 1600 2000 400 800 1200 1600 2000
( ) ( )

63
)
-1

2.0
0.96
/ )
(%)

62
1.5
(

0.94
61
1.0
60 0.92

Lopt = 1100 0.5

59
R1= 0.9 , R2= 0.2 0.90
58 0.0
400 800 1200 1600 2000 400 800 1200 1600 2000
( ) ( )

3.57 - G4 (
) G4D ( )
 179
1.0 2
j = 406 A/cm
0.5
0.0

)
-0.5

(
-1.0
-1.5
-2.0
-2.5
-3.0
1.5 1.8 2.1 2.4 2.7
( )
20
20 10
10 j = 406 A/cm
2

j = 406 A/cm
2
a b

)
19
10

-3
)

19
10
-3

(
18
10
(

18
10
17
10
17 10
16
10
16 10
15
10
15
10
14 14
10 10
1.5 1.8 2.1 2.4 2.7 1.5 1.8 2.1 2.4 2.7
( ) ( )

3.58 - ( , ),
( , )

) G4 (a) G4D (b) ,

1.1

G4
25º. « »
n

R3).
( . . 3.60):
2.0-2.5 .
1.7 ,
.
G4
2
~ 300 A/ ( . 3.61).
 180

= 1.7% 0.6 = 25°

( . .)
( . .)
0.5

0.4

0.3

0.2

AlAs
0.1

0.0
0.0 0.5 1.0 1.5 2.0 2.5 3.0 -90 -60 -30 0 30 60 90
( ) ( )

3.59 -
G4/G4D ,
p-n

6
)
-3

L = 1.1
5
x10 (
18

3
N(z)
2

0
0.0 0.2 0.4 0.6 0.8 1.0
( )

3.60 -

4
10 8
)
2

7 L = 1.1
3
10
(A/

6
2 5
(A)

10
4
1
10 3
SiLENSe 2
0
10
= 1.24x10
-4 2 1
S
-1
10 0
1.2 1.4 1.6 1.8 2.0 2.2 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 2.0
( ) ( )

3.61 -
G4 G4D,
 181
( . 3.22)
, G4
. .
G4 G4D
.

3.22 G4.

.
2
, ) .
) -3 2
) )
1 GaAs 3.5×105 n = 5×1018 3000 1.3×10-5
n-GaAs
2 300 n = 2×1018 3000 3.1×10-8

n-Al0.35Ga0.65As
3 1800 n = 1×1018 1000 1.1×10-6

AlxGa1-xAs , x = 0.35
4 0.3 350 n,p = 4×1016 100 5.5×10-5

Al0.07Ga0.93As
5 10 n,p = 4×1018 8000 1.6×10-9

AlxGa1-xAs , x = 0.3
6 0.35 500 n,p = 6×1016 100 5.2×10-5

p-Al0.6Ga0.4As
7 700 p = 1×1018 70 6.2×10-6

p-GaAs
9 200 p = 1×1019 100 1.3×10-7
2
( ) 1.24×10-4
2.2×10-3 2
( ) 0.058

G4 . 3.62.
 182
G4D.
R3.

)
L = 1.1

(
5

2
-1
= 0.2
1 add
R1= 0.9 , R2= 0.2
0
0 1 2 3 4 5 6 7 8
( )

3.62 - G4/G4D

G1,
, 3.1.5, 8.5×10-4 2
,
– 0.388 1.1 .

3.3.4
(G5)

,
,
n- .
n- ,

, n- .
R4 G5;
3.23.
G4 30 Al0.8Ga0.2As ,
.
, R4. ,
 183

3.23 G5

)
1 GaAs ND = 5×1018
2 GaAs 300 ND = 2×1018
3 n-Al0.6Ga0.4As 700 ND = 1×1018
i-AlxGa1-xAs c x =0.35
4 600 —
0.3
5 Al0.07Ga0.93As 10 —
i-AlxGa1-xAs c x =0.3
6 350 —
0.35
7 p-Al0.8Ga0.2As 30 NA = 5×1018
8 p-Al0.35Ga0.65As 1700 NA = 2×1017
9 p+-GaAs 200 NA = 1×1019

–
, , ,
2 6 , –
. 3.63.
,
, Lopt= 0.9 .
2
467 ,
– 0.95 (62%). ,
G5D ( . ) :
2
461 , – 0.96
(63%). G5 G5D
. G5D
 184
, G5,
.

)
2 0.90
R1= 0.9 , R2= 0.2
( /
800 Lopt = 1200

( )
0.88

600 0.86

400 0.84

0.82
200
0.80
400 800 1200 1600 2000 400 800 1200 1600 2000
( ) ( )

3.15 7.6
Lopt = 1100 Pout= 2 Lopt = 1000
7.5
3.10
( )
( )

Pout= 6
7.4
3.05
7.3
3.00
7.2

2.95 7.1

2.90 7.0
400 800 1200 1600 2000 400 800 1200 1600 2000
( ) ( )

63 2.1
)
-1
/ )

0.96 1.8
(%)

62 0.95 1.5
(

0.94 1.2
61
0.9
0.93
0.6
60 Lopt = 900 0.92
0.3
R1= 0.9 , R2= 0.2 0.91
59 0.0
400 800 1200 1600 2000 400 800 1200 1600 2000
( ) ( )

3.63 - G5 (
) G5D ( )
. , ,
 185
G5
( . 3.64)
= 1.73 % , .
1.0 2
j = 467 A/cm
0.5
0.0

)
-0.5

(
-1.0
-1.5
-2.0
-2.5
-3.0
0.3 0.6 0.9 1.2 1.5 1.8 2.1 2.4
( )
20 20
10 10
2 2
j = 467 A/cm a j = 467 A/cm b
)

19
10 ) 19
-3

10
-3
(

(
18 18
10 10
17 17
10 10
16 16
10 10
15 15
10 10
14 14
10 10
0.3 0.6 0.9 1.2 1.5 1.8 2.1 2.4 0.3 0.6 0.9 1.2 1.5 1.8 2.1 2.4
( ) ( )

3.64 - ( , ),
( , )

) G5 (a) G5D (b) ,

1.0

G5
, , , R3 R4:
,
4-10 , ( . . 3.64).
G5D , G5
( . . 3.64a .
3.64 ).
 186
,
p-n , 26º ( . . 3.65).
3 ,
~ 1.5 ( .
. 3.66).
1.0
= 26° = 1.7%
( . .)

( . .)
0.8

0.6

0.4

AlAs
0.2

0.0
-90 -60 -30 0 30 60 90 0.0 0.5 1.0 1.5 2.0 2.5 3.0
( ) ( )
3.65 -
G5/G5D ,
p-n
6
)
-3

L = 1.0
5
x10 (
18

3
N(z)
2

0
0.0 0.2 0.4 0.6 0.8 1.0
( )

3.66 -

G5 . 3.67.
,
,
, 3.24.
 187
4
10 8

)
2
7 L = 0.9
3
10

(A/
6
2 5

(A)
10
4
1
10 3
SiLENSe 2
0
10
= 2.0x10
-4 2 1
S
-1
10 0
1.2 1.4 1.6 1.8 2.0 2.2 2.4 1.2 1.4 1.6 1.8 2.0 2.2 2.4
( ) ( )

3.67 -
G5 G5D

3.24 G5.

.
2
-3 ) .
) ,( ) 2
)
1 GaAs 3.5×105 n = 5×1018 3000 1.3×10-5
n-GaAs
2 300 n = 2×1018 3000 3.1×10-8

n-Al0.6Ga0.4As
3 700 n = 1×1018 200 2.2×10-6

AlxGa1-xAs , x = 0.35
4 0.3 600 n,p = 4×1016 100 9.4×10-5

Al0.07Ga0.93As
5 10 n,p = 4×1018 1000 1.6×10-9

AlxGa1-xAs , x = 0.3
6 0.6 350 n,p = 5×1016 100 4.4×10-5

p-Al0.6Ga0.4As
7 30 p = 2×1017 70 1.3×10-6

p-Al0.35Ga0.65As
8 1700 p = 2×1017 100 5.3×10-5

p-GaAs
9 200 p = 1×1019 100 1.3×10-7
2
( ) 2.0×10-4
1.8×103 2
( ) 0.114
 188

2
, , , ~ 1
G5 G5D . 3.68 (
G5D
G5). G5,
, 3.1.5, 1.86×10-3 2
,
– 1.030 0.9 .
) 6
L = 0.9
(
5

2
-1
= 0.2
1 add

R1= 0.9 , R2= 0.2

0
0 1 2 3 4 5 6 7 8
( )

3.68 - G5/G5D

3.3.5
(G2D)

, , 30
Al0.6Ga0.4As
, . ,
,
,
.

40-50% .

, , ,
 189
AlGaAs . ,
AlAs 80% (
3×1018 -3
) .
R4 G5.
, -
.

,
.

G2 G2m, . 3.2.

n-
,
( . 3.2).
G2/G2m
, G2D. 3.25.

3.25 G2D

( )
1 GaAs ND = 5×1018
2 GaAs 300 ND = 2×1018
3 n-Al035Ga0.65As 1800 ND = 1×1018
i-AlxGa1-xAs c
4 300 4×1016 1×1017
x =0.35 0.3
5 Al0.07Ga0.93As 11 —
i-AlxGa1-xAs c
6 300 —
x =0.3 0.35
7 p-Al0.8Ga0.2As 30 NA = 5×1018
8 p-Al0.35Ga0.65As 1800 NA = 2×1017
9 p+-GaAs 200 NA = 1×1019
 190
–
, , ,
2 6 , –
. 3.69.
)
2

R1= 0.9 , R2= 0.2 1.02

( /

800 Lopt = 1200

( )
1.00
600
0.98
400
0.96

200
0.94

400 800 1200 1600 2000 400 800 1200 1600 2000
( ) ( )

3.30 7.8
Lopt = 1000 Pout= 2 Lopt = 1000
3.25 7.7
( )

( )

Pout= 6

3.20 7.6

3.15 7.5

3.10 7.4

3.05 7.3
400 800 1200 1600 2000 400 800 1200 1600 2000
( ) ( )

62 1.5
)
-1
/ )

0.96
(%)

1.2
61 0.95
(

0.9
0.94
60
0.93 0.6

59 Lopt = 1000 0.92 0.3

R1= 0.9 , R2= 0.2 0.91
58 0.0
400 800 1200 1600 2000 400 800 1200 1600 2000
( ) ( )

3.69 - G2D
 191
,
, Lopt= 1.0
2
. 469 ,
– 0.94 (61%). G2D

, .
G2D
( . 3.70)
= 1.63 % , .
n-
n- ( . . 3.70).

20
1.0 10
2
j = 469 A/cm j = 469 A/cm
2
0.5
)

19
10
-3

0.0
)

18
10
-0.5
(

17
-1.0 10
-1.5 16
10
-2.0
15
10
-2.5
14
-3.0 10
1.0 1.5 2.0 2.5 3.0 1.0 1.5 2.0 2.5 3.0
( ) ( )
3.70 -
( )
( ) G2D
, 1.0

,
p-n , 15º ( . . 3.71).
 192
3 ,
~ 1.5
( . . 3.72).

G2D . 3.73.
1.0
= 1.63% = 15°

( . .)
( . .)

0.8

0.6

0.4

AlAs
0.2

0.0
0.0 0.5 1.0 1.5 2.0 2.5 3.0 -90 -60 -30 0 30 60 90
( ) ( )

3.71 -
G2D ,
p-n

6
)
-3

L = 1.0
5
x10 (
18

3
N(z)
2

0
0.0 0.2 0.4 0.6 0.8 1.0
( )

3.72 -

,
, ( . .
3.2).
.
 193
4
10 8

)
2
7 L = 1.0
3
10

(A/
6
5

(A)
2
10
4
1
10 3
SiLENSe 2
0
10
-4 2
= 1.3x10 1
S
-1
10 0
1.2 1.4 1.6 1.8 2.0 2.2 2.4 1.2 1.4 1.6 1.8 2.0 2.2
( ) ( )

3.73 -
G2D
G2D . 3.74.
,
.3.2, .
6
)

L = 0.9
(

2
-1
= 0.2
1 add
R1= 0.9 , R2= 0.2
0
0 1 2 3 4 5 6 7 8
( )

3.74 - G2D.

3.4

,
.
 194
3.4.1 AlGaAs

n ~ ( j / q) d / U , (3.3)

d – , U ~ Ub – Ucut , Ucut –
. d~3 , Ucut ~ 1.4 , Ub ~ 1.5-1.7 ,
2 2
~ 200 , j~1 n ~ (0.3-1.0)×1017 -3
,
. ,

, . . AlGaAs
0.4.
U/d (3.3)
, .
, ,
.

.
AlGaAs
x > 0.5 ,

. AlGaAs (x < 0.4)

.
,
 195
.

AlGaAs.

.
. ,
,

, [120].
,
,
[121], . .
, ,
. , ,
AlGaAs ( .,
. 3.75),
,
, .

AlGaAs
.

, ,
, , .
 196
,
, « »
, . ,
,

( x < 0.4 ). , . 3.75, ,

AlGaAs 0.42 < x < 0.57
.

3.75 - AlGaAs
[122]

3.4.2

3.26,
, .
,
, ,
1 . ,
.
 197
,
,

1.24 1 RL R0 RL
PoutL int (I I th ) th
R
, , (3.4)
i R RL R0 RL 1 R0 RL

PoutL – , , 1.24/
– , , int –
,

, I Ith –
th
, R i – ,
– , (RL)
(R0) .
(3): D d PoutL / d I .

3.26
( ).
,

Lopt Jth Iop (A) D int

2 -1 int
(%) ) (A/ ) @ 6W ) ) ) 2
)
B 3.30 0.85 240 6.12 1.05 1.3 40.3 0.83 1.5×10-4 —
R1 1.73 1.9 250 7.75 0.89 1.1 38.8 0.77 2.1×10-4
G1 1.70 1.7 245 7.13 0.95 0.7 28.5 0.77 9.8×10-4
1 1.65 0.7 590 6.66 1.03 1.6 50.5 0.81 2.1×10-4
1.65 2.2 240 7.39 0.94 1.0 50.5 0.84 2.1×10-4
R2 1.67 2.0 235 7.68 0.89 1.0 23.3 0.79 1.5×10-4
G2 1.48 2.4 245 8.23 0.85 1.1 16.4 0.79 1.4×10-4
G3 1.0 4.4 240 10.71 0.70 1.2 7.1 0.80 1.3×10-4
 198
(3.4). RL = 0.2
R0 = 0.9 = 0.944 , . . ~
6% R0 .
-1 th
L=2 R = 4.3 . i ~1
-1 th
(1.24 / ) R /( i R ) 1.13 /A,
, 1 .

int = 0.75
0.88 , .

th -1
, , i < 0.3 .

.
, ,
, ,
, , int

R ,
, .

.
G1 G2,
, .
G2 ,

. G2 .
– AlGaAs ,
 199
. –

.
, AlGaAs
,
,
,
, . .

.
,
InGaAlAs
.

–
n- p .

.
~ 0.1 .

3.4.3

.3.3

.
,
,
, .3.2.

. ,
 200
,
.
, ,
,
, , , ,

.
n-
. ( ,
, n- ) n-
, .
, n- ( , ,
)
n- .
, ,
.
. ,
.
, ,
, .

3.4.4

3.27
.
3.26, . 3.4.2,
, ,
, .

.
 201
, – .
A1
, 40º.

3.27
( )

Lopt Jth Iop (A) D int

2 -1 int
(%) ) (A/ ) @ 6W ) ) ) 2
)

B 3.30 0.85 336 6.12 1.05 1.53 40 0.83 1.5×10-4 —

1 1.65 0.8 522 6.68 1.03 1.62 51 0.81 2.1×10-4
R1 1.73 1.0 479 7.54 0.91 1.71 39 0.77 2.1×10-4
R2 1.67 1.3 354 7.58 0.90 1.32 23 0.76 1.5×10-4 —
R3 1.71 1.0 468 7.48 0.92 1.71 30 0.77 7.4×10-5 —
R3D 1.71 1.0 461 7.41 0.92 1.67 30 0.78 7.4×10-5 —
R4 1.71 0.9 506 7.49 0.91 1.96 30 0.77 1.2×10-4 —
R4D 1.71 0.9 494 7.35 0.93 1.90 30 0.78 1.2×10-4 —
G1 1.70 1.4 293 7.10 0.96 0.75 29 0.76 9.8×10-5 /?
G2 1.48 1.4 390 7.81 0.89 1.37 16 0.77 1.4×10-4 —
G2D 1.63 1.0 467 7.31 0.94 1.52 15 0.78 1.4×10-4 —
G3 1.0 1.4 622 8.93 0.83 1.46 7 0.72 1.3×10-4 —
G4 1.73 1.0 406 7.27 0.94 1.34 25 0.78 1.2×10-4 —
G4D 1.73 1.0 401 7.18 0.95 1.22 25 0.78 1.2×10-4 —
G5 1.73 0.9 467 7.16 0.95 1.61 26 0.78 2.0×10-4 —
G5D 1.73 0.9 461 7.09 0.96 1.57 26 0.78 2.0×10-4 —

,
, . .
, .
, ,

~ 1.63-1.73% 76-78% . :
 202

7.1 7.6 , . . 7% .
–
,
.
~ 1.63-1.73%
, 0.90 0.96 , . . 6% ( . 3.76).

D .
1.00
/ )

0.95
(

0.90

0.85

0.80
R1 R2 G1 G2 G2D G3

1.00
/ )

0.95
(

0.90

0.85

0.80
R3 R3D R4 R4D G4 G4D G5 G5D

3.76 -

D = 0.95 ,
G1
G4D, G5 G5D .
, G2
 203
,
. G1 , ( )
,( )

.
( ) (1.4
1.0-1.1 ),
, ( )
.
.
G4D
, . . ,
, G1, .

(
).
G5 G5D
, .
p-Al0.8Ga0.2As ,
5
.

. , G5
G5D. ,
,
. . 3.77,
, ,
.

25÷29 .
5
,
.
 204

.
3.0

)
-1
2.5

(
2.0

1.5

1.0

0.5

0.0
R1 R2 G1 G2 G2D G3

3.0
)
-1

2.5
(

2.0

1.5

1.0

0.5

0.0
R3 R3D R4 R4D G4 G4D G5 G5D

3.77 -
( ) ( ) .
”

. 3.78

~ 1.63÷1.73%
, ,
.
, ,
G2D, 30 AlGaAs,
 205
.
.

)
60

50

(
40

30

20

10

0
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5
(%)

3.78 -
.
, –
, –

3.4.5

,
.
123 ( . 3.79)
1,
InGaAlAs, 808±3
, – 10 . 1
2 3 ,
50 100 ,
4 5 ,
, 2 3 .
4 6 p- .
5 7 n- .
6 7 Alx Ga1-x As,
 206
0,5 0,7. 6 – 1,5 .
,
p=2*1017 -3
. 7 – 1,8 .
,
n=2*1017 -3
.
4 5 Aly Ga1-y As,
y 0,39 0,41. (d )
4 5 1500 1800 . 2, 3
Alz Ga1-z As. z
4, 5 y
0,34 z 0,36 .

3.79 - .
:1– ,2–
3– ,4– 5–
, 6 – 7 – , 8 – , 9 –
, 10 – , 11 –
, 12 –

2, 3 (d ) 70 80
. 8 GaAs n-
n=2*1018 -3
. 9 GaAs n- 0,3
 207
18 -3
n=2*10 . 10
GaAs p- p=1*1019 -3
.
.
11,
Au-Zn, 200 ,
Au-Ge n- 12.
Alx Ga1-x As
: 0,5 x 0,7, ,
, , , ,
.
,
,
. , ,
1500 1800 ,

. 1500
, 1800

.
, x, Al Alx Ga1-
x As, 0,5
, x > 0,7
, .
Aly Ga1-y As
: 0,39 y 0,41,
. y, Al Aly Ga1-y As, 0,39
( , )
, .
y > 0,41
 208

, .
,
Alz Ga1-z As, z, Al
Alz Ga1-z As, y
0,34 z 0,36
« » .

.
, ,
. z
0,34
, . z 0,36

( z y).
70

.
, ,
35%. 80
,
,
p-n 28-29
.

3.4.6

, .
 209
124 ( . 3.80)
1,
InGaAlAs, 808±3 ,
– 10 . 1 2
3 ;
320 380 ,
470-530 . 4 p- 5 n-
, , 2 3. 4
Alxp Ga1-xp As, xp 0,5
0,7. 4 ,
p=2*1017 -3
. 5
Alxn Ga1-xn As, xn 0,3
0,4. 5 ,
n=2*1017 -3
. 2
Al Ga1-y As. y
4 xp 0,25 y 0,30.
3 Al Ga1-y As.
y 5 xn 0,25
y 0,30. 7 GaAs n-
n=2*1018 -3
. 6 GaAs n- 0,3
n=2*1018 -3
. 8 GaAs
p- p=1*1019 -3
.
.
9,
Au-Zn, 200 ,
Au-Ge n- 10.
p-
Alxp Ga1-xp As : 0,5 xp 0,7, ,
, ,
.
 210
n- Alxn Ga1-xn As :
0,3 xn 0,4 ,
. ,

, ,
.
x p, Al Alxp Ga1-xp As,
0,5 ,
xp > 0,7 ,
. xn 0,3
n-
, . xn 0,4
n- .

3.80 - .
:1– ,2– 3–
, 4 – 5 – , 6 –
, 7 – , 8 – , 9 –
10 – n-
 211
,
Al Ga1-y As Al Ga1-y As,
y y p- n-
xp xn
0,25 y 0,30 0,25 y 0,30, « »
.
.
,
, .
y y 0,25
, .
y y 0,30 .
(d ) 320
p- ,
. d 380
,
, , .
(d ) 470
,
; ,

, .
d 530
, .

3.5 3

1.
,
,
,
 212
. ,
,

.
, ,
,
, .
2309501
2309502.
2.

.
,
.
~1.0-1.5%
.
3. , ,
,
.
, ,
.

.
4.

p . ,

.
 213
4

[52, 54, 85] ,

, ,
, .
(Rth ),

Ph T.

, , , ,
, , . .
Rth
,
, .

.
,
.

4.1

, , ,
», . 4.1 .
, p- -
,
±5
.
.
. ,
 214
.
,
).
.

(a)

)
4.1 - ( )
( ).
W=200 , 600
 215
.
4.1 . 3 600
200 ,
.
0.15 . ,
, 3 .
3 .
AuSn ( ) -
250 ,
CuW (10/90%). ( . 4.1 )
SnPb
.
,
AlGaAs.
1.5 0.8 , .
, [125].

4.2

. Ph
,
. ( . .
4.1 ) 25° .
Rth T / Ph , T –
25° .

: ( )
( . 4.1 ).
,
 216
, , ,
3D , .
1D 3D ( .
4.1 ) 2D , ,

.
, ,
,
( 2 . 4.2, ).

. . 4.2, ).

3D .
CFD-ACE+.
, , [52].
30
21
)

2 1-
2

25
/

18
1 2-
15
( )

20
(

12
15 2
9
1
10
6
5 3

0 0
0 50 100 150 200 250 300
( )
4.2 -
( 100 ) (1) (2)
( ).
(1) (2) (
)
 217
4.3

4.3.1 ,

,
(~ 95%) p-
, AlGaAs [52].
1D : Rth d / WL ,
d– , – ,
, W L .
W = 200 L=3
0.22-0.23 .
,
, 1D .
~ 3
(~ 49%) SnPb (~ 17%),
(~ 23%). W = 200 L=3
0.20
0.24 .
, CuW ,
1D 3D . ,
(250 ),
, W
L , CuW
(250 ). Rth 0.92 .
 218
4.3.2 ,

,
, ,
. . 4.3
, . ,
,
. 3D

. Rth = 1.63
. 85% , ,
15% –
.

4.3 -
, 10
 219
,
. ,
Rth , ,
: DHS ( 6 10 ) tHS 2 4 ).
,
, ~ 7%,

1 2 DHS t HS
Rth ln 2
, (4.1)
L W DHS

. (4.1) ,
( WL),
,
) ( ). ,
,

4.3.3

. 4.4
L
W = 200 CuW
. ,
, «
». ,
~ 0.3-0.7 ,

.
 220
. 4.3
,
~ 30%
( . . 4.6).
[54] ,
, .

, . 4.4 ,
Rth ,
– –
.
Rth . ,
,

[52],
.
,

.
,
,
[54].

4.4

Rth .
[126].
h , u
e ( . . 4.5).
 221

4.4 -
L W = 200
, :( )

( ) AuSn ,
SnPb . – ,
– ,
( 5 .)
 222
,
, 45° .
, ,
. h=4
,
,
.

4.5 -
, 10

, ,
u = 10 l= 6 ,
.
. . 4.5
, h=4
, u = 12 l= 6 0.2×3.0 .
Rth = 1.33 ,
~ 20% Rth ,
 223
. 2 ,
,
Rth 1.28 .
,
.
,
,
, .
,

45°- . . 4.6

, , 10 .

4.6 -
, 10 ,

, (
z=3 ) , 1.5
.
 224
4.5

,
, ,
. [52],
. ,
, ,
, , [127,
128].
,
.
100 ,
0.2 .
= 23
/( ). , Rth
1.13 K/ , Rth ,
. ,
(u = 12 , l=6 )
, 0.78 .
Rth
.
,
. ,
, ,
( . 4.7). ,
,
.
,
. 4.8.
 225
,
,
,
, .

4.7 -
100 ,
,
, 10

2.0
)

1.6
h=2
h=4
( /

0.6x3.2

6x12

1.2

0.8

0.4

0.0

4.8 -
,
 226
,
, ,
(ScD) ~ 6 /( ),
,
~ 17 /( ), . . , [129].
,
– ~20 ~ 60 /( ) [130],
,
, .

4.6

,
,
, [54]
,
.
– D = 0.7,
» Vto = /q = 1.53 ,
RS = 0.2 , Ith(300 ) = 0.4 ,
T0 = 120 K, [52]. -
,
, . 4.9 .
. 4.9
( ,
) Rth .
, Rth
. . 4.9 ,
( )
808 .
 227

4.9 -
( )
3 ,
( ).
( ),
808 [52]

, , ~ 7

, Rth , ~ 4
 228
. ,
. 4.4, Rth < 4
1.5 . , , ,
. 4.9 , ~ 0.8÷1.2
,
.

4.7 4

1.
[126, 131] ,
,
.

.
2.
,
, , .

.
3.
,
.
4. ,
, ,
.
,
, .
.
5. ,
 229
.

~ 0.15÷0.20 .
,

[52].

,
[106, 132].
 230
5

5.1
808
5.1.1

3.

808
, 3.4.5, 3.4.6.

5.1.1.1

( )

,
15 ,
[133].

;
 231

;
;

5.1.1.2 ,

5.1.1.2.1

4 :
;
;
« »
;
.

, .
, ,
, ,
(p- ) 3- .
,
:
, ;
, ;
;
 232
;
;
;
;

;
;
,
;

;
, ;
.

:
;

;
;
;
n- ;
n- ;
;
n- ;

;
n-
;
 233
n-
;
;
;
.

»
:
;
;
;
;
;
;

;
;
;
;
;
;
.

:
;
;
;
 234

;
;

;
;
;
;
, , .

5.1.1.2.2

:
;
;
n- ;
,
.
,
, .

,
,
 235
.
(6*10-6
-1
) (18*10-6 -1
). In-
, .
5 . . 5.1

. n-
.

5.1 -

5.1.1.3

InAlGaAs/AlGaAs/GaAs
, 3.4.5, 3.4.6
 236
15 (
400 , . 5.2) [133].
,
. . 5.3
.

5.2 - 15

5.3 -
[133]
 237
. 5.4
( ).

5.4 -
( ) ( )
( ) p-n
 238

.
In- .
AuSn
CuW , , , .
. 5.5
.
,
[125]. . 4.4 ( )
( ) 3 ÷ 3,5 .

5.5 -
: In-
( )
AuSn CuW
( )
 239
5.1.2

,
,
[134],
. ,
( ,
),
( -
, ) .

,
" , ( )
( ) [135].
"
,
.
[135, 136]

.
,
,
[ 1 3 7 ]. " "

[2].
(P 100 )
,
200 - 400 , 50 - 100 ) [3, 138].
 240

InAlGaAs
. . 1.4.1). n-Al0,6Ga0,4As:Si p-Al0,6Ga0,4As:Zn
1.5 . AlxGa1-xAs
0.3 Al - x = 0.6 x=
0.3 .
( 200 )
160 , ,
. 2- .

[3].

[138].

1000 eV. 11000 .

95%, -
10%.
.

"LASERMATE" "COHERENT".
(P1) P1 =
P2 • , P2 - ( )
, v— .

-23.
 241
, -
.
. 5.6a
.
100 115 A ,
2
200 A/ . - 1.0 /A
(65%), - 40% . FWHM
2.2÷2.5 ( . 5.6 ).

5.6 – : -
200 , 50 ); –

( . 5.7a)
,
 242

.
( )

( . 5.7 ). ,
" ,
, .

5.7 - : a —
; —

. 5.8
.
200 190 ÷ 200 A, - 1.2 /A (78%) - 45%.
 243

5.8 - ( )
) ( 250 ,
20 )

200
10 ) . 5.9.
, ,

.
,

10 .
, 2 50 .
6 10 .
2,5 ( 6 42,5
) 10 ( 10 126,5 ) . 5.10.

5.1. ,
250 , 20 ), ,
5*108 .
 244

5.9 -

5.1

, 2,5 10
, . 20 50
, 125 200
2
, 6000 1 10000 1
, 250 ÷ 500
, 20
,A 150 200
( ), 50 120
+25°C, 802 ÷ 806
( ), 4.0
( ), 5*108
 245

) )

5.10 - : -
6 42,5 , 2,5 ; -
10 126,5 ; 10

,
Al2O3 « »
-100-1), ( 20 /( *K)).
5
10 63 ) . 5.11. .
5.11, ( 50%),
.
500 ,

.
 246

5.11 -
: (1) +25°C, (2) +40°C)
(3)

5.2
940 - 960

5.2.1 ,

, 0.96 ÷ 0.98 ,
Er3+
.
InGaAs/AlGaAs/GaAs

, [139-141].
,
,
. 5.12. ,
= 0.034
,
p-n- , = 40°,
 247
.

, .
( int)

« »
, [144].

5.12 – InGaAs/AlGaAs/GaAs X(d), Y(d)

I(d)

( int)

( J °th, ) [ 1 4 5 ]
(1/2 ) (L)
(Jth) ( . 5.13 ).

+25 °C. 1/2 ( L) [1 4 6 ] aint =

-1
1.5 c int = 98%. aint
[147, 148]. Jth ,
2
Jth(1/L), 70 A/c
« » ,
( =2 ).

,
, . 5.13 .
 248
( = 65%; Jth =
2 2
100 A/c = 70%; Jth = 120 A/c 2000 1000
). T0, 150°C,
945÷950, FWHM
1.5 .

5.13 – (Jth)
1/L ( , ),
(1/2 ) L( , )
( )

P = 1W
( T =+25°C),
( T =+50°C),
[146]. 30 . ,
 249
« » , «
» [149, 150]
, ,
« » 2*10-5 -1
,
10 000 .

5.2.2

Yb-

(1.5 ÷ 2.0 ),
(1 ÷ 10 ) [151].

[152]).

,
.
,

[153, 154].

5 , 940 ÷ 960
Yb.
InGaAs/AlGaAs/GaAs ,
5.2.1 [143].
(50 .) [3],
160 200 .
 250
1000 ± 50 .
95 5%
. ,
±1 .
,
.

«LASERMATE»
«COHERENT». ( P out)
Pout = Pc • v Pc - ( )
, v — .

GaP.
-23.
. 5.15
P
. ,
47 42%,
72 66% +25 +55°C
.
0, 180°. . 5.15

120 A. ,
5% .
Pout +25 +55°C,
Pout , ,
« »
20 .
 251

5.15 - P (1 2)
(3 4) +25 +55°C (1, 3
2, 4 ). 5
10 .
,
110 A

, (300 5 )
(10%) . 5.16
( 1.1 /A 1.05 /A)
. . 5.16
, 110 A. ,
5 5%.

. ,

( . 5.17).
FWHM 5
 252

Yb.

5.16 - ,
(300 5 ).
,
110 A

5.17 - ,
300 5 . 110 ,
+250 .
 253

0 0
–40 +85 . . 5.18

( ). ,
100 (80 +850C) -
60% (T= – 400C)
40% (T= +850C). Ith(T)
[144] T0=150 K.

5.18 -
( )

. 5.19
. FWHM 3.5
5.6 –400C +850C.
0.35 .

( –40 +850C) Yb [156]

Yb-Er .
 254
,
.

5.19 -

, 100 A,
5 . + 25°C
Pout 3*107 .
+55°C 1÷
2% 107 . ,
Pout(t) Pout(t0) = 0.8*Pout(0)
= + 5 5 °C t0 = 108 . ,
, 30
(
[145]),

= + 2 5 °C t0 = 109 .
, , [157,
158, 159].
 255
5.3
660

, ,
.
( 1 ) ,
.
–
E6
665 .
89 %
. , ,
:
665±5 , FWHM 3 ,
1 , ,

, 5000 ,
.

GaInP 70…100 .

[160].
x In1-xGaxP,
LQW , ,
Ee1
Ehh1 ( h (x,LQW) = Eg(x) + Ee1(LQW) + Ehh1(LQW)).

« » [161]
 256
.

,
, .
.

“ ”
. ( . .
5.20)
.

5.20 -
« »: 1 – n-
GaAs; 2,3 – n-AlGaInP p-AlGaInP , 4 –
AlGaInP/GaInP/AlGaInP ~ 10 ; 5 – SiO2 ;6–
p-GaAs; 7 – [ 29]

p-
,
.

1000 .
 257
90 %,
, 10 %.

,
.
,
p-n ,
32°, p-n
6° ( . 5.21).

5.21 -
, (1) (2) p-n .
T = +20 °C

. 5.22. , 1 .
1,3 A 2A 20° 50°
2
, 244 375
. ,
, T0 = 70°C.
. 5.23.

, 30 – 30
 258
, , 0,5 %.

5 – 10 %.

,
,
.

5.22 - ; T = 20 °C

5.23 -
20 °C (1) 50 °C (2)

1 000 1,3
 259
20° ( . 5.24). ,
10 000 .

5.24 -
; 2,77 , 1 000 ,
1,3 %

, ,
, , ,
[162].

, , .
,

5.4

1.
,
.
 260
,
15 , 808 , 48%,
7 36 .
2.
( 500 )
808 100
) 200 ( ).
10 .
3.
( 5 ) ,
InGaAs/AlGaAs/GaAs 940 – 906 . ,
0
-40 +85 ,
109 (+250 ) 108
(+850 ).
Yb-Er ,
,
.
4.
GaInP 670
2 . “
” ( 2110874)
(P=1,3 , =670 )

, .
 261
6

, .
,
5, ( ) ( )
.

6.1

. ,
, ,
. . [163-165].

.
( ) ,
,
.

( . . 1.4 ),
.
[166].
, . ,
 262
( YAG:Nd)
20 .
( . 1.3.2). ,

,
.
1,5-2
, .
15÷20 .
,
5.1.1.3.
15 , 16
1 400 . . 5.2,

. 5.3. InAlGaAs

( . 3.4.6).
( )
. 4.4).

. 6.1 [133].
– ( ), ( )
( ).
YAG,
Nd 0,8%.
( )
4 ,
[10].
.
 263

6.1 -
. :
– , :
LD1, LD2 – ; 1, 4– ;
L1, L2 – ;
2, 3, 5– , ;
1– ; D1 – ;
AOM – .
– , :
LD3, LD4 – ; 6, 9– ;
L4, L5 – ;
L3 – ; 7, 8– ;
2–
– , :
D2 – ; L6 – ;W– ; L7 – .

2, 3 5,
2 3 0,808
HR 1.064 , 5
1.064 .
“AA opto-electronic” ( ).
1,5 2,0
 264
60-70 %.
1,064 ,
. . 6.2.

6.2 -

,
,
1,5÷2.

, .
,

.
. 6.3.

: 10 ,
1,5 , 4÷5 % 15-20
10 . 6.1
.

, , ,
.
,
 265
. 6.1 ,
.

6.3 -

6.1

- Mesa Prometheus ATC 1,06–10

IR-Y
IB Laser Compact
«
) laser ( )
»

Nd:YAG Yb:fibre Nd:YAG Nd:YAG Nd:YAG

, 1,06 1,05-1,07 1,06 1,06 1,06
1-100 20-100 1-100 0,005-50 0,004-10

,
10 10-20 12 5 10
,
1,5 0,5-1,0 0,5 0,5 1,5

,
- - 30 10 20
,
1000 700 500 200 400
,
 266
6.2

6.2.1

( )

, ,
, ,
.
( « « »,
, « . », « » .)

,
.

1,5 10 .
,
–
, ,
.
1,5 ,

:
(7.9 )
,
;
;
.
 267
-
[138, 157],
1,5
,
,
.

Nd:YAG .

125 ,
802 ÷ 804 , FWHM 3 ,
45% 6 ,
5.1.2. 120
. ,
Nd:YAG ( 1 )
. , ,
,
,-
,
.
0.3
.

, . 1.4 .
( . . 6.4) , ,
,
, .
,
, .
 268

,
,
.

6.4 -
. : 1, 9 – ; 2 -
GSGG:Cr4+; 3 – ;4- YAG:Nd3+; 5
- ; 6, 8 – ;7-
KTP; 10 - .

YAG:Nd 2.5 ,
.
GSGG:Cr4+.
80 HR 1.064
.
. . 6.5.

6.2.2
 269
,

: ,
, .

50 .

6.5 -

1
. 6.6 . 6.7, .

6.6 -

(
, HR ,
 270
) ,
,
.

.
2000 – 3600 .

.
.

6.7 -

, ,
.
.
1.57 10 ,
20 , 7-
0.7 . ,
.
,
10
 271
0
– 55 + 55 .

15 g 2 ,
3g 10 ÷ 400 ).
142 58 54 .
,
10 , , 300 000
. ,

6.3 6

1. ,

1,5
( =1,06 ). 10
, 1,5 , 4÷5 %
15-20 10 .
, , ,
.
2. ,

( )
10 ,
( =1,57 ). -55 +55 0 ,
,

.
 272
7

.
,
, , , , ,
.
,
,
,
.
,
, , .
,
– ( ,
)
, .
, ,

,
.

. 2000 .
100000 .
1,5
, , . 2005 ,
 273
. -
. 2005 392,9 100
, – 268,5 100 .

, 38% .
. 25%
( 25000 ) ,

,
.

. ,

, .

,
.

.
,
, , ,
.
 274
7.1
« » « »

( . 5)
» [167]

(670, 808 950 ).

7.1 -

,
,
, 3, 4 5 .
,
. 7.1, .

, ,
(
10 )
. ,
, ,
 275
,
.
2000 .
- « -15» ( . . 7.2)
15
( . . 29/05020400/1005-00 27.09.2000 .).

7.2 - « -15»

« -15»
,

. «
. . » ( . .- )
[168 - 170].

( , , ).
( ) « -15»
.

.
.
2004 .
« -2» ( . .
 276
29/05010104/5958-04 26.01.2004 .).
670
2
. « -2»

6
: , ,
, , , ,
, , ).
2006 .
»( . . 022 2006/3307-06 16.06.2006 .)
– , , ( .
7.3).

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