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....................................................................................... 20

2.1

1. .................................................................................... 20

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2. ................................... 34

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2.5

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, 2007, 416 .
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. .: : . , 2008, 365
.
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XXI . .: , 2003, 336.

6.

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. .., .. . , 2006, 552 .

:
1.

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10 . .: . 1977-1978 .
10

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. .: . 2000, 672 .
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. .: "", 2006, 325 .

7.

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, 2007, 336 .
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336 .
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. .: , 2008, 456 .
10.

. ., ., . ./ ..
.., .. .. . . .: , 2002,
292.
11.

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.- .:,1984, 472 .
12.

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.. . .: , 2005, 688 .
13.

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. :
, 2005, 240 .
11

14.

.-. : .

. . - : , . , 1998, 334 .
15.

.. . .

.: . 1987, 263.
16.

. . .: , 1976, 781 .

17.

.., .., .., ..,

.. . .: , 2005, 688 .
18.

- : . . /

. .. , .. . .: , 1989, 582
19.

.., .., ..

.- .:,1984, 472 .
20.

, 2006 .

21.

., .

. 1986 .,
, 1988, .154, .2, . 261-278
22.

., .

. .: , 1979, 512 .
23.

.., .. . .:

, 2001, 234 .
24.

.. , .. , .. . : ,
2001, 232 .

1.5
1.

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1) , 2) , 3) , 4)

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1) C60La@, 2) @C60La, 3). La@60 ,4) C60@La.

27.

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2
2.1 1.
?
Nano - . nano
10-9.

,
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.
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, .. 15-20 .

20

predominance of
interfacial phenomena

quantum mechanics

.
,
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:
.

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.
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= h/p, ( / ),
,
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.

21


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.
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.
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.


:
S/V = (4 r2)/(4/3 r3) = 3/r ~ 1/r
,
.


100 . .
, .

.
,


.
22

 ,
.

Rhle, M. / Gleiter, H. (eds.) Interface

Controlled Materials Euromat 99 (Volume 9) 1.
Edition

June

2000

149.- Euro / 220.- SFR 2000. XI, 334 Pages,

Hardcover
ISBN 3-527-30191-7 - Wiley-VCH, Weinheim

,
( , , ,
) ,
.

- National Nanotechnology
Initiative (USA):
,
,
.
1
nm

(10-9

m)

10-9 10-7 m (1 -100 nm) .
(10 nm 1,000 ).
,

23

 , ,
, .
:

- .

, , , .

.


,
,
,

1-100 (. , . . ).
(nanoscience)

.
:

(Norio Taniguchi) 1974 .
, 2000 .
.
(N. Taniguchi, "On the Basic Concept of 'Nano-Technology'," Proc. Intl.
Conf. Prod. Eng. Tokyo, Part II, Japan Society of Precision Engineering, 1974)


. (1981 .);
24

 - ,
, , ..

( ),
.
-
( ) (low-dimensional
subject). (,
). ,

.
( )
, , ,
100 .

(.. ).

()
.

.

10-100
: ,
,

, ,
..
25

Fe. [Handbook of Nanoscience,

Engineering and Technology. CRC Press, 2002].
"
2008 - 2010 "

"

2008

2010 ",

2 2007 498
2008 - 2010 ( . ) 27733 .
,
24944,6 .

;
;
;
;
26

 ;
;
;
;
.

" ".
,

()


.
.. -

2007 .
2007 .
130 ,
.
2008 800

300 . 70
, 2008
.
27



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, .
(Drug delivery):
- (),
-
,
-
()
.
:

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, , .
.

28

4000
,

.
, , ,

.
( . , .,, 1956, .9-24)

4000

(, , , ), .

(23-79 . . .) (. 40120 . ).

. , , ,
. .

29

29 1959 .

.
. There's Plenty of Room at the Bottom,
, .
. , ,
,
.
.
.,
1981 .
(). 1986 .
:
.

,
.

Molecular

Machinery

Nanosystems

Manufacturing

and

Computation 1992
.

30


( - ),
,
, ..
- 30
1939

.
, 1987 .
. .

.
-
,
.
,
- ,
-

..,

2000

1984 .
2000

.
: - (Al As - Ga
As).
31


(1898, 1972, )
-, ,

500
.
: ,
,
.

1928
,
.

. ... 1941 .

...



. 1950-
-

.
(, . ) 1958 .
(.. , .. , .. .).
32

( .., .., ..
.- .:,1984.- 472 ).
.. :
(190493) , .

, - .
..

(1906
2002). .

,
Ni3Al


.
(1984)

.
..
.
33

 1
1.

Feynman Richard P.: Classic talk that Richard Feynman gave on

December 29th 1959 at the annual meeting of the American Physical Society at
the California Institute of Technology (Caltech). There's Plenty of Room at the
Bottom. http://en.academic.ru/dic.nsf/enwiki/14388
2.

. ., ., . ./ . .
.., .. .. . . .: , 2002.292.
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Nanotechnology - Updated and Expanded. WOWIO Books, 2007. - 646 p.

4.

National Nanotechnology Initiative USA. http://www.nano.gov/

5.

"

2008 - 2010 ". http://www.fasi.gov.ru/fcp/nano/

6.

. . . . .:

. , 2005. -134 .

2.2 2.
:
.
.

-.

.
, .

34

).

.
.
. ,
.

( ).

:

(J.W.Gibbs)

,
.
- (Gugenhiem)
.
,
.

..
:

35

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, , ,
,

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.
,
.

-,

.

.

10
1 .

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(cluster)

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( 1 ),
,
.

36


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.

1871 . ,

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().

- :

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.

, -
,
37

, - ,
,
.


- ,

..

.

()- Pr
- r
:

P = 2/r
P = Pr P
Pr ()
P
P

, , ,
.

38

 (.)
, 1824-1907,
( , Kelvin),
. -.
- -. (1851)
(1896) . 0


Pj :

ln (Pj/Pi) = 2vi/rRT
vi i-
:

: = 72 /

r = 1nm = 54 /, 20

-
C -
.
d
:

Tm = Tm - T(d) = 6sl Tm /(d Hf)

:
Tm - ,
39

T(d) - ,
sl - Hf -
( ).
, sl
, Hf .
?

.
( )

40

.
.

.
- (-)

- ()

.
y = 0 + k/d
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) d .
d 50
.

50

d,

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41

Top down

Bottom up

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,

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42



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.

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43

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1 ( ).

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.
, ,
, .

.

, - " ".
( )
.
(Ilya Prigogine)
25
1917, 1921
. ,
.

(1977)

"

".

. 28 2003 . .
.

44

-,
, , 1977 .
"", .
( . ).
.

,
,
.

()

:

: ,
. ;

45

 : ,
(
);
:
, ,
;
:
, , ;

(. fractus ) ,

1975
.

,
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, .

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.

(). ,
.
. . , ,

46

(. 1). ,
, . ,
.

1. ,
, .

, ,
2,
.

.

-
:

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()

kf

, Df - .

,

47

, , .

:
:


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, , -,
.
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. ,
.

48


, ,
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, .
.
,
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.
,
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).
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49

 , .
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.
,
. , , ..
50

,
, .


,
, .
DLA,
.
.

, , , ()
(, ) .

.
-
, , (,
) . (), .,
. . 1983 . -
.

,
, ,
.

. .

51

D = 1,68 2,46

- 1,44

1,78. ,

,
, .

.
,
, , .
, ,
, .

2
1.

.. . .:- , 2006. 336.

2.

., .

. .: , 1979.
3.

.., .. . .:

, 2005. -192.
4.

.. ., ... . : , 2006
52

5.

: . . .: ,
1985. 423 ., .
6.

. .: , 1996. 622 .

2.3 3.

( )
(, )
( -
)


, .

.

( )

( )

(

)

53

( , ..)

( )
10-7 10-10
1 = 133,322


( )
.

,
.
, 200400 , 0,15-0,19 ,
,
.

,
.

54

.
(A High Resolution Transition Electron Micrograph of Samarium Oxide Inside a
Multi-Walled Carbon Nanotube)

Scanning Electron Microscope, SEM

(1-10 ) , ().
:




()

.
(

55


).
.. ,
.


-
().
()

.

.

,
.
-
, .

- ,
,
0,1 .
(0.1- 0,5 ).

56

( , ,
,
).

0,06
, = 1 ,
.
.


.

(Scanning Probe Microscopy (SPM),

.
:
(, . scanning tunneling
microscope, STM),
.
, - , ,
. SFM,, . - Atomic Force Microscopy, AFM)
.
( ),
.



.

57


,
,
, ,
.

(G.Binnig, ) (G.Rohrer,
) IBM,
, , .
1982
20.09.1979 .
1986 .
,
. : ., ..

58

 .
. , 1988,.154,.2, 261-278.
Topografiner AFM

(Russell Young) 1965

1971 [currently the National Institute
of Standards and Technology (NIST)].

1966

, 1971
, Topografiner',
.
3
.

3-5 .

,
.
,
,
.

59

 , ,

(CH3)2SiCI2,
.


.

G.Binning, C.F.Quate, Ch.Gerber,
Phys.Rev.Lett.56,9,1986,930-933.
B,


.
60



,

.
,

z.

.
10 1 .
,
,

. ,
, , (
).

61

 , ,
, .
.

.
,
,

.

,
, ,
.. ..

, , 2020 .

:
.

.
.

62

 .


.

,
.

.

.

(. NT-MDT).

(., NT-MDT)
63

, ,
,
.
.

, ..
.

STM image,
35 nm x 35 nm, of
single substitutional Cr
impurities (small
bumps) in the Fe(001)
surface

STM image,
7 nm x 7 nm,
of a single zig-zag chain
of Cs atoms (red) on the
GaAs(110) surface
(blue).

64

-
.
IBM :
Binnig, G., Quate, C.F., and Gerber, Ch. (1986) Atomic force microscope. Phys.
Rev. Lett. 56(9), 930-933.

()
10 50 .
1-5 ,
, .

.


.

-.
,
,
.
, - .

65

,

,
F , .. :
= C-1 F
,
.
.

,
,
.
.
66


2.5 x 2.5
"The tip-sample interaction
in atomic force microscopy
and

its

implications

biological
Ph.D.

thesis

for

applications",
by

David

Baselt, California Institute

of Technology.

,
.
,
.
.




,
,

,

67

NanoEducator

- .
. NT-MDT, , ,
, http://ru.ntmdt.ru/

..

68

..

 Veeco

100

69


(, ),
, ,


,
, CD/DVD

3
1.

.,

. : , 2004.- 384.
2.

., ..

. 1986 .,
, 1988, .154, .2, 261-278.
70

3.

..

, 2005. - 152.

2.4

4.

.
.
-
:
E ~ 2/2m*a2

m* - .
( = 25 )
=1, E = 3,410-4 ,
.
~ 1, E = 340 ,

.
.

:

:

,

71

 ,
.

,
,
.
, .
, , .

,
.
:
, .
,

GaAs - Alx Ga1 - x As,
. x , ,
0,15 0,35.
,

72

 ,
,
(2D).
(1D),
, (quantum wires),
(0D) (quantum dot).
2D- 1D-
.

,
, , ,
.
~4 ~20 .

()

.
InAs GaAs.

(J.Marquez, L.Geelhaar, and K.Jacobi. Appl.Phys.Lett. v.78, 2309 (2001))

73

,
( ).
.

Ec Ev - () (v), Eg -
. E2c (
) .

,
, .

,
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.
,
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74

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75



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76

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III - V (InP, GaP, InAs).

- : CdSe (ZnS) -
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, . .
.

/ InAs|GaAs InP|GaInP.

77

 ,
.

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.
78

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.

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(molecular beam epitaxy, MBE)

79

(metal-organic vapor epitaxy, MOVPE)

(-)

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, ,

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80

InAs

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GaAs

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81


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83

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, , 0,20,5 .
105
.

. -
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GaAs, . ,
,
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GaAs .
AlGaAs (),
.
, AlGaAs

84

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.

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~1

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~ 0,5

< 0,2

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EUV-
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Ti

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105

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0.1-20 /
2300-3800
103-106 /
10-200 /(2 )
0.2-1.2
800-1200

106


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a-
.

107



1891 . ,
,
.

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.
Ostwald W. Lehrbuch der allgemeinen Chemie. Bd.2 Stchiometrie. Engelmann,
Leipzig, 1891, 1163.
... . . ., 1902, 34, 811.


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, 2005. 416 .
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, 2005. -192.
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. .: , 2000. 272 .
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118

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: / . .. . 2003 80 .

2.6

6.

R.E.Smalley.

H.W.Kroto,

C60

J.R.Heath,

buckminsterfullerene.

S.C.OBrien,
Nature,

R.F.Curl

318,

162,

and
1985.

,
.
H.W.Kroto ()
. R.E.Smalley
()
(Si, GaAs).
.
1996 .
:
1970

1973 ,

1983 .. . -

119

1984 .. - 60 70

,
sp3-, sp2- sp- .

: sp3-
() - ; sp2- -
() ; sp- - - ()
.

120

(graphene) , sp
.
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.

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.
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. (
Science, 2009, 323,
610)

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.
-
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.

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: .
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123


.
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2 < n < 3:
- ,
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- (2 < n < 3).

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,
C60,

,
2,28

124

 , ?
Fuller, Richard Buckminster , -
, . 1930-
,
1950 1960- , ,
. -
(1954)
-
(1967).
1974 ":
".

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12- 2-
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20 ).
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180, 190, 240, 540 960 .

125

 60.

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60 0,3512 , -
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60 1200 - 1700 .
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255
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60 1,69 /3,
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. CS2 > C6H5CH3
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, .

126

 . ,
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:

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). ,
.

,
.

C60Cl6
The

Sussex

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Research
Centre

http://www.sussex.ac.uk/Users/kroto/
FullereneCentre/gallery/main.html

. ,
He@60,

90 .


127

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La@C70, La@C74 La@C82. ,
, , , , , , , ,
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-
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129

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. .
. . .
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W.Kratschmer, L.D.Lamb, K.Fostiropoulos and D.R. Huffman. Solid C60 a
new form of carbon. Nature, 347, 354, 1990. -
.

.

(,

). - ,
: 90%
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130

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.
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60 .
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, SigmaAldrich.

131

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132


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. , .26, 88 (1952).

100 .
1948 .
4, 26 24 1473 .

1957

.
1970- . .
. 1976 ., ,

.
1970-1980- (...)
.
1990- . ()

1987

.
Roger Bacon 1960s
(whiskers).

133

Thomas Ebbesen and P. M. Ajayan at NEC

,
. .
(cobalt,
nickel or iron) (single-walled
nanotubes)
Donald Bethune at IBM Corporation and Iijima.

.
.
-
1200 C Rice
University.
70%.
0,1 .

STM

image

nanotube
HOPG
structure

134

carbon

deposited
substrate.
of

clearly visible.

of

on

Atomic

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is

 ()
100 , .


:
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1200

135

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1200,

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,
. ,

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( )

,
. ,
:
XIX .

,
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(-, - ), ,
.
() .
Fe, Co, Ni,
.
,
1-2 ~ 10 .

136


(CVD)

CVD
(700-1000);
.
(PECVD)
Plasma Enhanced Chemical Vapor Deposition), PECVD

( 1200),
.
-

,
.
, thermal CVD ,
- (
).

137

 -
Thermal CVD.
, PECVD
,
,

.
PECVD
gd dc PECVD ( )
Hot filament PECVD (
)
rf PECVD ( - )
microwave PECVD ( - )
IC PECVD (inductively coupled) ( ).

CN-CVD-100.

microwave PECVD

(2.454.25 ) .

1 ; 2 ; 3 ; 4

138

6
7

; 8 1 2
, .


.
:

();
( Al2O3).


. :
1. ,
.
.
.
2. , .
.
, .
.
3. () .
4. () .

, ,
. (
139

 ,
). ,
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), - v (
), , - e ( ) f -
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, (
) 5p + 6(f - p),
(
).

- C60

C60, ().

,
. ,
: (b), ()
(d).
:
Armchair 1,33 /3
140

 Zigzag 1,34 /3
Chiral 1,40 /3

Material

Young's Modulus Tensile Strength Elongation

(TPa)

SWNT

(GPa)

Break (%)

~1 ( 1 5)

13-53E

16

0.94T

126.2T

23.1

0.94T

94.5T

15.6-17.5

Armchair

at

SWNT
Zigzag
SWNT
Chiral

0.92

SWNT
MWNT

0.8-0.9E

150

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~0.2

~0.65-1

15-50

Kevlar

~0.15

~3.5

~2

KevlarT

0.25

29.6

Steel

Experimental observation

Theoretical prediction

(Kevlar) ,

( ). ..DuPont
1965 ., 1970-x . .

141

.
,
,
.
.

UCl4,

20 , ()

, ()
142

:
1.
2.
Gd@C60@SWNT, .. "Gd C60
(Single Wall NanoTube)
K.Hirahara

et

al,

Phys.

Rev.

Lett.

85

(2000)

5384

http://focus.aps.org/v6/st25.html -

National

University

of

Singapore

Si, SiO2/Si, , , GaAs, Cu,

.
( CH4 H2)
,

(NiFe, CoFe, FeMn, CoCrPt)

143

 . - , .

.

) .

1.

2.

3.

(, .)

4.

5.

, ( )

6.

()

1.

.
2.

, .
3.

, .

, ,
,
.
4.

144

 ,
,

. ,
(8, 0)
-,
(7, 1). (8,
0) 1,2 ,
(7, 1) ,
. ,

.


( ) ,
- .

.


-
.
.
.. . ,. 73, 5, . 389 (2003)

145

1012-1014 /2.

.

, (1 ,
4,37 ).
, CVD-
, ,
.
, 4
/2 2000 .
... ,.73, 5, .389 (2003)

-
,
. , ,
.

146


.
-
.
E 7000
. ( E = 200 520
).

.
16%.

.
, , .
1
.

The images of plasmid

DNA

molecules

adsorbed

on

freshly

cleaved mica surfaces

in

mM

solutions.
measurements
taken

147

with

MgCl2
The
were
single

carbon nanotube AFM tips.

J.Li, A.Cassell, H.Dai, Stanford University
,

.
,

.
600 2/.

.
,
, Sigma-Aldrich Co.

6
1.

. .

XXI . .: . 2003. 336.

2.

// .., .., ..,

.., .. .: , 2005. 688 .

3.

..

. .: . , 2006.-293 .
4.

.. . . - .:

, , 2006. 376 .
5.

..

. .: , 2006. 592 .
6.

http://nanotube.msu.edu/

148